公开(公告)号：US10689746B2

公开(公告)日：2020-06-23

申请号：US15857365

申请日：2017-12-28

Applicant: Samsung Display Co., Ltd.

Inventor： Choong-Ho Lee ,  Jung-Min Lee

IPC: C23C14/04 ,  C23C16/04 ,  C23C14/24

Abstract: A thin film deposition apparatus used to produce large substrates on a mass scale and improve manufacturing yield. The thin film deposition apparatus includes a deposition source; a first nozzle disposed at a side of the deposition source and including a plurality of first slits arranged in a first direction; a second nozzle disposed opposite to the first nozzle and including a plurality of second slits arranged in the first direction; and a barrier wall assembly including a plurality of barrier walls arranged in the first direction so as to partition a space between the first nozzle and the second nozzle.

公开(公告)号：US09873937B2

公开(公告)日：2018-01-23

申请号：US14838219

申请日：2015-08-27

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Choong-Ho Lee ,  Jung-Min Lee

IPC: C23C14/04 ,  C23C16/04 ,  C23C14/24

CPC classification number: C23C14/04 ,  C23C14/24 ,  C23C14/243 ,  C23C16/04 ,  C23C16/042 ,  Y10T29/49826 ,  Y10T29/49828

Abstract: A thin film deposition apparatus used to produce large substrates on a mass scale and improve manufacturing yield. The thin film deposition apparatus includes a deposition source; a first nozzle disposed at a side of the deposition source and including a plurality of first slits arranged in a first direction; a second nozzle disposed opposite to the first nozzle and including a plurality of second slits arranged in the first direction; and a barrier wall assembly including a plurality of barrier walls arranged in the first direction so as to partition a space between the first nozzle and the second nozzle.

公开(公告)号：US20150155489A1

公开(公告)日：2015-06-04

申请号：US14617861

申请日：2015-02-09

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Choong-Ho Lee ,  Jung-Min Lee ,  Jun-Sik Oh

IPC: H01L51/00 ,  C23C16/46 ,  C23C16/455 ,  H01L51/56

CPC classification number: H01L51/001 ,  C23C14/042 ,  C23C14/12 ,  C23C14/24 ,  C23C14/243 ,  C23C14/246 ,  C23C14/26 ,  C23C16/455 ,  C23C16/46 ,  H01L51/0008 ,  H01L51/5012 ,  H01L51/56 ,  H05B33/10

Abstract: A thin film deposition apparatus including a deposition source having a crucible to contain a deposition material and a heater to heat and vaporize the deposition material; a nozzle unit disposed at a side of the deposition source along a first direction and having a plurality of nozzle slits to discharge the deposition material that was vaporized; a plurality of emission coefficient increasing units disposed toward the nozzle unit within the deposition source and increasing a quantity of motion of the deposition material that is discharged toward the nozzle unit; a patterning slit sheet disposed opposite to the nozzle unit and having a plurality of patterning slits arranged along the first direction; and a barrier plate assembly disposed between the nozzle unit and the patterning slit sheet along the first direction, and having a plurality of barrier plates that partition a space between the nozzle unit and the patterning slit sheet into a plurality of sub-deposition spaces.

Abstract translation: 一种薄膜沉积设备，包括：沉积源，其具有用于容纳沉积材料的坩埚和用于加热和蒸发沉积材料的加热器; 沿着第一方向设置在所述沉积源的一侧的喷嘴单元，并且具有多个喷嘴狭缝以排出被蒸发的沉积材料; 多个排放系数增加单元，其设置在所述沉积源内的所述喷嘴单元处，并且增加朝向所述喷嘴单元排出的所述沉积材料的运动量; 与所述喷嘴单元相对设置并具有沿着所述第一方向布置的多个图案化狭缝的图案化缝隙片; 以及沿着第一方向设置在喷嘴单元和图案化缝隙片之间的阻挡板组件，并且具有将喷嘴单元和图案化缝隙片之间的空间分隔成多个次沉积空间的多个阻挡板。

公开(公告)号：US20140038327A1

公开(公告)日：2014-02-06

申请号：US14047897

申请日：2013-10-07

Applicant: Samsung Display Co., Ltd.

Inventor： Jung-Min Lee ,  Choong-Ho Lee

IPC: H01L51/56 ,  H01L51/52

CPC classification number: H01L51/56 ,  B23K1/0056 ,  H01L51/524 ,  H01L51/5246 ,  H01L2251/566

Abstract: A frit sealing system and a method of manufacturing an organic light-emitting display (OLED) using the frit sealing system are disclosed. In one embodiment, the frit sealing system includes: a thermal expansion film formed on the second substrate to pressurize the second substrate when heat is applied to the frit and thermal expansion film, wherein the frit is interposed between the first and second substrates and a mask formed on the thermal expansion film.

Abstract translation: 公开了玻璃料密封系统和使用玻璃料密封系统制造有机发光显示器（OLED）的方法。 在一个实施例中，玻璃料密封系统包括：热量膨胀膜，其形成在第二基板上，以在对玻璃料和热膨胀膜施加热量时对第二基板加压，其中玻璃料置于第一和第二基板之间， 形成在热膨胀膜上。

公开(公告)号：US20130337588A1

公开(公告)日：2013-12-19

申请号：US13899531

申请日：2013-05-21

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Jung-Min Lee ,  Choong-Ho Lee

IPC: H01L51/56

CPC classification number: H01L51/56 ,  C23C14/042 ,  H01L51/0011

Abstract: A deposition mask for forming an organic layer pattern of an organic light emitting diode (OLED) display includes a base member having a first surface facing a substrate of the OLED display, and a second surface facing a side opposite to the first surface, and including a plurality of openings passing through the first surface and the second surface for forming the organic layer pattern. The opening has a pair of first side walls and a pair of second side walls. Each side wall of the openings has an inclination surface inclined with respect to a thickness direction of the base member, and when measuring an inclination angle of the inclination surface with reference to the first surface of the base member, the inclination angle of the first side wall and the inclination angle of the second side wall are different from each other.

Abstract translation: 用于形成有机发光二极管（OLED）显示器的有机层图案的沉积掩模包括具有面向OLED显示器的基板的第一表面的基底构件和面向与第一表面相对的一侧的第二表面，并且包括 穿过第一表面和第二表面的多个开口以形成有机层图案。 开口具有一对第一侧壁和一对第二侧壁。 开口的每个侧壁具有相对于基底构件的厚度方向倾斜的倾斜表面，并且当测量相对于基底构件的第一表面的倾斜表面的倾斜角度时，第一侧的倾斜角 壁和第二侧壁的倾斜角度彼此不同。

公开(公告)号：US20130280981A1

公开(公告)日：2013-10-24

申请号：US13756418

申请日：2013-01-31

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Jung-Min Lee

IPC: H05B33/10

CPC classification number: H05B33/10 ,  B23K26/066 ,  B23K26/206 ,  H01L51/5246

Abstract: A laser sealing device includes a laser beam generation device for irradiating a laser beam, a shutter positioned on a beam path of the laser beam and for blocking a portion of the laser beam, and a substrate supporter for supporting a substrate on which a frit is formed, the frit being configured to be irradiated with the laser beam passing through the shutter, wherein the shutter has a circular aperture for transmitting the laser beam, and comprises a blocking portion defining a portion of the aperture.

Abstract translation: 激光密封装置包括用于照射激光束的激光束产生装置，位于激光束的光束路径上并用于阻挡激光束的一部分的快门以及用于支撑玻璃料的基板的基板支撑件 所述玻璃料被配置为被穿过所述快门的激光束照射，其中所述遮板具有用于透射所述激光束的圆形孔，并且包括限定所述孔的一部分的阻挡部分。