摘要:
A flow control device is provided comprising:a housing (19) including a first chamber (21) communicated with an inlet port (11) and a second chamber (22) communicated with an outlet port (12); a cylindrical portion (25), which extends in the second chamber, for communicating the first chamber with the second chamber; a valve seat (61) provided at a forward end portion (25a) of the cylindrical portion; and a valve body (32) for opening and closing the valve seat, wherein at least one of the valve seat and the valve body is made of a material, the heat deformation of which is smaller than that of material composing the cylindrical portion. Due to the foregoing, it is possible to stably adjust the flow rate of a fluid of a high temperature and pressure. A pressure chamber (29), which is communicated with the second chamber and provided with a pressure port (18), may be arranged in the housing. A first and second flexible separation means (41, 51), which are connected to each other, for separating the second chamber and the pressure chamber from each other may be provided and a bed (75) arranged between the first and the second flexible separation means may be also provided. A reinforcement member (90) may be embedded in the cylindrical portion (25).
摘要:
In a conventional relief valve having a valve element supported by a diaphragm, since a surface of the valve element exposed to pressure is large and an opening/closing operation of the valve element is rapidly conducted, the operation often leads to chattering and is therefore poor in stability. A relief valve of the invention is free from chattering and capable of smoothly performing the opening/closing operation of its valve element (7). The element (7) is adapted to open and close a fluid passage and disposed between: an inlet port (2) in direct communication with an upstream-side fluid passage (1); and, an outlet port (4) in direct communication with a downstream-side fluid passage (3), and is provided with a flange (8) in its upper portion. Mounted on the flange (8) is a sleeve-like bellows (6) for supporting the valve element (7).
摘要:
Provided is a fluid device unit structure in which a chemical solution stagnation portion that is formed between a valve of a main fluid flow path and a branching point of a return flow path is minimized to cause hardly any solidification of a chemical solution. In the fluid device unit structure in which a plurality of fluid devices that are connected via flow paths are integrated on a base member (10) to form a single unit, and the main fluid flow path (11) and the return flow path (12) formed in the base member (10) are respectively provided with a first valve (20) and a second valve (40) for switching the flow paths, the branching inlet (12a) at which the return flow path (12) branches from the main fluid flow path (11) is close to the upstream side of the first valve (20).
摘要:
A flow rate controller detects a clogged state of an orifice to prevent errors during flow rate measurement. The flow rate controller includes a differential pressure flow meter, with an orifice disposed between a pair of pressure sensors, that converts a pressure difference detected by the two pressure sensors into a flow rate, a flow-rate adjusting valve whose degree of opening is controlled such that the difference between a measured flow rate value and a preset flow rate value falls within a predetermined range, and a control unit that controls the degree of opening of the flow-rate adjusting valve upon receiving the pressure values detected by the pressure sensors. The control unit compares the preset flow rate value and the measured flow rate value and determines that there is a clog fault when a flow rate difference, as compared with a predetermined value, continues for a predetermined time period.
摘要:
A differential-pressure flowmeter that can reduce (eliminate) a difference between the ambient temperature of one pressure sensor and the ambient temperature of another pressure sensor so as to allow for accurate and stable pressure measurement is provided, and a flow-rate controller equipped with such a differential-pressure flowmeter is provided. Provided are a body having a main fluid channel through which a fluid, whose pressure is to be measured, flows, and two pressure sensors held by the body and arranged in series relative to the main fluid channel, and a temperature balancer composed of a material with high thermal conductivity is accommodated in a recess that is formed in the body located below the two pressure sensors.
摘要:
A fluid apparatus unit structure in which a uniform tightening force is easily applied over the entire periphery by tightening a plurality of fastening members to obtain an advantageous sealing performance is provided. In s fluid apparatus unit structure in which plural fluid apparatus components that are connected via flow paths are collected together and integrated onto a base member, a casing member for the fluid apparatus components is partitioned into plural members in the base member mating direction, a female threading portion assembly (19) in which plural nut portions (18a) that form female threading portions that communicate in the mating direction are integrated by a linking member (18b), is fit and installed on base side partitioned members of a casing member that is disposed at a position in close contact with a base member or a base members, and with base side member interposed therebetween, different fastening members are threaded and tightened from both sides of the nut portion (18a).
摘要:
A pressure sensor having a structure in which compressible fluid is prevented from stagnating in the vicinity of a pressure-receiving surface of the pressure sensor in the interior of a pressure introducing portion is provided. In a pressure sensor including a sensor body arranged in a pressure introduction flow channel branched in a T-shape upward from a primary fluid flow channel in which fluid to be subjected to pressure measurement flows, the pressure introduction flow channel includes an inclined surface extending in a direction to increase an opening area on the side of an inlet port of the fluid on a wall surface on the downstream side in terms of the direction of flow of the fluid.
摘要:
A compact differential-pressure flow meter with reduced wiring is provided. The differential-pressure flow meter has first and second pressure sensors 12A and 12B fixed to a base member 14 on upstream and downstream sides of an orifice member 11 along a flow channel to determine a flow rate based on a pressure difference measured between the two sides of the orifice member 11 by the pressure sensors. The differential-pressure flow meter includes specific control boards disposed near pressure-sensing parts installed in the respective pressure-sensing device and a main control board disposed in a board installation space formed inside the base member. The specific control boards are connected to the main control board with wires passing through a plurality of wiring conduits provided in housings of the pressure-sensing device, and external wiring are connected to one of the specific control boards or to the main control board.
摘要:
Provided are a flow meter and a flow-rate control system using the same that is capable of measuring a flow rate in a minute flow-rate region with excellent measurement accuracy by preventing or suppressing the generation of bubbles and in which accumulation of the fluid and the bubbles is less likely to occur. The flow meter is for measuring a minute flow rate of a fluid flowing through a fluid channel whose outlet environment is set to constant pressure, the flow meter including a flow-rate measurement conduit portion having a predetermined length connected to an outlet-side end of the fluid channel 1 and whose outlet environment is set to constant pressure by setting the cross-sectional area of a channel smaller than the fluid channel; a pressure sensor for detecting the pressure of the fluid at the upstream side of the flow-rate measurement conduit portion by being disposed near an outlet of the fluid channel 1; and a pressure-detection control unit 4 for calculating a flow rate from a fluid pressure detected at the pressure detection part.
摘要:
Provided are an orifice member, and a differential-pressure flow meter and a flow-regulating device using the orifice member, that allow purging to be carried out easily when changing the fluid to be circulated, that are less likely to cause contamination and leaching of impurities to the circulated fluid, and that can be easily produced. The flow-regulating device includes a first pressure-measuring device (object to be connected to) that is connected to one end of the orifice member, and a second pressure-measuring device (object to be connected to) that is connected to the other end of the orifice member, and a flow-regulating valve that is connected to the downstream side of the differential-pressure flow meter, which includes the above-mentioned units. In the orifice member, a tube portion, one end of which is connected to the first pressure-measuring device and other end of which is connected to the second pressure-measuring device and whose internal part forms a channel connecting the first and second pressure-measuring devices, and an orifice provided inside the tube portion are integrated.