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公开(公告)号：US20180019401A1
公开(公告)日：2018-01-18
申请号：US15718573
申请日：2017-09-28
Applicant: International Business Machines Corporation
Inventor： Ali Afzali-Ardakani , Bharat Kumar , George S. Tulevski
CPC classification number: H01L51/0049 , C01B32/158 , H01L51/0007 , H01L51/0012 , H01L51/0048 , H01L51/0558 , H01L2251/303
Abstract: A method of fabricating a carbon nanotube based device, including forming a trench having a bottom surface and sidewalls on a substrate, selectively depositing a bi-functional compound having two reactive moieties in the trench, wherein a first of the two reactive moieties selectively binds to the bottom surface, converting a second of the two reactive moieties to a diazonium salt; and reacting the diazonium salt with a dispersion of carbon nanotubes to form a carbon nanotube layer bound to the bottom surface of the trench.
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公开(公告)号：US20170244039A1
公开(公告)日：2017-08-24
申请号：US15046699
申请日：2016-02-18
Applicant: International Business Machines Corporation
Inventor： Ali Afzali-Ardakani , Bharat Kumar , George S. Tulevski
CPC classification number: H01L51/0048 , C01B32/158 , H01L51/0007 , H01L51/0012 , H01L51/0049 , H01L51/0558 , H01L2251/303
Abstract: A method of fabricating a carbon nanotube based device, including forming a trench having a bottom surface and sidewalls on a substrate, selectively depositing a bi-functional compound having two reactive moieties in the trench, wherein a first of the two reactive moieties selectively binds to the bottom surface, converting a second of the two reactive moieties to a diazonium salt; and reacting the diazonium salt with a dispersion of carbon nanotubes to form a carbon nanotube layer bound to the bottom surface of the trench.
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公开(公告)号：US12019376B2
公开(公告)日：2024-06-25
申请号：US17507933
申请日：2021-10-22
Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
Inventor： Jing Guo , Bharat Kumar , Ekmini A. De Silva , Jennifer Church , Dario Goldfarb , Nelson Felix
IPC: H01L21/027 , G03F7/20 , G03F7/32
CPC classification number: G03F7/2004 , G03F7/322 , G03F7/325
Abstract: A method of making an adhesion layer of an extreme ultraviolet (EUV) stack is presented. The method includes grafting an ultraviolet (UV) sensitive polymer brush on a hardmask, the polymer brush including a UV cleavable unit, depositing EUV resist over the polymer brush, exposing the EUV resist to remove the EUV resist in exposed areas by applying a developer, and flooding the exposed area with a UV light and a solvent developer to remove exposed portions of the polymer brush.
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Patent Agency Ranking
公开(公告)号：US20200292942A1
公开(公告)日：2020-09-17
申请号：US16299645
申请日：2019-03-12
Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
Inventor： Jing Guo , Bharat Kumar , Ekmini A. De Silva , Jennifer Church , Dario Goldfarb , Nelson Felix
IPC: G03F7/20 , H01L21/027 , G03F7/16 , G03F7/32
Abstract: A method of making an adhesion layer of an extreme ultraviolet (EUV) stack is presented. The method includes grafting an ultraviolet (UV) sensitive polymer brush on a hardmask, the polymer brush including a UV cleavable unit, depositing EUV resist over the polymer brush, exposing the EUV resist to remove the EUV resist in exposed areas by applying a developer, and flooding the exposed area with a UV light and a solvent developer to remove exposed portions of the polymer brush.
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公开(公告)号：US20190288210A1
公开(公告)日：2019-09-19
申请号：US16425378
申请日：2019-05-29
Applicant: International Business Machines Corporation
Inventor： Ali Afzali-Ardakani , Bharat Kumar , George S. Tulevski
IPC: H01L51/00 , C01B32/158 , H01L51/05
Abstract: A method of fabricating a carbon nanotube based device, including forming a trench having a bottom surface and sidewalls on a substrate, selectively depositing a bi-functional compound having two reactive moieties in the trench, wherein a first of the two reactive moieties selectively binds to the bottom surface, converting a second of the two reactive moieties to a diazonium salt; and reacting the diazonium salt with a dispersion of carbon nanotubes to form a carbon nanotube layer bound to the bottom surface of the trench.
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公开(公告)号：US20190165276A1
公开(公告)日：2019-05-30
申请号：US16264777
申请日：2019-02-01
Applicant: International Business Machines Corporation
Inventor： Ali Afzali-Ardakani , Bharat Kumar , George S. Tulevski
IPC: H01L51/00 , H01L51/05 , C01B32/158
Abstract: A method of fabricating a carbon nanotube based device, including forming a trench having a bottom surface and sidewalls on a substrate, selectively depositing a bifunctional compound having two reactive moieties in the trench, wherein a first of the two reactive moieties selectively binds to the bottom surface, converting a second of the two reactive moieties to a diazonium salt; and reacting the diazonium salt with a dispersion of carbon nanotubes to form a carbon nanotube layer bound to the bottom surface of the trench.
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公开(公告)号：US10084139B2
公开(公告)日：2018-09-25
申请号：US15276213
申请日：2016-09-26
Applicant: International Business Machines Corporation
Inventor： Ali Afzali-Ardakani , Bharat Kumar , George S. Tulevski
CPC classification number: H01L51/0049 , C01B32/158 , H01L51/0007 , H01L51/0012 , H01L51/0048 , H01L51/0558 , H01L2251/303
Abstract: A method of fabricating a carbon nanotube based device, including forming a trench having a bottom surface and sidewalls on a substrate, selectively depositing a bi-functional compound having two reactive moieties in the trench, wherein a first of the two reactive moieties selectively binds to the bottom surface, converting a second of the two reactive moieties to a diazonium salt; and reacting the diazonium salt with a dispersion of carbon nanotubes to form a carbon nanotube layer bound to the bottom surface of the trench.
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公开(公告)号：US09859500B2
公开(公告)日：2018-01-02
申请号：US15046699
申请日：2016-02-18
Applicant: International Business Machines Corporation
Inventor： Ali Afzali-Ardakani , Bharat Kumar , George S. Tulevski
CPC classification number: H01L51/0048 , C01B32/158 , H01L51/0007 , H01L51/0012 , H01L51/0049 , H01L51/0558 , H01L2251/303
Abstract: A method of fabricating a carbon nanotube based device, including forming a trench having a bottom surface and sidewalls on a substrate, selectively depositing a bi-functional compound having two reactive moieties in the trench, wherein a first of the two reactive moieties selectively binds to the bottom surface, converting a second of the two reactive moieties to a diazonium salt; and reacting the diazonium salt with a dispersion of carbon nanotubes to form a carbon nanotube layer bound to the bottom surface of the trench.
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