摘要:
To provide a deposit detection device capable of detecting with accuracy and alarming deposits deposited in an exhaust pump used for various processes regardless of kinds and flow rate of process gas, and to provide an exhaust pump equipped with the deposit detection device.A pump control device 50 of an exhaust pump P comprises a deposit detection device which executes, as initial process, steps of reading electric current value of a motor for rotating a rotor and obtaining and storing an initial electric current value of the motor based on the electric current values read; and then executes, as next process, steps of reading the electric current value of the motor, obtaining a current value of the motor based on the electric current values read, and obtaining quantity of fluctuation of the current value of the electric current value of the motor relative to the initial value of the electric current value of the motor, thereby detecting the deposit in the pump based on the quantity of fluctuation.
摘要:
There is provided a developer recovery device including: a casing; a recovery member disposed along an edge portion of the aperture portion; a sealing member disposed along an edge portion at a conveyance direction upstream side of the aperture portion; a moving section that moves the recovery member and the sealing member between a position of being touched against the developer-bearing member and a position of being apart from the developer-bearing member; a suction section that sucks the developer separated from the developer-bearing member into the casing; and a filter that is long in the length direction of the aperture portion and that is disposed in the casing between the aperture portion and the suction section with an inclination such that a lower portion of the filter is further away from the aperture portion than an upper portion of the filter.
摘要:
A conveyor for conveying a workpiece in a vacuum chamber includes a floating body having a conveying rod, a pair of magnetic bearing portions disposed in a moving direction of the floating body and supporting the floating body solely by magnetic forces, and a non-contact driving motor portion for directly reciprocating the floating body. The floating body is directly reciprocated by a linear pulse motor. The linear pulse motor comprises a motor main body and a cog portion, and the motor main body is interposed between a pair of magnetic bearing portions. The cog portion is disposed in a longitudinal or axial direction of the outer peripheral surface of the floating body and coacts with the motor main body to reciprocate the floating body.
摘要:
To provide a mechanism in which a moving body can be stored in a housing. A gate valve has a slide plate and a moving mechanism for changing the positions in the radial and axial directions of the slide plate. A shaft is a rotating shaft the axial displacement of which is controlled by an axial driving mechanism and the angle of rotation of which is controlled by a radial driving mechanism, and is turnably supported in the housing by a shaft supporting spring consisting of a magnetic bearing and a conical coil spring. By controlling the attraction force of a balance weight in an electromagnet, the shaft can be moved in the radial direction. Also, by controlling the attraction force of an electromagnet target in the electromagnet, the shaft can be moved in the axial direction.
摘要:
There is provided a developer recovery device including: a casing; a recovery member disposed along an edge portion of the aperture portion; a sealing member disposed along an edge portion at a conveyance direction upstream side of the aperture portion; a moving section that moves the recovery member and the sealing member between a position of being touched against the developer-bearing member and a position of being apart from the developer-bearing member; a suction section that sucks the developer separated from the developer-bearing member into the casing; and a filter that is long in the length direction of the aperture portion and that is disposed in the casing between the aperture portion and the suction section with an inclination such that a lower portion of the filter is further away from the aperture portion than an upper portion of the filter.
摘要:
A developer-conveying apparatus is provided, the developer-conveying apparatus including: a conveying member that has a rotational axis rotatably set in a container and a blade formed around the rotational axis, the conveying member conveying a developer along the rotational axis by rotation; and a static eliminating member set in the container and eliminating static electricity of the developer in the container by being brought into contact with the developer.
摘要:
To provide a mechanism in which a moving body can be stored in a housing. A gate valve has a slide plate and a moving mechanism for changing the positions in the radial and axial directions of the slide plate. A shaft is a rotating shaft the axial displacement of which is controlled by an axial driving mechanism and the angle of rotation of which is controlled by a radial driving mechanism, and is tumably supported in the housing by a shaft supporting spring consisting of a magnetic bearing and a conical coil spring. By controlling the attraction force of a balance weight in an electromagnet, the shaft can be moved in the radial direction. Also, by controlling the attraction force of an electromagnet target in the electromagnet, the shaft can be moved in the axial direction.
摘要:
The present invention relates to the integration of a TMP with the associated bypass line and valves so that a single sub-assembly is created. The housing of the TMP is significantly modified to accommodate the associated equipment necessary for constructing a high-vacuum system.
摘要:
A vacuum apparatus has a process chamber for processing a workpiece and a transfer apparatus for positioning the workpiece in the process chamber and for removing the workpiece from the process chamber. The transfer apparatus has a pair of generally parallel and spaced-apart transfer bodies and a workpiece holder connected to the transfer bodies for supporting the workpiece. A feeding mechanism feeds the transfer bodies in a longitudinal direction thereof to position the workpiece holder and the workpiece in the process chamber.
摘要:
An image forming apparatus effectively prevents scattering of a toner image transferred to an intermediate transfer belt. The image forming apparatus has an image carrier 1 on which a toner image T formed according to image data is held; an intermediate transfer belt 3 disposed facing the image carrier 1 and supported on so as to move circularly about plural rollers 2 with tension applied; a first bias transfer unit 4 for sequentially transferring a toner image T on image carrier 1 to intermediate transfer belt 3; and a second bias transfer unit 6 for batch transferring the toner image T on intermediate transfer belt 3 to a recording medium 5; and a potential holding unit 8 for holding the surface potential of the first contact member 7 at or above the charge potential of the back of intermediate transfer belt 3, and disposed to the contact member 7 first contacting the intermediate transfer belt 3 after it passes the first bias transfer unit 4.