Method for control of a vacuum valve arranged between two vacuum chambers
    31.
    发明授权
    Method for control of a vacuum valve arranged between two vacuum chambers 有权
    用于控制布置在两个真空室之间的真空阀的方法

    公开(公告)号:US07036794B2

    公开(公告)日:2006-05-02

    申请号:US10917641

    申请日:2004-08-13

    CPC classification number: F16K31/12 F16K3/0254 F16K51/02 Y10T137/7762

    Abstract: A method for controlling a vacuum valve arranged between two vacuum chambers comprises a valve body with a valve opening, a closure member which closes the valve opening in a closed state of the vacuum valve and which releases the valve opening in an open state of the vacuum valve, wherein, for closing the valve opening by the closure member in the closed state of the vacuum valve, at least one flexible seal contacts a sealing surface of the vacuum valve, which sealing surface is acted upon by a pressing force in the closed state of the vacuum valve, an actuating device for opening and closing the vacuum valve with at least one actuator by which the seal is placed against the sealing surface for closing the vacuum valve, and with a control unit which controls this at least one actuator, pressure measurement values being supplied to this control unit as input signals from pressure sensors which detect the respective pressure in the two vacuum chambers, wherein a differential pressure between the two vacuum chambers is determined by the control unit and the magnitude of the pressing force acting on the seal in the closed state of the vacuum valve is controlled by the control unit depending on the determined differential pressure by controlling the at least one actuator.

    Abstract translation: 一种设置在两个真空室之间的真空阀的控制方法包括具有阀开口的阀体,封闭构件,其在真空阀的关闭状态下关闭阀开口,并且在真空的打开状态下释放阀开口 阀,其中,为了在真空阀的关闭状态下通过关闭构件关闭阀开口,至少一个柔性密封件接触真空阀的密封表面,该密封表面由闭合状态下的压力作用 的致动装置,用于打开和关闭具有至少一个致动器的真空阀的致动装置,通过该致动器将密封件抵靠密封表面放置以关闭真空阀;以及控制单元,其控制该至少一个致动器,压力 作为来自压力传感器的输入信号提供给该控制单元的测量值,该压力传感器检测两个真空室中的相应压力,其中差压为 两个真空室之间的吐温由控制单元确定,并且在真空阀的关闭状态下作用在密封件上的按压力的大小由控制单元根据所确定的压差由控制至少一个致动器来控制。

    Vacuum valve
    32.
    发明授权
    Vacuum valve 有权
    真空阀

    公开(公告)号:US07011294B1

    公开(公告)日:2006-03-14

    申请号:US10936163

    申请日:2004-09-08

    CPC classification number: F16K3/0227 F16K3/0218 F16K3/14 F16K51/02

    Abstract: A vacuum valve comprises a valve housing with a valve opening having a longitudinal axis and a valve seat, a valve plate which is displaceable in a straight line in a displacement direction between an open position in which it releases the valve opening and a closed position in which its contacts the valve seat of the valve housing and closes and seals the valve opening, this valve plate being arranged on at least one valve rod which is displaceable axial to the displacement of the valve plate, a flexible sealing ring which is arranged at a front side of the valve plate or at the valve seat of the valve housing, a sealing surface which is arranged at the valve seat of the valve housing or at the front side of the valve plate and which is contacted by the sealing ring in the closed position of the valve plate, wherein the sealing surface and the sealing ring are arranged in parallel planes which are inclined relative to the displacement direction of the valve plate around an axis extending at right angles to the displacement direction and at right angles to the longitudinal axis of the valve opening, and at least one sliding-spacing part which is arranged at the front side of the valve plate next to the sealing ring or sealing surface or at the valve seat next to the sealing surface or sealing ring and which forms a sliding bearing for the valve plate relative to the valve housing when closing the valve along a final section of the displacement path of the valve plate until the closed position of the valve plate is reached and which keeps the valve plate at a distance from the valve housing in the closed position of the valve plate and accordingly limits the pressing of the sealing ring.

    Abstract translation: 真空阀包括具有纵向轴线和阀座的阀开口的阀壳体,阀板,其在释放阀开口的打开位置和释放阀开口的打开位置之间在位移方向上以直线移位, 其与阀壳体的阀座接触并关闭并密封阀开口,该阀板布置在至少一个阀杆上,该阀杆可以与阀板的位移轴向移动;柔性密封环,其布置在 阀板的前侧或阀壳的阀座处的密封表面设置在阀壳体的阀座处或阀板的前侧,并且在密封环中与密封环接触 阀板的位置,其中密封表面和密封环布置成平行的平面,相对于围绕轴线延伸的阀板的位移方向倾斜 与所述阀开口的纵向轴线成直角并且与所述阀开口的纵向轴线成直角;以及至少一个滑动间隔部分,所述至少一个滑动间隔部分布置在所述阀板的前侧,靠近所述密封环或密封表面 阀座靠近密封表面或密封环,并且当沿着阀板的位移路径的最后部分关闭阀门时,阀板相对于阀壳体形成滑动轴承,直到阀板的关闭位置 并且在阀板的关闭位置中使阀板保持与阀壳体一定距离,从而限制了密封环的按压。

    Vacuum pipe
    33.
    发明授权
    Vacuum pipe 失效
    真空管

    公开(公告)号:US06416037B1

    公开(公告)日:2002-07-09

    申请号:US09759026

    申请日:2001-01-11

    Inventor: Friedrich Geiser

    CPC classification number: F16K3/18 F16K51/02

    Abstract: A vacuum pipe for a part which is mounted so as to be movable and projects from outside a vacuum chamber into a vacuum in the vacuum chamber, comprises an opening in a wall of the vacuum chamber limiting the vacuum, with an inner side facing the vacuum and an outer side at which is provided an annular sealing surface surrounding the opening, an annular sealing surface at the part projecting through the opening into the vacuum from outside the vacuum, a sealing arrangement which is provided between the annular sealing surfaces of the wall and of the part and which comprises at least one sealing ring of elastic material, and a guide device which guides the part relative to the wall and by which at least a minimum axial pressing force is maintained on the at least one sealing ring in every position of the part, resulting in a deformation of the at least one sealing ring such that tightness is ensured, wherein the deformation of the sealing ring changes at least in areas of the sealing ring when the part moves relative to the wall.

    Abstract translation: 用于安装成能够可移动并且从真空室外部突出到真空室中的真空的部件的真空管包括限定真空的真空室的壁中的开口,其中内侧面向真空 并且外侧设置有围绕开口的环形密封表面,在该部分处从该真空外部突出穿过该开口进入真空的部分处的环形密封表面,设置在该壁的环形密封表面和 并且其包括至少一个弹性材料的密封环,以及引导装置,其引导该部分相对于壁,并且至少一个最小的轴向压力保持在至少一个密封环上的每个位置 该部分导致至少一个密封环的变形,以确保密封性,其中密封圈的变形至少在密封圈的区域中变化 g当零件相对于墙壁移动时。

    Valve slide with slide housing
    34.
    发明授权
    Valve slide with slide housing 失效
    带滑块的滑阀

    公开(公告)号:US4809950A

    公开(公告)日:1989-03-07

    申请号:US197116

    申请日:1988-05-20

    Inventor: Friedrich Geiser

    CPC classification number: F16K3/314 F16K51/02

    Abstract: A valve slide has a housing with a sealing surface which has portions located one behind the other seen in direction of the axis of a slide passage opening. The portions located one behind the other are connected to outwardly extending plane sealing surface portions through continuously extending curved portions. The imaginary generatrices of the sealing surface portions forming a sealing surface extend parallel to the axis of the slide passage openings. The sealing surface is finished. The closing member has a contact surface corresponding to the shape of the sealing member. The slide can be used in vacuum systems. The closing member is formed of one piece and can be subjected to high accelerating forces, so that the slide can be used for quick-closing valves and emergency valves.

    Abstract translation: 阀滑动件具有壳体,其具有密封表面,所述密封表面具有沿着滑动通道开口的轴线方向看到的部分。 一个接一个地定位的部分通过连续延伸的弯曲部分连接到向外延伸的平面密封表面部分。 形成密封表面的密封表面部分的假想母线平行于滑动通道开口的轴线延伸。 密封面完成。 封闭构件具有与密封构件的形状对应的接触面。 滑块可用于真空系统。 关闭构件由一体形成并且可以受到高加速力,使得滑块可用于快速关闭阀和应急阀。

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