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公开(公告)号:US11920233B2
公开(公告)日:2024-03-05
申请号:US18173688
申请日:2023-02-23
Applicant: Samsung Display Co., Ltd.
Inventor: Choong-Ho Lee , Jung-Min Lee
CPC classification number: C23C14/04 , C23C14/24 , C23C14/243 , C23C16/042 , C23C16/04 , Y10T29/49826 , Y10T29/49828
Abstract: A thin film deposition apparatus used to produce large substrates on a mass scale and improve manufacturing yield. The thin film deposition apparatus includes a deposition source; a first nozzle disposed at a side of the deposition source and including a plurality of first slits arranged in a first direction; a second nozzle disposed opposite to the first nozzle and including a plurality of second slits arranged in the first direction; and a barrier wall assembly including a plurality of barrier walls arranged in the first direction so as to partition a space between the first nozzle and the second nozzle.
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公开(公告)号:US20180119267A1
公开(公告)日:2018-05-03
申请号:US15857365
申请日:2017-12-28
Applicant: Samsung Display Co., Ltd.
Inventor: Choong-Ho Lee , Jung-Min Lee
CPC classification number: C23C14/04 , C23C14/24 , C23C14/243 , C23C16/04 , C23C16/042 , Y10T29/49826 , Y10T29/49828
Abstract: A thin film deposition apparatus used to produce large substrates on a mass scale and improve manufacturing yield. The thin film deposition apparatus includes a deposition source; a first nozzle disposed at a side of the deposition source and including a plurality of first slits arranged in a first direction; a second nozzle disposed opposite to the first nozzle and including a plurality of second slits arranged in the first direction; and a barrier wall assembly including a plurality of barrier walls arranged in the first direction so as to partition a space between the first nozzle and the second nozzle.
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公开(公告)号:US09660191B2
公开(公告)日:2017-05-23
申请号:US14617861
申请日:2015-02-09
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor: Choong-Ho Lee , Jung-Min Lee , Jun-Sik Oh
IPC: C23C14/24 , C23C14/26 , C23C16/455 , H01L51/00 , C23C14/04 , C23C14/12 , H01L51/56 , H05B33/10 , C23C16/46 , H01L51/50
CPC classification number: H01L51/001 , C23C14/042 , C23C14/12 , C23C14/24 , C23C14/243 , C23C14/246 , C23C14/26 , C23C16/455 , C23C16/46 , H01L51/0008 , H01L51/5012 , H01L51/56 , H05B33/10
Abstract: A thin film deposition apparatus including a deposition source having a crucible to contain a deposition material and a heater to heat and vaporize the deposition material; a nozzle unit disposed at a side of the deposition source along a first direction and having a plurality of nozzle slits to discharge the deposition material that was vaporized; a plurality of emission coefficient increasing units disposed toward the nozzle unit within the deposition source and increasing a quantity of motion of the deposition material that is discharged toward the nozzle unit; a patterning slit sheet disposed opposite to the nozzle unit and having a plurality of patterning slits arranged along the first direction; and a barrier plate assembly disposed between the nozzle unit and the patterning slit sheet along the first direction, and having a plurality of barrier plates that partition a space between the nozzle unit and the patterning slit sheet into a plurality of sub-deposition spaces.
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公开(公告)号:US09592570B2
公开(公告)日:2017-03-14
申请号:US13919641
申请日:2013-06-17
Applicant: Samsung Display Co., Ltd. , Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
Inventor: Doh-Hyoung Lee , Choong-Ho Lee , Sung-Sik Yun , Tong-Jin Park , Arnold Gillner , Nelli Hambach , Stephan Eifel , Jens Holtkamp , Lasse Büsing , Alexander Gatej
IPC: B23K26/067 , B23K26/073 , B23K26/06 , B23K26/36 , G02B27/09 , C23C14/04 , B23K26/40
CPC classification number: B23K26/0676 , B23K26/06 , B23K26/0624 , B23K26/064 , B23K26/0648 , B23K26/0652 , B23K26/066 , B23K26/073 , B23K26/36 , B23K26/361 , B23K26/362 , B23K26/402 , B23K2101/40 , B23K2103/30 , B23K2103/50 , C23C14/042 , G02B27/09
Abstract: A laser processing apparatus includes a laser generator for generating laser beams, a diffraction optic element for dividing the laser beam generated by the laser generator into a plurality of sub-laser beams, and a beam number controller for controlling the number of the plurality of sub-laser beams. Accordingly, the diffractive optic element that splits a laser beam generated by the laser beam generator into a plurality of sub-laser beams and the beam number controller that controls the number of sub-laser beams are provided so that the processing speed of a processing target can be improved and, at the same time, the number of laser beams can be promptly controlled, thereby promptly forming various patterns of the processing target.
Abstract translation: 激光加工装置包括:激光发生器,用于产生激光束;衍射光学元件,用于将由激光发生器产生的激光束分割成多个子激光束;以及光束数控制器,用于控制多个子激光束的数量 激光束。 因此,将由激光束发生器产生的激光束分割为多个子激光束的衍射光学元件和控制副激光束的数量的光束号控制器被设置成使得处理目标的处理速度 并且同时可以迅速地控制激光束的数量,从而迅速地形成处理目标的各种图案。
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公开(公告)号:US20150368784A1
公开(公告)日:2015-12-24
申请号:US14838219
申请日:2015-08-27
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor: Choong-Ho Lee , Jung-Min Lee
CPC classification number: C23C14/04 , C23C14/24 , C23C14/243 , C23C16/04 , C23C16/042 , Y10T29/49826 , Y10T29/49828
Abstract: A thin film deposition apparatus used to produce large substrates on a mass scale and improve manufacturing yield. The thin film deposition apparatus includes a deposition source; a first nozzle disposed at a side of the deposition source and including a plurality of first slits arranged in a first direction; a second nozzle disposed opposite to the first nozzle and including a plurality of second slits arranged in the first direction; and a barrier wall assembly including a plurality of barrier walls arranged in the first direction so as to partition a space between the first nozzle and the second nozzle.
Abstract translation: 一种薄膜沉积装置,用于大规模生产大型基板并提高制造产量。 薄膜沉积设备包括沉积源; 第一喷嘴,其设置在所述沉积源的一侧,并且包括沿第一方向布置的多个第一狭缝; 第二喷嘴,与所述第一喷嘴相对设置并且包括沿所述第一方向布置的多个第二狭缝; 以及阻挡壁组件,其包括沿所述第一方向布置的多个阻挡壁,以便分隔所述第一喷嘴和所述第二喷嘴之间的空间。
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公开(公告)号:US20140076869A1
公开(公告)日:2014-03-20
申请号:US13919641
申请日:2013-06-17
Applicant: Samsung Display Co., Ltd.
Inventor: Doh-Hyoung Lee , Choong-Ho Lee , Sung-Sik Yun , Tong-Jin Park
IPC: B23K26/067 , B23K26/073 , B23K26/06
CPC classification number: B23K26/0676 , B23K26/06 , B23K26/0624 , B23K26/064 , B23K26/0648 , B23K26/0652 , B23K26/066 , B23K26/073 , B23K26/36 , B23K26/361 , B23K26/362 , B23K26/402 , B23K2101/40 , B23K2103/30 , B23K2103/50 , C23C14/042 , G02B27/09
Abstract: A laser processing apparatus includes a laser generator for generating laser beams, a diffraction optic element for dividing the laser beam generated by the laser generator into a plurality of sub-laser beams, and a beam number controller for controlling the number of the plurality of sub-laser beams. Accordingly, the diffractive optic element that splits a laser beam generated by the laser beam generator into a plurality of sub-laser beams and the beam number controller that controls the number of sub-laser beams are provided so that the processing speed of a processing target can be improved and, at the same time, the number of laser beams can be promptly controlled, thereby promptly forming various patterns of the processing target.
Abstract translation: 激光加工装置包括:激光发生器,用于产生激光束;衍射光学元件,用于将由激光发生器产生的激光束分割成多个子激光束;以及光束数控制器,用于控制多个子激光束的数量 激光束。 因此,将由激光束发生器产生的激光束分割为多个子激光束的衍射光学元件和控制副激光束的数量的光束号控制器被设置成使得处理目标的处理速度 并且同时可以迅速地控制激光束的数量,从而迅速地形成处理目标的各种图案。
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公开(公告)号:US20200318228A1
公开(公告)日:2020-10-08
申请号:US16907695
申请日:2020-06-22
Applicant: Samsung Display Co., Ltd.
Inventor: Choong-Ho Lee , Jung-Min Lee
Abstract: A thin film deposition apparatus used to produce large substrates on a mass scale and improve manufacturing yield. The thin film deposition apparatus includes a deposition source; a first nozzle disposed at a side of the deposition source and including a plurality of first slits arranged in a first direction; a second nozzle disposed opposite to the first nozzle and including a plurality of second slits arranged in the first direction; and a barrier wall assembly including a plurality of barrier walls arranged in the first direction so as to partition a space between the first nozzle and the second nozzle.
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公开(公告)号:US09604314B2
公开(公告)日:2017-03-28
申请号:US14291833
申请日:2014-05-30
Applicant: Samsung Display Co., Ltd.
Inventor: Yoon-Chan Oh , Choong-Ho Lee
CPC classification number: B23K26/38 , B23K26/10 , B23K26/361 , B23K26/362 , B23K37/0408 , G03F7/12 , G03F7/70733 , G03F7/70783 , H01L51/56
Abstract: A method of forming a pattern on a mask sheet using a laser beam includes determining a target scan line with respect to the mask sheet, which corresponds to a position of the pattern on a final mask sheet, determining a correction scan line with respect to the mask sheet, along which the laser beam is scanned to form the pattern of the final mask sheet, applying a counter force to the mask sheet, fixing the mask sheet onto a mask frame while the counter force is applied to the mask sheet, scanning the laser beam along the correction scan line, and releasing the counter force which is applied to the mask sheet.
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9.
公开(公告)号:US20150221887A1
公开(公告)日:2015-08-06
申请号:US14688303
申请日:2015-04-16
Applicant: Samsung Display Co., Ltd.
Inventor: Jung-Min Lee , Choong-Ho Lee , Kie Hyun Nam
CPC classification number: H01L51/524 , B82Y10/00 , H01L27/3258 , H01L27/3276 , H01L51/0048 , H01L51/5243 , H01L51/5246 , H01L51/525
Abstract: A display device includes a substrate, a display unit formed on the substrate, a sealing substrate bonded to the substrate by a bonding layer surrounding the display unit, the sealing substrate comprising a complex member and an insulating member, wherein the complex member has a resin matrix and a plurality of carbon fibers and the insulator is connected to an edge of the complex member and comprises a penetration hole, a metal layer disposed at one side of the sealing substrate wherein the one side faces the substrate, and a conductive connection unit filling in the penetration hole and contacting the metal layer. The complex member and the insulator may be coupled by tongue and groovecoupling along a thickness direction of the sealing substrate where the protrusion-groove coupling structure is top-to-bottom symmetric and the insulator may have a thickness identical to that of the complex member.
Abstract translation: 显示装置包括基板,形成在基板上的显示单元,通过围绕显示单元的接合层粘合到基板的密封基板,密封基板包括复合部件和绝缘部件,其中复合部件具有树脂 基体和多个碳纤维,绝缘体连接到复合构件的边缘,并且包括穿透孔,设置在密封基板的一侧的金属层,其中一侧面向基板,以及导电连接单元填充 在穿透孔中并与金属层接触。 复合构件和绝缘体可以沿着密封衬底的厚度方向通过舌和槽耦合来耦合,其中突出沟槽联接结构是从上到下对称的,并且绝缘体可以具有与复合构件的厚度相同的厚度。
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10.
公开(公告)号:US20140312546A1
公开(公告)日:2014-10-23
申请号:US14043696
申请日:2013-10-01
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor: Choong-Ho Lee , Sung-Sik Yun , Tong-Jin Park , Doh-Hyoung Lee
CPC classification number: B23K37/0408 , B23K26/0624 , B23K26/18 , B23K26/382
Abstract: A metal sheet holding device for manufacturing a pattern mask used in manufacturing processes of a flat panel displays include a first holder and second holder. The first holder includes an adhesive layer contacting edge portions of a metal sheet, and a first frame supporting the metal sheet using the adhesive layer. The second holder includes a second frame below the first frame, a supported plate positioned at the center of the second frame, and an adhered unit positioned between the central portion of a metal sheet and the supported plate. The adhered unit generates an electrostatic force or a magnetic force to hold the central portion of the metal sheet.
Abstract translation: 用于制造平板显示器的制造工艺中使用的图案掩模的金属片保持装置包括第一保持器和第二保持器。 第一保持器包括接触金属片的边缘部分的粘合剂层和使用粘合剂层支撑金属片的第一框架。 第二保持器包括位于第一框架下方的第二框架,位于第二框架中心的支撑板和位于金属板的中心部分与支撑板之间的粘合单元。 附着单元产生静电力或磁力以保持金属片的中心部分。
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