Dry etching process for semiconductor
    32.
    发明授权
    Dry etching process for semiconductor 失效
    半导体干蚀刻工艺

    公开(公告)号:US5871659A

    公开(公告)日:1999-02-16

    申请号:US665545

    申请日:1996-06-18

    CPC分类号: H01L21/3065

    摘要: A process for dry etching a silicon substrate, in which a mask exposing a region of the surface of the silicon substrate is formed, and the exposed region is dry etched. The dry etching is performed with a gas mixture including chlorine or a chlorine-containing gas, an oxygen-containing gas, and a fluorine-containing gas in which a ratio of a flow rate of oxygen gas to a flow rate of chlorine gas, O.sub.2 /Cl.sub.2, is selected to be from 0.6 to 3. The gas mixture may also contain a fluorine-containing gas and helium. Preferably, the gas mixture excludes carbon-containing gases. The dry etching process allows for an increased etch rate, as well as a high etch selectivity compared to that of SiO.sub.2 gas. The trench formed in the substrate by this process can be made of a larger depth with high reproducibility and good configuration. The sidewall profile angle of the trench is maintained slightly tapered, with a sidewall profile angle of approximately 90 degrees. Also, by mixing HBr gas into the gas mixture, it is possible to better control the formation of the trench. Thus, this process makes it possible to form, in a silicon substrate, a regularly configured and very deep trench with high accuracy and high etch rate.

    摘要翻译: 一种用于干蚀刻硅衬底的方法,其中形成露出硅衬底表面的区域的掩模,并且暴露区域被干蚀刻。 干蚀刻用包括氯或含氯气体,含氧气体和含氟气体的气体混合物进行,其中氧气流量与氯气流量的比例为O 2 / Cl2被选择为0.6至3.气体混合物还可含有含氟气体和氦气。 优选地,气体混合物不包括含碳气体。 与SiO 2气体相比,干蚀刻工艺允许提高蚀刻速率,以及高蚀刻选择性。 通过该工艺在衬底中形成的沟槽可以由更大的深度制成,具有高的再现性和良好的配置。 沟槽的侧壁轮廓角保持略微渐缩,侧壁轮廓角度约为90度。 此外,通过将HBr气体混入气体混合物中,可以更好地控制沟槽的形成。 因此,该方法使得可以在硅衬底中形成具有高精度和高蚀刻速率的规则构造和非常深的沟槽。

    Passive aircraft wingtip strike detection system and method

    公开(公告)号:US09805610B2

    公开(公告)日:2017-10-31

    申请号:US14561920

    申请日:2014-12-05

    CPC分类号: G08G5/04 G08G5/0021 G08G5/065

    摘要: A system and method for passively detecting aircraft wingtip strikes includes generating a digital base map represented by a plurality of aerodrome cells. A numeric value representative of the specific wingtip is assigned to each of the aerodrome cells. An index count array is generated that has a separate entry for each numeric value. A digital aircraft structure representative of an aircraft is generated, and is represented by a plurality of aircraft cells. A determination is made as to whether a portion of the aerodrome cells are or would be replaced with the plurality of aircraft cells. Each numeric value of the aerodrome cells that are or would be replaced is counted to determine a replacement count associated therewith and that is entered into the separate entry in the index count array for that numeric value. One or more potential aircraft wingtip strikes are detected based on the replacement counts.

    Stabilized approach monitor
    34.
    发明授权
    Stabilized approach monitor 有权
    稳定的进场监视器

    公开(公告)号:US08116923B2

    公开(公告)日:2012-02-14

    申请号:US12621794

    申请日:2009-11-19

    摘要: Systems and methods for suppressing an unstable alert when the aircraft is in the process of landing on a temporarily displaced threshold. In an example process, a processor on the aircraft determines the aircraft is on an approach to landing on a runway based on information received from one or more data sources on the aircraft, then retrieves predefined glideslope information for the runway from a memory device that is in signal communication with the processor. Next, the processor determines whether position of the aircraft is above the predefined glideslope by a first threshold amount. If the aircraft is determined to be above the predefined glideslope by the first threshold amount, the processor issues an unstable alert only if a flight path angle of the aircraft is greater than an angle of the predefined glideslope by a second threshold amount.

    摘要翻译: 当飞机正在临时移动的阈值上着陆的过程中用于抑制不稳定警报的系统和方法。 在示例过程中,飞行器上的处理器基于从飞机上的一个或多个数据源接收到的信息来确定飞行器正在着陆在跑道上,然后从存储器设备中检索用于跑道的预定滑翔信息, 与处理器进行信号通信。 接下来,处理器确定飞行器的位置是否高于预定滑行边界第一阈值量。 如果飞行器被确定为高于预定滑翔道第一阈值量,则只有当飞行器的飞行路径角度大于预定滑翔坡的角度达到第二阈值量时,处理器才发出不稳定的警报。

    SYSTEMS AND METHODS FOR BROADCASTING AN UNKNOWN AIRPORT ADVISORY
    35.
    发明申请
    SYSTEMS AND METHODS FOR BROADCASTING AN UNKNOWN AIRPORT ADVISORY 有权
    广播未知机场咨询的系统和方法

    公开(公告)号:US20080059010A1

    公开(公告)日:2008-03-06

    申请号:US11469802

    申请日:2006-09-01

    IPC分类号: G01C23/00 G06F19/00

    摘要: Systems and methods for advising a flight crew member that an enhanced ground proximity warning system (EGPWS), for example, may continue to provide terrain alerts, cautions, warnings, or the like because an intended landing site for the aircraft is not recognized within a database of airports. An unknown airport advisory is generated and broadcast after the aircraft is in a landing configuration, when the aircraft is greater than a threshold distance from the nearest landing site in the database, but before the terrain alerts are broadcast. The pilot may actuate a “terrain inhibit” selection device after receiving the advisory. The inhibit device may deactivate or mute subsequent alerts generated by the EGPWS during that particular landing sequence.

    摘要翻译: 为飞行机组成员提供建议的系统和方法,例如,增强的地面接近警告系统(EGPWS)可能会继续提供地形警报,警告,警告等,因为飞机的预定着陆点在 机场数据库 在飞机处于着陆配置之后,当飞行器大于距离数据库中最近的着陆点的阈值距离之前,但在广播地形警报之前,将产生一个未知的机场咨询。 飞行员可以在收到建议书后启动“地形禁止”选择装置。 禁止装置可以在该特定着陆序列期间停用或静音由EGPWS产生的后续警报。

    Reference electrode and detector using the same for detecting acidity or basicity of oil
    36.
    发明申请
    Reference electrode and detector using the same for detecting acidity or basicity of oil 审中-公开
    参考电极和检测器用于检测油的酸度或碱度

    公开(公告)号:US20070029196A1

    公开(公告)日:2007-02-08

    申请号:US11493537

    申请日:2006-07-27

    IPC分类号: G01N27/26

    CPC分类号: G01N33/2876 G01N27/301

    摘要: A reference electrode is used for detecting acidity or basicity of an oil with a sensitive electrode changed in response to the acidity or basicity of the oil. The reference electrode and the sensitive electrode are used as a pair of electrodes for detecting a difference between an electric potential of the sensitive electrode and an electric potential of the reference electrode. The reference electrode has a substantially constant output potential with respect to a pH which is changed according to the acidity or basicity of the oil. The reference electrode is constructed with an electrode substrate made of a metal, and a metal salt provided on the electrode substrate, such that the metal salt contains the metal and is hardly soluble in water.

    摘要翻译: 参考电极用于检测响应于油的酸度或碱度而改变的敏感电极的油的酸度或碱度。 参考电极和敏感电极用作一对电极,用于检测敏感电极的电位和参考电极的电位之间的差异。 相对于根据油的酸度或碱度而改变的pH,参考电极具有基本恒定的输出电位。 参考电极由金属制成的电极基板和设置在电极基板上的金属盐构成,金属盐含有金属,难以溶于水。

    SMART ALTITUDE CALLOUT FOR HELICOPTERS
    37.
    发明申请
    SMART ALTITUDE CALLOUT FOR HELICOPTERS 有权
    SMART ALTTUDE CALLOUT for HELICOPTERS

    公开(公告)号:US20070013558A1

    公开(公告)日:2007-01-18

    申请号:US11160509

    申请日:2005-06-27

    申请人: Yasuo Ishihara

    发明人: Yasuo Ishihara

    IPC分类号: G08B21/00

    摘要: A method, computer software product, and system to generate altitude callouts according to proximity to a runway at an airport or heliport includes determining whether the helicopter is flying in proximity to the runway and automatically selecting an altitude threshold increment set based upon the determination. The threshold increment set including a plurality of altitude threshold values. A calculated terrain clearance value is calculated for each of the plurality of altitude threshold values. A suitable warning is automatically generated according to the comparison. Selecting an altitude threshold increment set includes selecting one of the group consisting of first altitude threshold increment set including a plurality of higher altitude threshold values and a second altitude increment set including the plurality of higher altitude threshold values and further including a plurality of lower altitude threshold values.

    摘要翻译: 根据机场或直升机场的跑道附近产生高度标注的方法,计算机软件产品和系统包括确定直升机是否在靠近跑道的地方飞行,并且基于该确定自动选择设置的高度阈值增量。 包括多个高度阈值的阈值增量集合。 为多个高度阈值中的每一个计算出计算出的地形距离值。 根据比较自动生成合适的警告。 选择高度阈值增量集合包括选择由包括多个较高海拔阈值的第一高度阈值增量集合和包括多个较高高度阈值的第二高度增量集合组成的组中的一个,并且还包括多个较低高度阈值 价值观。

    Apparatus, method, and computer program product for generating terrain clearance floor envelopes about a selected runway
    40.
    发明授权
    Apparatus, method, and computer program product for generating terrain clearance floor envelopes about a selected runway 有权
    装置,方法和计算机程序产品,用于在所选择的跑道上产生地形清除地面信封

    公开(公告)号:US06707394B2

    公开(公告)日:2004-03-16

    申请号:US09496296

    申请日:2000-02-01

    IPC分类号: G08B2300

    CPC分类号: G05D1/0676 G01C5/005

    摘要: The present invention provides several apparatus, methods, and computer program products for generating a terrain clearance floor envelope for use in a ground proximity warning system. In one embodiment, the present invention includes a processor that defines a terrain clearance floor envelope having at least two boundaries. In this embodiment, the processor defines at least one of the boundaries based on a runway position quality factor, an altitude data quality factor, and an aircraft position quality factor. Using these factors, the processor of the present invention can more precisely define the boundaries of the envelope about the selected runway. Further, the processor of the present invention does not unnecessarily increase the region between the envelope and runway where no ground proximity alarms are generated. In another embodiment, the present invention includes a processor that defines the terrain clearance floor envelope to be asymmetrical, such that respective profiles of the envelope in a radial cross-section are different in at least two radial directions from a center point of the selected runway. Importantly, in one embodiment of the present invention, the processor defines end regions of the terrain clearance floor envelope adjacent to the ends of the selected runway to have a different slope profile than side regions of the terrain clearance floor envelope adjacent to the sides of the selected runway. This, in turn, allows the processor to define the end regions to reflect a landing pattern for an aircraft approaching the end of the selected runway, while also defining the side regions to reflect a flight pattern for an aircraft approaching the side of the selected runway.

    摘要翻译: 本发明提供了用于产生用于地面接近警告系统中的地形间隙地面信封的几种装置,方法和计算机程序产品。 在一个实施例中,本发明包括限定具有至少两个边界的地形间隙地面包层的处理器。 在该实施例中,处理器基于跑道位置质量因子,高度数据质量因子和飞机位置质量因子来定义至少一个边界。 使用这些因素,本发明的处理器可以更精确地定义关于所选跑道的信封的边界。 此外,本发明的处理器不会不必要地增加不产生接地接近警报的信封和跑道之间的区域。 在另一个实施例中,本发明包括一个处理器,该处理器将地形间隙底面信封定义为不对称的,使得在径向横截面中的包络的相应轮廓在从所选择的跑道的中心点起的至少两个径向方向上是不同的 。 重要的是,在本发明的一个实施例中,处理器限定与所选择的跑道的端部相邻的地形间隙地板信封的端部区域,以具有与邻近所述跑道侧面的地形间隙地板信封的侧部区域不同的斜率分布 选择跑道。 这反过来又允许处理器定义端部区域以反映接近所选跑道端部的飞行器的着陆模式,同时还限定侧面区域以反映接近所选跑道侧面的飞行器的飞行模式 。