公开(公告)号：US5175929A

公开(公告)日：1993-01-05

申请号：US845992

申请日：1992-03-04

申请人： Thomas R. Anthony ,  James F. Fleischer

发明人： Thomas R. Anthony ,  James F. Fleischer

IPC分类号： C23C16/56 ,  C23C16/01 ,  C23C16/26 ,  C23C16/27 ,  C23F1/00 ,  D03D47/32

CPC分类号： C23C16/27 ,  C23C16/01 ,  Y10T29/49432 ,  Y10T29/4981 ,  Y10T29/49984 ,  Y10T428/12229

摘要： An improved method of producing articles by chemical vapor deposition and articles made therefrom. The method comprises machining an appropriate shape on a suitable substrate, positioning an insert within the shape, depositing a support member material on the shape and the insert to produce a support member, separating the support member from the substrate, chemically vapor depositing an article material on the support member and etching away the support member to produce a free standing article, such as a funnel shaped diamond water-jet mixing tube.