Apparatus and method for inhibiting decomposition of germane
    31.
    发明授权
    Apparatus and method for inhibiting decomposition of germane 有权
    用于抑制锗烷分解的装置和方法

    公开(公告)号:US06716271B1

    公开(公告)日:2004-04-06

    申请号:US10282377

    申请日:2002-10-29

    IPC分类号: B01D5304

    摘要: A germane storage and dispensing system, in which germane gas is sorptively retained on an activated carbon sorbent medium in a vessel containing adsorbed and free germane gas. The activated carbon sorbent medium is deflagration-resistant in relation to the germane gas adsorbed thereon, i.e., under deflagration conditions of 65° C. and 650 torr, under which free germane gas undergoes deflagration, the activated carbon sorbent medium does not sustain deflagration of the adsorbed germane gas or thermally desorb the germane gas so that it undergoes subsequent deflagration. The deflagration-resistance of the activated carbon sorbent medium is promoted by pre-treatment of the sorbent material to remove extraneous sorbables therefrom and by maintaining the fill level of the sorbent medium in the gas storage and dispensing vessel at a substantial value, e.g., of at least 30%.

    摘要翻译: 锗烷存储和分配系统,其中将锗烷气体吸附保留在含有吸附和游离的锗烷气体的容器中的活性炭吸附剂介质上。 活性炭吸附剂介质相对于其上吸附的锗烷气体,即在65℃和650托的爆燃条件下,具有爆燃阻力,在此条件下,游离的锗烷气体经历爆燃,活性炭吸附剂介质不能保持爆燃 吸附的锗烷气体或热解吸锗烷气体,使其经历随后的爆燃。 通过预处理吸附剂材料来促进活性炭吸附剂介质的防爆性,以从其中除去外来的吸附物,并且通过将吸附剂介质在气体储存和分配容器中的填充水平保持在基本值,例如 至少30%。