公开(公告)号：US20110281029A1

公开(公告)日：2011-11-17

申请号：US13132023

申请日：2009-12-10

申请人： Kazuyoshi Honda ,  Yasuharu Shinokawa ,  Hiromasa Yagi ,  Satoshi Shibutani ,  Sadayuki Okazaki ,  Yuko Ogawa ,  Daisuke Suetsugu

发明人： Kazuyoshi Honda ,  Yasuharu Shinokawa ,  Hiromasa Yagi ,  Satoshi Shibutani ,  Sadayuki Okazaki ,  Yuko Ogawa ,  Daisuke Suetsugu

IPC分类号： C23C16/44 ,  C23C16/04

CPC分类号： C23C14/042 ,  C23C14/14 ,  C23C14/24 ,  C23C14/243 ,  C23C14/541 ,  C23C14/562

摘要： Deterioration of the degree of vacuum in a vacuum chamber is prevented while securing adequate cooling performance by gas cooling. A substrate 21 is provided in a vacuum, and the cooling body 1 is provided close to a film non-formation surface of the substrate 21. A thin film is formed by depositing a film forming material on a film formation surface of the substrate 21 while introducing a cooling gas into between the substrate 21 and the cooling body 1. At this time, a gas which reacts with the film forming material is introduced as the cooling gas.

摘要翻译： 在通过气体冷却确保足够的冷却性能的同时防止真空室中的真空度恶化。 在真空中设置基板21，将冷却体1设置在基板21的膜非形成面附近。通过在基板21的成膜面上沉积成膜材料而形成薄膜，同时 将冷却气体引入到基板21和冷却体1之间。此时，引入与成膜材料反应的气体作为冷却气体。

公开(公告)号：US07727580B2

公开(公告)日：2010-06-01

申请号：US11390477

申请日：2006-03-28

申请人： Masaki Hirase ,  Hiromasa Yagi ,  Daizo Jito ,  Kei Kobayashi ,  Katsunobu Sayama

发明人： Masaki Hirase ,  Hiromasa Yagi ,  Daizo Jito ,  Kei Kobayashi ,  Katsunobu Sayama

IPC分类号： B05D5/12 ,  B05D3/12

CPC分类号： H01M4/139 ,  H01M4/0404 ,  H01M4/0421 ,  H01M4/0435 ,  H01M4/131 ,  H01M4/134 ,  H01M4/386 ,  H01M4/525 ,  H01M4/661 ,  H01M10/052

摘要： A method of manufacturing an electrode for a lithium secondary battery in which a thin film of active material is deposited on a current collector is provided that eliminates adverse effects on the battery caused by protrusions adhered on an electrode surface. The method of manufacturing an electrode for lithium secondary batteries includes depositing a thin film of active material on a current collector using thin-film deposition equipment as shown in FIG. 1, and performing a compression process after depositing the thin film, whereby the heights of protrusions formed on the electrode surface are reduced.

摘要翻译： 提供了一种制造其中在集电器上沉积活性材料薄膜的锂二次电池的电极的方法，其消除了由附着在电极表面上的突起引起的对电池的不利影响。 制造锂二次电池用电极的方法包括使用如图1所示的薄膜沉积设备在集电体上沉积活性材料薄膜。 如图1所示，并且在沉积薄膜之后进行压缩处理，由此在电极表面上形成的突起的高度减小。

公开(公告)号：US20060228467A1

公开(公告)日：2006-10-12

申请号：US11390477

申请日：2006-03-28

申请人： Masaki Hirase ,  Hiromasa Yagi ,  Daizo Jito ,  Kei Kobayashi ,  Katsunobu Sayama

发明人： Masaki Hirase ,  Hiromasa Yagi ,  Daizo Jito ,  Kei Kobayashi ,  Katsunobu Sayama

IPC分类号： B05D5/12

CPC分类号： H01M4/139 ,  H01M4/0404 ,  H01M4/0421 ,  H01M4/0435 ,  H01M4/131 ,  H01M4/134 ,  H01M4/386 ,  H01M4/525 ,  H01M4/661 ,  H01M10/052

摘要： A method of manufacturing an electrode for a lithium secondary battery in which a thin film of active material is deposited on a current collector is provided that eliminates adverse effects on the battery caused by protrusions adhered on an electrode surface. The method of manufacturing an electrode for lithium secondary batteries includes depositing a thin film of active material on a current collector using thin-film deposition equipment as shown in FIG. 1, and performing a compression process after depositing the thin film, whereby the heights of protrusions formed on the electrode surface are reduced.

摘要翻译： 提供了一种制造其中在集电器上沉积活性材料薄膜的锂二次电池的电极的方法，其消除了由附着在电极表面上的突起引起的对电池的不利影响。 制造锂二次电池用电极的方法包括使用如图1所示的薄膜沉积设备在集电体上沉积活性材料薄膜。 如图1所示，并且在沉积薄膜之后进行压缩处理，由此在电极表面上形成的突起的高度减小。