摘要:
A highly versatile flow-rate controller that is easy to handle and a regulator unit and a valve unit used for the same are provided. The flow-rate controller includes a regulator unit having a regulator and a first pressure sensor, a valve unit having a second pressure sensor and a flow-rate control valve, and an orifice unit that is connected to the regulator unit and the valve unit in a detachable manner and that has a fluid channel and an orifice that connect to the regulator unit and the valve unit.
摘要:
A compact differential-pressure flow meter with reduced wiring is provided. The differential-pressure flow meter has first and second pressure sensors 12A and 12B fixed to a base member 14 on upstream and downstream sides of an orifice member 11 along a flow channel to determine a flow rate based on a pressure difference measured between the two sides of the orifice member 11 by the pressure sensors. The differential-pressure flow meter includes specific control boards disposed near pressure-sensing parts installed in the respective pressure-sensing device and a main control board disposed in a board installation space formed inside the base member. The specific control boards are connected to the main control board with wires passing through a plurality of wiring conduits provided in housings of the pressure-sensing device, and external wiring are connected to one of the specific control boards or to the main control board.
摘要:
Provided is a fluid device unit structure in which a chemical solution stagnation portion that is formed between a valve of a main fluid flow path and a branching point of a return flow path is minimized to cause hardly any solidification of a chemical solution. In the fluid device unit structure in which a plurality of fluid devices that are connected via flow paths are integrated on a base member (10) to form a single unit, and the main fluid flow path (11) and the return flow path (12) formed in the base member (10) are respectively provided with a first valve (20) and a second valve (40) for switching the flow paths, the branching inlet (12a) at which the return flow path (12) branches from the main fluid flow path (11) is close to the upstream side of the first valve (20).
摘要:
Provided are a flow meter and a flow-rate control system using the same that is capable of measuring a flow rate in a minute flow-rate region with excellent measurement accuracy by preventing or suppressing the generation of bubbles and in which accumulation of the fluid and the bubbles is less likely to occur. The flow meter is for measuring a minute flow rate of a fluid flowing through a fluid channel whose outlet environment is set to constant pressure, the flow meter including a flow-rate measurement conduit portion having a predetermined length connected to an outlet-side end of the fluid channel 1 and whose outlet environment is set to constant pressure by setting the cross-sectional area of a channel smaller than the fluid channel; a pressure sensor for detecting the pressure of the fluid at the upstream side of the flow-rate measurement conduit portion by being disposed near an outlet of the fluid channel 1; and a pressure-detection control unit 4 for calculating a flow rate from a fluid pressure detected at the pressure detection part.
摘要:
A fluid regulator that has excellent flow-rate-control response for not only pressure fluctuations at the primary side but also pressure fluctuations at the secondary side and that realizes highly accurate flow-rate control is provided. A fluid regulator 10 includes a first diaphragm chamber 16 in which a working force obtained from a gas, such as air, is received by a first diaphragm 14 to generate a force for adjusting a valve opening, a second diaphragm chamber 17 in which pressure fluctuations of a fluid introduced from a secondary side are received by a second diaphragm 15 to generate a force for adjusting the valve opening, a shaft 12 that receives the adjusting forces generated in the first diaphragm chamber 16 and the second diaphragm chamber 17 and slides in the shaft direction, a valve 13 that operates together with the shaft 12 to adjust the valve opening, a partition wall 11a that isolates the first diaphragm chamber 16 from the second diaphragm chamber 17 so as not to interfere with each other, and a bellows 22 that blocks the circulation of the fluid between the first diaphragm chamber 16 and the second diaphragm chamber 17.
摘要:
A flow control device comprises an inlet port through which fluid is supplied, an outlet port through which the fluid is delivered, a valve body which is arranged in a passage between the inlet port and the outlet port so as to open and close the passage, the flow control device further comprising a valve body guide means which urges downwardly and pulls upwardly the valve body so as to allow the fluid in the passage to flow at a flow rate which is lower than a basic control rate of the flow control device.
摘要:
A valve opening/closing handle lock mechanism provided in a valve having a manually operated valve opening/closing handle (1) is capable of maintaining the security of the valve by preventing the valve from being opened or closed by accident or with malicious intent after completion of a proper opening/closing operation of the valve by means of the handle (1). The handle lock mechanism comprises a locking cap (4) mounted on the handle (1). The locking cap (4) functions to prevent the handle (1) from being operated, extends from the handle (1) to a handle mount portion (3) of the valve so as to cover the corresponding portion of the valve with the locking cap (4), and is provided with: an opening (5) through which an end portion of the handle (1) passes outward; or, a longitudinal groove through which the end portion of the opening/closing handle (1) slidably passes outward.
摘要:
A pressure sensor having a structure in which compressible fluid is prevented from stagnating in the vicinity of a pressure-receiving surface of the pressure sensor in the interior of a pressure introducing portion is provided. In a pressure sensor including a sensor body arranged in a pressure introduction flow channel branched in a T-shape upward from a primary fluid flow channel in which fluid to be subjected to pressure measurement flows, the pressure introduction flow channel includes an inclined surface extending in a direction to increase an opening area on the side of an inlet port of the fluid on a wall surface on the downstream side in terms of the direction of flow of the fluid.
摘要:
A fluid apparatus unit structure in which a uniform tightening force is easily applied over the entire periphery by tightening a plurality of fastening members to obtain an advantageous sealing performance is provided. In s fluid apparatus unit structure in which plural fluid apparatus components that are connected via flow paths are collected together and integrated onto a base member, a casing member for the fluid apparatus components is partitioned into plural members in the base member mating direction, a female threading portion assembly (19) in which plural nut portions (18a) that form female threading portions that communicate in the mating direction are integrated by a linking member (18b), is fit and installed on base side partitioned members of a casing member that is disposed at a position in close contact with a base member or a base members, and with base side member interposed therebetween, different fastening members are threaded and tightened from both sides of the nut portion (18a).
摘要:
A flowmeter in which a flow rate can be measured over a wide flow-rate range while an increase in the cost of manufacture thereof is minimized, and a flow-rate controller equipped with such a flowmeter are provided. Provided are an upstream-side pressure sensor that measures the pressure of a fluid in an upstream-side channel, a downstream-side pressure sensor that measures the pressure of the fluid in a downstream-side channel, a first throttle section disposed between the upstream-side channel and the downstream-side channel and having a channel area that is smaller than that of at least the upstream-side channel, a bypass channel branching off from between the upstream-side pressure sensor in the upstream-side channel and the first throttle section and connected with the downstream-side channel, an on/off valve that controls the flow rate of the fluid flowing through the bypass channel, and a second throttle section disposed between the bypass channel and the downstream-side channel and having a channel area that is smaller than that of at least the bypass channel.