摘要:
The present invention involves a sucking device having a fixed material transportation surface including plural sucking holes, a decompression chamber connecting to the plural sucking holes, and a sucking device sucking air in the decompression chamber. The fixed material is fed on the fixed material transportation surface of the sucking device by the delivering device, and is stuck on the fixed material transportation surface through the sucking holes by the sucking device. The fixed material is fixed by a fixing head at the state of being stuck and is transported gradually to a downstream side by the delivering device on the fixed material transportation surface. When fixing is finished, the fixed material separates from the surface of the fixed material transportation surface and rises slightly by blowing air from the sucking holes by a blowing device so as to move to a discharging direction.
摘要:
In the present invention, a plurality of solvent supply nozzles for solvents having different solubility parameters are provided in a coating treatment apparatus. For a solvent supply nozzle for use at the time of edge rinse, a solvent supply nozzle is selected that discharges a removal solvent having a solubility parameter different by a set value or more from that of a coating solvent contained in a coating solution. During coating treatment, the coating solution is discharged from a coating solution supply nozzle onto the central portion of a rotated substrate to form a solution film having a predetermined film thickness. Immediately after the formation, edge rinse is started with the coating solution on the substrate not dry yet, in which the removal solvent is supplied to the peripheral portion of the substrate from the selected solvent supply nozzle. In this event, the supplied removal solvent repels the coating solution on the substrate, so that only the coating solution on the peripheral portion is appropriately removed. According to the present invention, a series of coating treatments including the edge rinse can be carried out in a shorter time.
摘要:
A projection optical system having a plurality of reflecting surfaces is disclosed in which a sufficiently large angle is provided between an incident side reference axis and an emerging side reference axis while tilt angles of the respective reflecting surfaces can remain small. The projection optical system projects luminous flux from an image forming element which forms an original image onto a projection surface. The incident side reference axis and the emerging side reference axis of the projection optical system are oblique to each other. The projection optical system has a plurality of reflecting surfaces each having a curvature. The reflecting surfaces are arranged such that the reference axis has at least one intersection in the projection optical system.
摘要:
A projection optical system which can project a bright image with less distortion and a small projection distance without causing aberration or an increase in size of reflective surfaces is disclosed. The projection optical system projects luminous flux from an original image onto a projection surface which is oblique to a central principal ray which is a principal ray of luminous flux traveling from the center of the original image to the center of a projected image. The projection optical system comprises a refractive optical system which includes a plurality of refractive optical elements through which the luminous flux from the original image passes through, and a reflective optical system which includes a plurality of reflective surfaces each having an optical power and guides the luminous flux emerging from the refractive optical system to the projection surface.
摘要:
Actuator units independently dedicated to nozzles divided into a plurality of groups are fixed to a common flow path unit having the nozzles formed therein with through holes aligned with one another. Heads of various types can be formed by using the actuator units of the same design only by changing the mode of arrangement of the nozzles in accordance with the purpose.
摘要:
A follower roller is brought into press contact with a driving roller by a load having a predetermined value, thereby being rotated in accordance with a rotation of the driving roller to transport the medium clamped therebetween in a first direction. The follower roller includes a shaft portion and a roller body provided so as to surround the shaft portion. The follower roller is configured such that a value of a ratio f/F is not greater than 0.03. Here, F is a force transporting the medium in the first direction which is generated by the load, and f is a resistance force generated in a second direction opposite to the first direction by a friction loss of the shaft portion of the follower roller which is generated by the load.
摘要:
Actuator units independently dedicated to nozzles divided into a plurality of groups are fixed to a common flow path unit having the nozzles formed therein with through holes aligned with one another. Heads of various types can be formed by using the actuator units of the same design only by changing the mode of arrangement of the nozzles in accordance with the purpose.
摘要:
A sample preparation method is provided where chipping of and damage to a film at an observed location does not occur when cutting with a machining blade is carried out in advance in order to prepare a sample for use with a transmission electronic microscope. The surroundings of an observed location are grooved using a focussed ion beam prior to performing cutting with a machining blade so that the observed location can be isolated from the film composing the sample in a floating island shape. A thin-film for embedding may then be deposited with respect to the grooving, using a focussed ion beam. If necessary, a protective film can also be prepared at the surface of the observed location using a focussed ion beam.