公开(公告)号：US20070137258A1

公开(公告)日：2007-06-21

申请号：US10593274

申请日：2005-03-07

申请人： Waichi Yamamura

发明人： Waichi Yamamura

IPC分类号： C03B37/02

CPC分类号： C03B37/01486 ,  C03B37/01466

摘要： There is provided an elongating method of an optical fiber base material which can easily correct a distorted portion of an optical fiber base material with it being possible to elongate the optical fiber base material to reduce its diameter. According to such an elongating method, in an elongating process of elongating an optical fiber base material by heating the optical fiber base material in a heating furnace so that a diameter of the optical fiber base material is reduced, before the optical fiber base material is elongated from an end thereof, a distorted portion of the optical fiber base material is connected by being heated to be softened in the heating furnace. To do so, the optical fiber base material is attached to a hanging mechanism so as to be hung in an electric furnace, the distorted portion of the optical fiber base material is heated to be softened. The elongation is stated after a difference between the elongation axis and an end of one of the optical fiber base material and the dummy rod attached to the optical fiber base material is reduced to be 10 mm or less. Here, the difference may be detected by using a noncontact position detecting apparatus, which may be one of a laser measuring device and an image processing apparatus.

摘要翻译： 提供了一种光纤基材的伸长方法，其可以容易地校正光纤基材的变形部分，可以延长光纤基材以减小其直径。 根据这样的伸长方法，在通过在加热炉中加热光纤基材使得光纤基材的直径减小的方法来拉伸光纤基材，在光纤基材伸长之前 从其端部，通过在加热炉中加热而使光纤基材的变形部分连接而软化。 为了这样做，将光纤基材附着到悬挂机构上以悬挂在电炉中，将光纤基材的变形部分加热软化。 伸长率在将光纤基材和附着于光纤基材的虚拟棒的伸长轴与端部之间的差减小到10mm以上之后进行说明。 这里，可以通过使用可以是激光测量装置和图像处理装置之一的非接触位置检测装置来检测该差异。

公开(公告)号：US07952054B2

公开(公告)日：2011-05-31

申请号：US11783581

申请日：2007-04-10

申请人： Noboru Kimura ,  Yoshihiro Kubota ,  Waichi Yamamura ,  Shoji Kano

发明人： Noboru Kimura ,  Yoshihiro Kubota ,  Waichi Yamamura ,  Shoji Kano

IPC分类号： F27D11/00 ,  C23C16/00

CPC分类号： H01L21/67103 ,  H05B3/143

摘要： There is disclosed a heating element 10 comprising: at least a heat-resistant base member 1; a conductive layer 3 having a heater pattern 3a formed on the heat-resistant base member; a protection layer 4 with an insulating property formed on the conductive layer; and a corrosion-resistant layer 4p that is an oxide having an oxygen amount of stoichiometric ratio or less formed on the protection layer. There can be provided a heating element in which a corrosion-resistant layer whose resistivity or hardness is controlled is formed on a protection layer and through which the corrosive gas is difficult to be transmitted even under an environment of a high temperature and a corrosive gas and by which degradation due to corrosion of a conductive layer, particularly, a power-supply-terminal portion can be avoided and additionally which can fulfill a high function as an electrostatic chuck even when having a chuck pattern and which has a long operation life and is capable of being produced at a low cost.

摘要翻译： 公开了一种加热元件10，其包括：至少一个耐热底座件1; 导电层3，其具有形成在耐热基底构件上的加热器图案3a; 在导电层上形成具有绝缘性的保护层4; 以及作为在保护层上形成的具有化学计量比的氧的量的氧化物的耐腐蚀层4p。 可以提供一种加热元件，其中在保护层上形成电阻率或硬度被控制的耐腐蚀层，即使在高温环境和腐蚀性气体的环境下腐蚀性气体难以透过， 由此，能够避免由于导电层，特别是电源端子部分的腐蚀而导致的劣化，另外即使具有卡盘图案也能够实现作为静电卡盘的高功能，并且具有长的使用寿命并且是 能够以低成本生产。

公开(公告)号：US07679880B2

公开(公告)日：2010-03-16

申请号：US11685793

申请日：2007-03-14

申请人： Hideki Fujii ,  Waichi Yamamura

发明人： Hideki Fujii ,  Waichi Yamamura

IPC分类号： H01L21/683 ,  H01T23/00

CPC分类号： H01L21/6833

摘要： The invention provides an electrostatic chuck in which a workpiece-chucking surface is made flat. An electrostatic chuck with a built-in electric heating means comprises a base plate formed of carbon or a carbon-based composite material and, successively formed on one surface of the base plate, an insulating layer (a1), an electroconductive layer (a2) to serve as a chucking electrode and an dielectric layer (a3) to form a workpiece-chucking surface and, successively formed on the other surface of the base plate, an insulating layer (b1) and an electroconductive layer (b2) to serve as an electric heater element, the electrostatic chuck improved in that the workpiece-chucking surface of the electrostatic chuck and an opposite surface thereof are warped to have a relationship selected from concavo-convex and convexo-concave, and in that the warping of the surfaces is in a manner such that the workpiece-chucking surface of the dielectric layer is rendered flat when the opposite surface of the electrostatic chuck is fastened to a machine.

摘要翻译： 本发明提供了一种静电卡盘，其中工件夹紧表面被制成平坦的。 具有内置电加热装置的静电卡盘包括由碳或碳基复合材料形成的基板，并且在基板的一个表面上依次形成绝缘层（a1），导电层（a2） 用作夹持电极和介电层（a3）以形成工件夹持表面，并且在基板的另一个表面上依次形成绝缘层（b1）和导电层（b2）以用作 电加热器元件，静电吸盘的改进在于静电卡盘的工件夹紧表面和其相对表面翘曲成具有从凹凸和凸凹选择的关系，并且表面的翘曲在 使得当静电卡盘的相对表面紧固到机器时，电介质层的工件夹紧表面变平坦。

公开(公告)号：US20100003510A1

公开(公告)日：2010-01-07

申请号：US12457781

申请日：2009-06-22

申请人： Shoji Kano ,  Waichi Yamamura ,  Yoshihiro Kubota

发明人： Shoji Kano ,  Waichi Yamamura ,  Yoshihiro Kubota

IPC分类号： B32B7/00

CPC分类号： H01L21/6831 ,  H01L21/67103 ,  Y10T428/26 ,  Y10T428/263 ,  Y10T428/264 ,  Y10T428/265

摘要： The present invention is a corrosion-resistant multilayer ceramic member including at least: a ceramic substrate, an electrode layer formed on the ceramic substrate, a feeding member that supplies electricity to the electrode layer, and a protection layer that prevents corrosion; wherein the electrode layer is formed on one surface or both surfaces of the ceramic substrate, the feeding member is connected with the electrode layer, the protection layer is formed with a thickness of 0.02 mm or above and 10 mm or less on that surface of the ceramic substrate where the electrode layer is formed so as to cover the electrode layer, and the protection layer contains any one of silicon oxide, rare-earth oxide, aluminum nitride, and aluminum oxide as a main component. Hereby, there is provided a corrosion-resistant multilayer ceramic member that has excellent corrosion resistance and a long life duration even when exposed to a corrosive gas.

摘要翻译： 本发明是一种耐腐蚀性多层陶瓷构件，至少包括：陶瓷基板，形成在陶瓷基板上的电极层，向电极层供电的进给构件和防止腐蚀的保护层; 其中所述电极层形成在所述陶瓷基板的一个表面或两个表面上，所述馈送构件与所述电极层连接，所述保护层在所述表面上形成为0.02mm以上且10mm以下的厚度 陶瓷基板，其中形成电极层以覆盖电极层，并且保护层包含氧化硅，稀土氧化物，氮化铝和氧化铝中的任一种作为主要成分。 因此，提供了即使暴露于腐蚀性气体时也具有优异的耐腐蚀性和长寿命的耐腐蚀性多层陶瓷构件。

公开(公告)号：US20090107635A1

公开(公告)日：2009-04-30

申请号：US12285108

申请日：2008-09-29

申请人： Shoji Kano ,  Waichi Yamamura ,  Yoshihiro Kubota

发明人： Shoji Kano ,  Waichi Yamamura ,  Yoshihiro Kubota

IPC分类号： H01L21/302 ,  H01L21/30

CPC分类号： H01L21/6831 ,  H01L21/67103 ,  H01L21/6833 ,  H01L21/68757 ,  H02N13/00 ,  H05B3/143

摘要： The present invention relates to a corrosion-resistant multilayer ceramic member consisting at least of: a ceramic support substrate; an electrode layer formed on the ceramic support substrate; a power-supply member connected to the electrode layer; an insulating protection layer formed on the ceramic support substrate to cover the electrode layer; and a ceramic protection substrate of which at least a part is provided on the insulating protection layer. Thereby, there is provided a long-life corrosion-resistant multilayer ceramic member excellent in corrosion resistance even when exposed to a corrosive gas.

摘要翻译： 本发明涉及一种耐腐蚀多层陶瓷构件，其至少包括：陶瓷支撑基板; 形成在所述陶瓷支撑基板上的电极层; 连接到所述电极层的电源构件; 形成在所述陶瓷支撑基板上以覆盖所述电极层的绝缘保护层; 以及陶瓷保护基板，其至少一部分设置在绝缘保护层上。 由此，即使在暴露于腐蚀性气体的情况下，也能够提供耐腐蚀性优异的长寿命耐腐蚀性的多层陶瓷部件。

公开(公告)号：US20070241096A1

公开(公告)日：2007-10-18

申请号：US11783581

申请日：2007-04-10

申请人： Noboru Kimura ,  Yoshihiro Kubota ,  Waichi Yamamura ,  Shoji Kano

发明人： Noboru Kimura ,  Yoshihiro Kubota ,  Waichi Yamamura ,  Shoji Kano

IPC分类号： F27D11/00

CPC分类号： H01L21/67103 ,  H05B3/143

摘要： There is disclosed a heating element 10 comprising: at least a heat-resistant base member 1; a conductive layer 3 having a heater pattern 3a formed on the heat-resistant base member; a protection layer 4 with an insulating property formed on the conductive layer; and a corrosion-resistant layer 4p that is an oxide having an oxygen amount of stoichiometric ratio or less formed on the protection layer. There can be provided a heating element in which a corrosion-resistant layer whose resistivity or hardness is controlled is formed on a protection layer and through which the corrosive gas is difficult to be transmitted even under an environment of a high temperature and a corrosive gas and by which degradation due to corrosion of a conductive layer, particularly, a power-supply-terminal portion can be avoided and additionally which can fulfill a high function as an electrostatic chuck even when having a chuck pattern and which has a long operation life and is capable of being produced at a low cost.

摘要翻译： 公开了一种加热元件10，其包括：至少一个耐热底座件1; 具有形成在耐热基体上的加热器图案3a的导电层3; 在导电层上形成具有绝缘性的保护层4; 以及作为形成在保护层上的具有化学计量比的氧量的氧化物的耐腐蚀层4p。 可以提供一种加热元件，其中在保护层上形成电阻率或硬度被控制的耐腐蚀层，即使在高温环境和腐蚀性气体的环境下腐蚀性气体难以透过， 由此，能够避免由于导电层，特别是电源端子部分的腐蚀而导致的劣化，另外即使具有卡盘图案也能够实现作为静电卡盘的高功能，并且具有长的使用寿命，并且是 能够以低成本生产。

公开(公告)号：US20070169515A1

公开(公告)日：2007-07-26

申请号：US10594071

申请日：2005-03-07

申请人： Yuuji Tobisaka ,  Waichi Yamamura

发明人： Yuuji Tobisaka ,  Waichi Yamamura

IPC分类号： C03B18/00 ,  C03B37/014

CPC分类号： C03B23/045 ,  C03B37/0126 ,  C03B37/01486 ,  Y02P40/57

摘要： Provided is a processing method and a processing apparatus of a glass base material, with which a welding process of a large glass base material and a process of forming ends of the glass base material into spindle shapes are easily and safely performed without causing core deviation or causing an accident of falling off of the glass base material. Provided is a processing method of processing a glass base material for an optical fiber using a processing apparatus, the processing apparatus including: a pair of rotatable chucks that directly or indirectly grasp respective ends of the glass base material in an axial direction of the glass base material and that are capable of performing relative displacement in an opposing direction; and a burner for heating the glass base material that is movable along the axial direction of the glass base material being grasped, the processing method being characterized by processing the glass base material while preventing the glass base material from being brought into a cantilever state by always holding or supporting the glass base material at two or more points. The processing apparatus includes at least one midway holding device that holds or supports midway part of the glass base material.

摘要翻译： 提供了一种玻璃基材的处理方法和处理装置，其中大玻璃基材的焊接工艺和将玻璃基材的端部形成为主轴形状的工艺容易且安全地进行，而不会引起芯偏移或 导致从玻璃基材脱落的事故。 提供一种使用处理装置处理光纤用玻璃基材的处理方法，该处理装置包括：一对可旋转卡盘，其在玻璃基板的轴向上直接或间接地将玻璃基材的端部夹持 材料，并且能够在相对的方向上执行相对位移; 以及用于加热可沿着被夹持的玻璃基材的轴向移动的玻璃基材的燃烧器，其特征在于，通过加工玻璃基材同时防止玻璃基材始终处于悬臂状态 在两点以上保持或支撑玻璃基材。 处理装置包括至少一个中间保持装置，其保持或支撑玻璃基材的中间部分。

公开(公告)号：US20070147748A1

公开(公告)日：2007-06-28

申请号：US10579794

申请日：2004-11-18

申请人： Hiroyuki Kume ,  Waichi Yamamura

发明人： Hiroyuki Kume ,  Waichi Yamamura

IPC分类号： G02B6/255

CPC分类号： C03B37/01205 ,  C03B23/207

摘要： An object of the present invention is to provide an optical fiber base material and a connection processing method and apparatus capable of simply connecting ends of an optical fiber base material and a dummy member with a large diameter at short times without breaking and crack in a connected portion when heating and melting the ends of them to weld and connect both. A connection processing method of an optical fiber base material 1 for heating and melting ends of an optical fiber base material 1 and a dummy member 2 or ends of two optical fiber base materials 1 or ends of two dummy members 2 to weld and connect both. The connection processing method includes: gripping an end of at least one of the bodies to be welded with gripping mechanism to face both with each other; selecting the interval between both the bodies to be welded within 1 to 20 mm; and heating and melting ends of both the bodies to be welded to weld and connect both.

摘要翻译： 本发明的目的是提供一种光纤基材和连接处理方法和装置，其能够在短时间内简单地连接光纤基材和具有大直径的虚拟构件的端部，而不会在连接中断裂和破裂 加热和熔化它们的端部以焊接并连接两者时的部分。 用于加热熔化光纤基材1和虚拟构件2或两个光纤基材1的端部或两个虚拟构件2的端部的光纤基材1的连接处理方法，以焊接和连接两者。 连接处理方法包括：通过夹持机构夹持要被焊接的至少一个待焊接的物体的端部彼此面对; 选择要焊接的物体之间的间隔在1到20 mm之间; 并且要焊接的两个物体的加热和熔化端部焊接并连接两者。

公开(公告)号：US20060133004A1

公开(公告)日：2006-06-22

申请号：US11296406

申请日：2005-12-08

申请人： Waichi Yamamura

发明人： Waichi Yamamura

IPC分类号： H01L21/683

CPC分类号： H01L21/6831 ,  H01L21/6833

摘要： The present invention provides an electrostatic chuck with a built-in heater, with which the apparatus can start operation rapidly at the wafer chucking surface, and a uniform temperature distribution can be rapidly established over the wafer. Gas-escape grooves which communicate with the outer periphery are provided to one or both sides of the electrostatic chuck. The chucking function of the electrostatic chuck with a built-in heater of the present invention is exhibited by stacking an insulating underlayer, an electroconductive layer, and an insulating topmost layer by the CVD method on a heat-conductive base body. It is preferable that the gas-escape groove has a cross section smoothly dropping off from the flat surface area of the insulating topmost layer to the bottom of the groove, and that the gas-escape groove has a width of 1 to 3 mm and a depth of 0.03 to 0.2 mm with a spacing between grooves of 5 to 15 mm.

摘要翻译： 本发明提供一种具有内置加热器的静电卡盘，该装置可以在晶片卡盘表面快速开始运行，并可在晶片上快速建立均匀的温度分布。 在静电卡盘的一侧或两侧设置有与外周连通的排气槽。 通过在导热性基体上层叠绝缘底层，导电层和绝缘顶层，通过CVD法堆叠本发明的内置加热器的静电卡盘的夹持功能。 优选的是，所述排气槽的截面从所述绝缘顶层的平坦面到所述槽的底部平滑地脱落，所述排气槽的宽度为1〜3mm，并且 深度为0.03至0.2mm，槽之间的间隔为5至15mm。