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公开(公告)号：US20210200148A1
公开(公告)日：2021-07-01
申请号：US17060526
申请日：2020-10-01
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor： Seungbeom Park , Sungmin Park , Jaehyeon Son , Heejun Ahn , Myungjun Lee
Abstract: Provided is a holographic microscope including an input optical system configured to emit polarized input beam, a first beam splitter configured to emit an object beam by reflecting a portion of the polarized input beam, and emit a reference beam by transmitting a remaining portion of the polarized input beam, a reference optical system configured to separate the reference beam into a first reference beam and a second reference beam, a camera configured to receive the first reference beam and the second reference beam and the object beam that is reflected by an inspection object, the camera including a micro polarizer array, wherein a first polarization axis of the first reference beam is perpendicular to a second polarization axis of the second reference beam.
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公开(公告)号：US20230408401A1
公开(公告)日：2023-12-21
申请号：US18194909
申请日：2023-04-03
Applicant: Samsung Electronics Co., Ltd.
Inventor： Jaehyeon Son , Jinwoo Ahn , Juntaek Oh , Hankyoul Moon , Myungjun Lee , Eunsoo Hwang
CPC classification number: G01N21/211 , G01J4/04 , G01B11/24 , G01N2021/213
Abstract: In a method of measuring an alignment error, light is incident on a surface of a reference wafer having a known polarization transmittance at the surface. An image signal is obtained from the reference wafer at a set of angles including a first combination of values of a polarizer angle and an analyzer angle. Polarization transmittance of optical equipment including a polarizer and an analyzer is calculated from the image signal of the reference wafer. Light is incident on a surface of a measurement target wafer having a structure on the surface thereof. An image signal is obtained from the measurement wafer at a set of angles including a second combination of values of the polarizer angle and the analyzer angle. At least a portion of Mueller matrix is generated from the image signal of the measurement wafer.
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公开(公告)号：US20210164919A1
公开(公告)日：2021-06-03
申请号：US17022249
申请日：2020-09-16
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor： Kyungwon Yun , Taewan Kim , Seungbeom Park , Jaehyeon Son , Myungjun Lee , Jaehwang Jung
IPC: G01N21/956 , G01N21/45
Abstract: An inspection apparatus includes: a light source that generates and outputs light; a stage on which an inspection target is arranged; an irradiation optical system that irradiates light from the light source to the inspection target; a detector that receives the light diffracted from the inspection target and generates diffraction image; and a detector moving device configured to move the detector on a z-axis, which is an optical axis of the light, and an x-y plane perpendicular to the z-axis. Furthermore, while the detector moves on the x-y plane and the z-axis through the detector moving device, the detector generates a plurality of the diffraction images with different positions on the x-y plane and the z-axis with respect to the inspection target, and thus simultaneously implements phase retrieval and super resolution of diffraction images.
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Patent Agency Ranking
公开(公告)号：US11428947B2
公开(公告)日：2022-08-30
申请号：US16848169
申请日：2020-04-14
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor： Myungjun Lee , Seungbeom Park , Jaehyeon Son , Jaehwang Jung , Taewan Kim , Kyungwon Yun
Abstract: A super-resolution holographic microscope includes a light source configured to emit input light, a diffraction grating configured to split the input light into first diffracted light and second diffracted light, a mirror configured to reflect the first diffracted light, a wafer stage arranged on an optical path of the second diffracted light and on which a wafer is configured to be arranged, and a camera configured to receive the first diffracted light that is reflected by the mirror and the second diffracted light that is reflected by the wafer to generate a plurality of hologram images of the wafer.
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公开(公告)号：US20210080743A1
公开(公告)日：2021-03-18
申请号：US16848169
申请日：2020-04-14
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor： Myungjun LEE , Seungbeom Park , Jaehyeon Son , Jaehwang Jung , Taewan Kim , Kyungwon Yun
Abstract: Provided is a super-resolution holographic microscope including a light source configured to emit input light, a diffraction grating configured to split the input light into first diffracted light and second diffracted light, a mirror configured to reflect the first diffracted light, a wafer stage arranged on an optical path of the second diffracted light and on which a wafer is configured to be arranged, and a camera configured to receive the first diffracted light that is reflected by the mirror and the second diffracted light that is reflected by the wafer to generate a plurality of hologram images of the wafer.
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6.发明公开公开(公告)号：US20240353795A1
公开(公告)日：2024-10-24
申请号：US18736084
申请日：2024-06-06
Applicant: Samsung Electronics Co., Ltd.
Inventor： Seungbeom PARK , Sungmin Park , Jaehyeon Son , Heejun Ahn , Myungjun Lee
CPC classification number: G03H1/0005 , G01N21/9501 , G01N21/9503 , G02B21/0016 , G03H1/0443 , G03H1/16 , H01L22/12 , G03H2001/005 , G03H2001/045 , G03H2001/0452
Abstract: Provided is a holographic microscope including an input optical system configured to emit polarized input beam, a first beam splitter configured to emit an object beam by reflecting a portion of the polarized input beam, and emit a reference beam by transmitting a remaining portion of the polarized input beam, a reference optical system configured to separate the reference beam into a first reference beam and a second reference beam, a camera configured to receive the first reference beam and the second reference beam and the object beam that is reflected by an inspection object, the camera including a micro polarizer array, wherein a first polarization axis of the first reference beam is perpendicular to a second polarization axis of the second reference beam.
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公开(公告)号：US12038718B2
公开(公告)日：2024-07-16
申请号：US17060526
申请日：2020-10-01
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor： Seungbeom Park , Sungmin Park , Jaehyeon Son , Heejun Ahn , Myungjun Lee
CPC classification number: G03H1/0005 , G01N21/9501 , G01N21/9503 , G02B21/0016 , G03H1/0443 , G03H1/16 , H01L22/12 , G03H2001/005 , G03H2001/045 , G03H2001/0452
Abstract: Provided is a holographic microscope including an input optical system configured to emit polarized input beam, a first beam splitter configured to emit an object beam by reflecting a portion of the polarized input beam, and emit a reference beam by transmitting a remaining portion of the polarized input beam, a reference optical system configured to separate the reference beam into a first reference beam and a second reference beam, a camera configured to receive the first reference beam and the second reference beam and the object beam that is reflected by an inspection object, the camera including a micro polarizer array, wherein a first polarization axis of the first reference beam is perpendicular to a second polarization axis of the second reference beam.
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公开(公告)号：US11275034B2
公开(公告)日：2022-03-15
申请号：US17022249
申请日：2020-09-16
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor： Kyungwon Yun , Taewan Kim , Seungbeom Park , Jaehyeon Son , Myungjun Lee , Jaehwang Jung
IPC: G01N21/956 , G01N21/45
Abstract: An inspection apparatus includes: a light source that generates and outputs light; a stage on which an inspection target is arranged; an irradiation optical system that irradiates light from the light source to the inspection target; a detector that receives the light diffracted from the inspection target and generates diffraction image; and a detector moving device configured to move the detector on a z-axis, which is an optical axis of the light, and an x-y plane perpendicular to the z-axis. Furthermore, while the detector moves on the x-y plane and the z-axis through the detector moving device, the detector generates a plurality of the diffraction images with different positions on the x-y plane and the z-axis with respect to the inspection target, and thus simultaneously implements phase retrieval and super resolution of diffraction images.
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