公开(公告)号：US20130305519A1

公开(公告)日：2013-11-21

申请号：US13978502

申请日：2012-01-13

Applicant: Edin Sarajlic

Inventor： Edin Sarajlic

IPC: G01R3/00

CPC classification number: G01R3/00 ,  B01L3/502707 ,  B81B2201/057 ,  B81B2203/0118 ,  B81B2203/0338 ,  B81C1/00119 ,  B81C2201/0109 ,  Y10T29/49002

Abstract: The present invention relates to a method of manufacturing a probe comprising a cantilever with a conduit. According to the invention, an etchant window is provided in a layer covering an elongated sacrificial conduit core that is to form the conduit. This allows for an etching process where the elongated sacrificial conduit core is etched away before all material of a substrate is etched away, the remaining material of the substrate material making the probe stronger without being in the way during use of the probe.

Abstract translation: 本发明涉及一种制造探针的方法，该探针包括具有导管的悬臂。 根据本发明，在覆盖要形成导管的细长牺牲导管芯的层中提供蚀刻剂窗口。 这允许蚀刻工艺，其中在衬底的所有材料被蚀刻掉之前，细长的牺牲导管芯被蚀刻掉，使衬底材料的剩余材料在探针的使用期间不会妨碍探针而不会妨碍。

公开(公告)号：US20090065471A1

公开(公告)日：2009-03-12

申请号：US10775999

申请日：2004-02-10

Applicant: Sadeg M. Faris

Inventor： Sadeg M. Faris

IPC: B32B1/08 ,  B44C1/22

CPC classification number: B81C1/00119 ,  B01L3/0262 ,  B01L3/0268 ,  B01L2200/12 ,  B01L2300/0896 ,  B81B2201/057 ,  B81C2201/019 ,  B82Y15/00 ,  B82Y30/00 ,  C12Q1/6874 ,  G01N33/48721 ,  C12Q2565/631 ,  C12Q2565/607

Abstract: A nozzle structure is provided comprising a monolithic body having an array of nozzles. The nozzles having openings with sectional openings having heights of about 100 nm or less. The nozzles are generally associated with one or more well structures.

Abstract translation: 提供一种喷嘴结构，其包括具有喷嘴阵列的整体式主体。 喷嘴具有开口的开口具有约100nm或更小的高度。 喷嘴通常与一个或多个井结构相关联。