Pressure Sensor
    31.
    发明申请
    Pressure Sensor 审中-公开
    压力传感器

    公开(公告)号:US20160305839A1

    公开(公告)日:2016-10-20

    申请号:US15103016

    申请日:2014-11-14

    CPC classification number: G01L19/142 G01L9/0075

    Abstract: The invention relates to a pressure sensor that can be used at low temperatures—in particular, at temperatures below −70° C.—comprising: a solid metal sensor body (1), having a front region (3) and a base (5) adjoining thereto, the front region (3) of which has a larger cross-sectional area than the base (5), and the front region (3) of which has an outer edge (11), which can be clamped by means of a fastening device to install the pressure sensor at the location of use; a recess (7), which is provided in the front region (3) and is open towards a front side of the front region (3) that faces away from the base (5); a metal measuring diaphragm (9, 9′), to which a pressure (p) to be measured is applied from outside during measurement operation and which can be deformed elastically depending upon the pressure, is arranged on the front side of the sensor body (1), closes off the recess (7) from the outside, consists of the same metal as the sensor body (1), and is spaced apart from the outer edge (11) of the front region (3); and an electromechanical transducer for detection, by means of measurement, of the pressure-dependent deformation of the measuring diaphragm (9, 9′), having at least one measuring element (55, 57), which is electrically insulated from the measuring diaphragm (9, 9′) and the sensor body (1) by means of an insulating element (51, 53).

    Abstract translation: 本发明涉及一种可在低温下使用的压力传感器,特别是在低于-70℃的温度下使用 - 包括:具有前部区域(3)和基部(5)的固体金属传感器主体(1) ),其前部区域(3)具有比所述基座(5)更大的横截面面积,并且其前部区域(3)具有外边缘(11),所述外部边缘可以通过 用于在使用位置安装压力传感器的紧固装置; 凹部(7),其设置在所述前部区域(3)中并且朝向所述前部区域(3)的远离所述基部(5)的前侧开口; 在测量操作期间从外部施加测量压力(p)的金属测量膜(9,9'),并且可以根据压力弹性变形,设置在传感器体的前侧( 1),从外部封闭凹部(7),由与传感器主体(1)相同的金属构成,并与前部区域(3)的外边缘(11)间隔开; 以及用于通过测量来检测测量膜片(9,9')的压力变形的机电换能器,其具有与测量膜片电绝缘的至少一个测量元件(55,57) 9,9')和传感器体(1)之间的绝缘元件(51,53)。

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