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    Microelectronic processing machine
    23.
    发明授权
    Microelectronic processing machine 失效
    微电子加工机

    公开(公告)号：US5489339A

    公开(公告)日：1996-02-06

    申请号：US208145

    申请日：1994-03-10

    申请人： Takeo Hattori ,  Masatoshi Yasutake

    发明人： Takeo Hattori ,  Masatoshi Yasutake

    IPC分类号： H01L21/316 ,  C23C16/04 ,  G01Q30/02 ,  G01Q30/10 ,  G01Q30/12 ,  G01Q60/24 ,  G01Q80/00 ,  H01L21/318 ,  C23C16/00

    CPC分类号： C23C16/047 ,  Y10S977/855

    摘要： An electrode capable of pushing against a silicon substrate with a constant force is mounted inside a vacuum chamber or a gas-replacing chamber. A bias voltage source can supply a given electrical current between the silicon substrate and the electrode. A temperature-controlled heater and a positioning mechanism are mounted under the silicon substrate. A gas inlet nozzle for adjusting the ambient is mounted close to the location of the substrate.

    摘要翻译： 能够以恒定的力推压硅衬底的电极安装在真空室或气体置换室内。 偏置电压源可以在硅衬底和电极之间提供给定的电流。 温度控制加热器和定位机构安装在硅衬底下方。 用于调节环境的气体入口喷嘴安装在基板的位置附近。

    Method non-destructively identifying different kinds of rolled steel for structural purposes
    30.
    发明授权
    Method non-destructively identifying different kinds of rolled steel for structural purposes 失效
    用于结构目的的非破坏性识别不同种类的轧制钢的方法

    公开(公告)号：US4567427A

    公开(公告)日：1986-01-28

    申请号：US567321

    申请日：1983-12-30

    申请人： Takeo Hattori ,  Tohru Sasakura

    发明人： Takeo Hattori ,  Tohru Sasakura

    IPC分类号： G01N27/00 ,  G01N27/04 ,  G01N33/20 ,  G01R27/14

    CPC分类号： G01N33/20 ,  G01N27/041

    摘要： A method of non-destructively identifying different kinds of rolled steel for structural purposes is disclosed, which is based on a synchronous detection process using a minute AC signal current. Four terminal probes arranged in a row and spaced apart at a precisely uniform pitch are held urged against a measuring surface of steel under test. The signal current is passed through the steel via the opposite end terminal probes. A potential difference is detected between the other two terminal probes. A resistivity corresponding to the detected potential difference is determined, and a corresponding value of silicon content in the steel is determined. The kind of steel is identified according to the determined silicon content.

    摘要翻译： 公开了一种用于结构目的的非破坏性识别不同种类的轧制钢的方法，其基于使用微小AC信号电流的同步检测过程。 排列成一列并以精确均匀的间距间隔开的四个端子探针被推压抵靠被测钢的测量表面。 信号电流通过相对端端探头穿过钢。 在其他两个端子探针之间检测到电位差。 确定对应于检测到的电位差的电阻率，并确定钢中的硅含量的对应值。 根据确定的硅含量确定钢的种类。