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    FREQUENCY COMPENSATED OSCILLATOR DESIGN FOR PROCESS TOLERANCES
    4.
    发明申请
    FREQUENCY COMPENSATED OSCILLATOR DESIGN FOR PROCESS TOLERANCES 审中-公开
    频率补偿振荡器设计的过程公差

    公开(公告)号：US20150263699A1

    公开(公告)日：2015-09-17

    申请号：US14728805

    申请日：2015-06-02

    申请人： Robert Bosch GmbH

    发明人： Markus LUTZ ,  Aaron PARTRIDGE

    IPC分类号： H03H9/24

    CPC分类号： H03H3/0072 ,  H03H3/0076 ,  H03H3/0077 ,  H03H9/2447 ,  H03H9/2457 ,  H03H9/2463 ,  H03H2009/02299 ,  H03H2009/0233 ,  H03H2009/02496 ,  Y10T29/49016

    摘要： A continuous or distributed resonator geometry is defined such that the fabrication process used to form a spring mechanism also forms an effective mass of the resonator structure. Proportional design of the spring mechanism and/or mass element geometries in relation to the fabrication process allows for compensation of process-tolerance-induced fabrication variances. As a result, a resonator having increased frequency accuracy is achieved.

    摘要翻译： 定义连续或分布式谐振器几何形状，使得用于形成弹簧机构的制造工艺也形成谐振器结构的有效质量。 与制造工艺相关的弹簧机构和/或质量元件几何的比例设计允许补偿过程公差引起的制造方差。 结果，实现了提高频率精度的谐振器。

    Inter-digital bulk acoustic resonator
    5.
    发明授权
    Inter-digital bulk acoustic resonator 有权
    数字间体声波谐振器

    公开(公告)号：US08803403B2

    公开(公告)日：2014-08-12

    申请号：US13412641

    申请日：2012-03-06

    申请人： Tsun-Che Huang ,  Feng-Chia Hsu ,  Pin Chang ,  Chin-Hung Wang

    发明人： Tsun-Che Huang ,  Feng-Chia Hsu ,  Pin Chang ,  Chin-Hung Wang

    IPC分类号： H03B5/30

    CPC分类号： H03H9/2463 ,  H03H9/02259 ,  H03H2009/02299 ,  H03H2009/241

    摘要： An inter-digital bulk acoustic resonator including a resonating structure, one or more input electrodes, one or more output electrodes, a substrate, and a supporting structure disposed on the substrate is provided. The resonating structure includes one or more resonating beams and a coupling beam. The resonating beams are connected at opposite two sides of the coupling beam respectively. The input electrodes and the output electrodes are arranged among the resonating beams in interlace. The input electrodes, the output electrodes, and the resonating beams are parallel to each other. Two ends of the coupling beam are connected to the supporting structure, such that the resonating structure is supported on the substrate.

    摘要翻译： 提供了包括谐振结构，一个或多个输入电极，一个或多个输出电极，基板和设置在基板上的支撑结构的数字间体声波谐振器。 谐振结构包括一个或多个谐振光束和耦合光束。 谐振梁分别在耦合梁的相对的两侧连接。 输入电极和输出电极被布置在谐振束之间。 输入电极，输出电极和谐振光束彼此平行。 耦合梁的两端连接到支撑结构，使得谐振结构被支撑在基板上。

    SWITCHING DEVICES AND RELATED METHODS
    7.
    发明申请
    SWITCHING DEVICES AND RELATED METHODS 审中-公开
    切换设备及相关方法

    公开(公告)号：US20110187297A1

    公开(公告)日：2011-08-04

    申请号：US13055087

    申请日：2009-07-21

    申请人： Diego N. Guerra ,  Matthias Imboden ,  Pritiraj Mohanty

    发明人： Diego N. Guerra ,  Matthias Imboden ,  Pritiraj Mohanty

    IPC分类号： H02K33/00

    CPC分类号： H03H9/2463 ,  H03H2009/02299

    摘要： A mechanical device capable of switching between two states is described. The device may include a micromechanical resonator with two distinct states in the hysteretic nonlinear regime. The devices can be used as a low-power, high-speed mechanical switch integrated on-chip with silicon circuitry.

    摘要翻译： 描述能够在两种状态之间切换的机械装置。 器件可以包括在迟滞非线性方式中具有两个不同状态的微机械谐振器。 该器件可用作集成片上硅片电路的低功耗高速机械开关。

    Out-of-plane MEMS resonator with static out-of-plane deflection
    9.
    发明授权
    Out-of-plane MEMS resonator with static out-of-plane deflection 有权
    具有静态超平面偏转的平面外的MEMS谐振器

    公开(公告)号：US08258893B2

    公开(公告)日：2012-09-04

    申请号：US13173432

    申请日：2011-06-30

    申请人： Emmanuel P. Quevy ,  David H. Bernstein ,  Mehrnaz Motiee

    发明人： Emmanuel P. Quevy ,  David H. Bernstein ,  Mehrnaz Motiee

    IPC分类号： H03H9/24 ,  H03H9/125 ,  H03H9/46

    CPC分类号： H03H9/2457 ,  H03H3/0072 ,  H03H3/0076 ,  H03H9/02409 ,  H03H9/2463 ,  H03H2009/02299 ,  H03H2009/02307 ,  H03H2009/0233 ,  H03H2009/02472 ,  H03H2009/02511 ,  H03H2009/02519

    摘要： A microelectromechanical systems (MEMS) device includes a tuning electrode, a drive electrode, and a resonator. The resonator is anchored to a substrate and is configured to resonate in response to a signal on the drive electrode. The MEMS device includes a tuning plate coupled to the resonator and positioned above the tuning electrode. The tuning plate is configured to adjust a resonant frequency of the resonator in response to a voltage difference between the resonator and the tuning electrode. In at least one embodiment of the MEMS device, the tuning plate and the tuning electrode are configured to adjust the resonant frequency of the resonator substantially independent of the signal on the drive electrode.

    摘要翻译： 微机电系统（MEMS）装置包括调谐电极，驱动电极和谐振器。 谐振器被锚固到衬底并且被配置为响应于驱动电极上的信号而谐振。 MEMS器件包括耦合到谐振器并且定位在调谐电极上方的调谐板。 调谐板被配置为响应谐振器和调谐电极之间的电压差来调节谐振器的谐振频率。 在MEMS器件的至少一个实施例中，调谐板和调谐电极被配置为基本上独立于驱动电极上的信号来调节谐振器的谐振频率。