公开(公告)号：US11604136B2

公开(公告)日：2023-03-14

申请号：US17204059

申请日：2021-03-17

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Jaehwang Jung ,  Yasuhiro Hidaka ,  Mitsunori Numata ,  Wookrae Kim ,  Jinseob Kim ,  Myungjun Lee

IPC: G01N21/21 ,  G01N21/95 ,  G02B27/10

Abstract: Provided is a pupil ellipsometry measurement apparatus configured to measure an object, the pupil ellipsometry measurement apparatus including a stage configured to support the object to be measured, a light source unit configured to generate and output light, an irradiation optical system configured to focus the light from the light source unit on the object, a first detector configured to detect an image of reflected light from the object on an imaging plane, a self-interference generator (SIG) configured to generate self-interference with respect to the reflected light, a second detector configured to detect a hologram image of interference light of the SIG on a pupil plane, and a processor configured to reconstruct reflectance information based on the hologram image, and measure the object.

公开(公告)号：US11314205B2

公开(公告)日：2022-04-26

申请号：US16225638

申请日：2018-12-19

Applicant: Samsung Electronics Co., Ltd.

Inventor： Myungjun Lee ,  Wookrae Kim ,  Gwangsik Park ,  Changhoon Choi

IPC: G03H1/04 ,  G02B21/36 ,  G03H1/00

Abstract: A low-cost digital holography microscope (DHM) that is capable of performing inspection at high speed while accurately inspecting an inspection object at high resolution, an inspection method using the DHM, and a method of manufacturing a semiconductor device by using the DHM are provided. The DHM includes: a light source configured to generate and output light; a beam splitter configured to cause the light to be incident on an inspection object and output reflected light from the inspection object; and a detector configured to detect the reflected light, wherein, when the reflected light includes interference light, the detector generates a hologram of the interference light, and wherein no lens is present in a path from the light source to the detector.

公开(公告)号：US20210164919A1

公开(公告)日：2021-06-03

申请号：US17022249

申请日：2020-09-16

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Kyungwon Yun ,  Taewan Kim ,  Seungbeom Park ,  Jaehyeon Son ,  Myungjun Lee ,  Jaehwang Jung

IPC: G01N21/956 ,  G01N21/45

Abstract: An inspection apparatus includes: a light source that generates and outputs light; a stage on which an inspection target is arranged; an irradiation optical system that irradiates light from the light source to the inspection target; a detector that receives the light diffracted from the inspection target and generates diffraction image; and a detector moving device configured to move the detector on a z-axis, which is an optical axis of the light, and an x-y plane perpendicular to the z-axis. Furthermore, while the detector moves on the x-y plane and the z-axis through the detector moving device, the detector generates a plurality of the diffraction images with different positions on the x-y plane and the z-axis with respect to the inspection target, and thus simultaneously implements phase retrieval and super resolution of diffraction images.