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公开(公告)号:US20150325368A1
公开(公告)日:2015-11-12
申请号:US14706486
申请日:2015-05-07
Applicant: TDK CORPORATION
Inventor: Tatsuo NAMIKAWA , Yoshihiko YANO , Yasunobu OIKAWA
Abstract: A thin film capacitor comprises: a laminated body in which a dielectric layer and an upper electrode layer are successively laminated on a base electrode; a protective layer that covers a part of the base electrode, the dielectric layer and the upper electrode layer and includes a through-hole respectively on the base electrode and on the upper electrode layer; and terminal electrodes that are electrically connected with the base electrode and the upper electrode layer through the through-holes of the protective layer, and a modulus of longitudinal elasticity (Young's modulus) of the protective layer is 0.1 GPa to 2.0 GPa.
Abstract translation: 薄膜电容器包括:层叠体,其中介电层和上电极层依次层压在基极上; 保护层,其覆盖基极的一部分,电介质层和上电极层,并且在基极和上电极层上分别具有通孔; 以及通过保护层的通孔与基极和上电极层电连接的端子电极,保护层的纵向弹性模量(杨氏模量)为0.1GPa〜2.0GPa。