公开(公告)号：US20200147642A1

公开(公告)日：2020-05-14

申请号：US16186072

申请日：2018-11-09

Applicant: Texas Instruments Incorporated

Inventor： Mohammad Hadi Motieian Najar ,  Peter Smeys

IPC: B06B1/06 ,  B06B1/02 ,  H01L41/047 ,  H01L41/053 ,  H01L41/08

Abstract: In one embodiment, a transducer comprises a first piezoelectric stack comprising a piezoelectric material; a first layer in contact with the piezoelectric stack; and a base structure beneath the first layer. The first layer has a first displacement between a first portion of the base structure and the first layer, and the first displacement is configurable by a first bias voltage received by the transducer.

公开(公告)号：US11646714B2

公开(公告)日：2023-05-09

申请号：US16505669

申请日：2019-07-08

Applicant: Texas Instruments Incorporated

Inventor： Jeronimo Segovia Fernandez ,  Peter Smeys ,  Ting-Ta Yen

IPC: H03H9/17 ,  H03H9/64 ,  H03H9/02 ,  H03H9/15 ,  H03H9/05

CPC classification number: H03H9/175 ,  H03H9/02275 ,  H03H9/0542 ,  H03H9/64 ,  H03H2009/02299 ,  H03H2009/155

Abstract: A laterally vibrating bulk acoustic wave (LVBAW) resonator includes a piezoelectric plate sandwiched between first and second metal layers. The second metal layer is patterned into an interdigital transducer (IDT) with comb-shaped electrodes having interlocking fingers. The width and pitch of the fingers of the electrodes determine the resonant frequency. A combined thickness of the first and second metal layers and the piezoelectric layer is less than the pitch of the interlocking fingers.

公开(公告)号：US11506630B2

公开(公告)日：2022-11-22

申请号：US15856490

申请日：2017-12-28

Applicant: Texas Instruments Incorporated

Inventor： Peter Smeys ,  Joyce Marie Mullenix

IPC: G01N27/60 ,  H01F17/00 ,  H01F27/24 ,  G01D5/20 ,  H01F27/255 ,  G01N27/22 ,  H01F21/08 ,  H01F27/40

Abstract: Described examples include devices and methods for measuring relative humidity of an environment using inductance. The devices can include a resonant circuit, including a capacitor and an inductor. The inductor includes a moisture-absorbing core with at least a portion thereof exposed to an environment, with at least one magnetic property of the core being variable in response to changing levels of moisture in the environment. An excitation circuit provides an AC excitation signal to the resonant circuit. A sense circuit determines an inductance of the inductor according to a sense signal from the resonant circuit. The sense circuit is coupled to generate an output signal that indicates a humidity level of the environment according to the sense signal.

公开(公告)号：US20220148912A1

公开(公告)日：2022-05-12

申请号：US17583322

申请日：2022-01-25

Applicant: Texas Instruments Incorporated

Inventor： Scott Robert Summerfelt ,  Thomas Dyer Bonifield ,  Sreeram Subramanyam Nasum ,  Peter Smeys ,  Benjamin Stassen Cook

IPC: H01L21/762 ,  H01L49/02 ,  H01L27/12 ,  H01L23/544 ,  H01L23/00 ,  H01L21/78

Abstract: In described examples of an integrated circuit (IC) there is a substrate of semiconductor material having a first region with a first transistor formed therein and a second region with a second transistor formed therein. An isolation trench extends through the substrate and separates the first region of the substrate from the second region of the substrate. An interconnect region having layers of dielectric is disposed on a top surface of the substrate. A dielectric polymer is disposed in the isolation trench and in a layer over the backside surface of the substrate. An edge of the polymer layer is separated from the perimeter edge of the substrate by a space.

公开(公告)号：US11190164B2

公开(公告)日：2021-11-30

申请号：US16422494

申请日：2019-05-24

Applicant: Texas Instruments Incorporated

Inventor： Ting-Ta Yen ,  Jeronimo Segovia Fernandez ,  Bichoy Bahr ,  Peter Smeys

IPC: H03H9/17 ,  H03H9/13 ,  H03H9/05 ,  H03H9/10 ,  H03H9/15

Abstract: A micromechanical system (MEMS) resonator includes a base substrate. A piezoelectric layer has a first electrode attached to a first surface of the piezoelectric layer and a second electrode attached to a second surface of the piezoelectric layer opposite the first electrode. The first electrode is bounded by a perimeter edge. A patterned acoustic mirror is formed on a top surface of the first electrode opposite the piezoelectric layer, such that the patterned acoustic mirror covers a border strip of the top surface of the first electrode at the perimeter edge and does not cover an active portion of the top surface of the first electrode.

公开(公告)号：US20200021272A1

公开(公告)日：2020-01-16

申请号：US16505669

申请日：2019-07-08

Applicant: Texas Instruments Incorporated

Inventor： Jeronimo Segovia Fernandez ,  Peter Smeys ,  Ting-Ta Yen

IPC: H03H9/17 ,  H03H9/05 ,  H03H9/02

Abstract: A laterally vibrating bulk acoustic wave (LVBAW) resonator includes a piezoelectric plate sandwiched between first and second metal layers. The second metal layer is patterned into an interdigital transducer (IDT) with comb-shaped electrodes having interlocking fingers. The width and pitch of the fingers of the electrodes determine the resonant frequency. A combined thickness of the first and second metal layers and the piezoelectric layer is less than the pitch of the interlocking fingers.