摘要:
A method of controlling the temperature of a semiconductor substrate for prevention of any cracks from being formed in the semiconductor substrate event though semiconductors having different temperature rise/fall characteristics are fed into a reactor in which each semiconductor substrates is subjected to an oxidation, diffusion, or a chemical vapor deposition process. The temperatures are measured at various points in the semiconductor substrates in the heated reactor; the temperature rise/fall characteristic thereof is determined by computing the rate of temperature rise and the in-plane temperature distribution out of the measured values; a temperature control program adaptable for said temperature rise/fall characteristic is automatically selected out of a plurality of temperature control programs written in advance; the semiconductor substrate is controlled on the basis of the selected temperature control program. Also is provided a susceptor to reduce contamination of the semiconductor substrate with the metal impurities containing gas flow at the time of forming a thin film on the semiconductor substrate, and a gas phase thin film growth apparatus using such susceptor. The susceptor is formed with a gas flow deflector jutting downwardly from the peripheral portion of the reverse side of the susceptor to deflect the gas flow moving upon rotation along the reverse side of the susceptor from the center thereof to the peripheral portion thereof.
摘要:
A fuel injection port 21 formed in a seat 20 is opened and closed by a movable valve 14 supported by a flat spring 16. The movable valve 14 is biased by an elastic force of a coil spring 26 in a direction that closes the fuel injection port 21. When electric power is supplied to a solenoid coil 4, the movable valve 14 is moved to a direction that opens the fuel injection port 21 as a result of an electromagnetic attraction force between a magnetic circuit M for generating an electromagnetic attraction force and the movable valve 14. Air gaps G0, G1 and G2 are formed within the fuel injection port and permeance ratios between the air gaps may be set to optimal values.
摘要:
A steering rear axle (5) of a fork lift truck is swingable about a longitudinal swing shaft (9). Even with an ignition key (89) on, if an operation switch (88) is off, an electromagnetic switch valve (83) is de-energized, holding a port-connecting valve position (C) allowing hydraulic oil to be supplied from a hydraulic line (79) via the electromagnetic switch valve (83) and a hydraulic line (49) to a driving hydraulic cylinder (31), so that a slider (23) abuts on a stopper member (19), restricting a swing action of the steering axle (5). With the operation switch (88) turned on, the electromagnetic switch valve (83) is energized, having a port-connecting valve position (D) interrupting a hydraulic oil supply to the driving hydraulic cylinder (31), causing the slider (23) to depart from the stopper member (19), enabling the swing action of the steering axle (5).
摘要:
When plural types of key-switch bodies arranged on a keyboard base are fitted with the corresponding types of key-tops, fitting of an incorrect key-top on a key-switch is avoided. Each key-top has a key-top side assortment cord comprising a unique combination of convex portions and concave portions which is determined by the type thereof, and a housing of each key-switch body has a body side assortment cord comprising a unique combination of convex portions and concave portions engageable with the key-top side assortment cord in pairs. The key-tops can be fitted to the key-switch bodies only when the key-top side assortment cord is brought into engagement with the body side assortment cord.
摘要:
An aerosol product comprising the following compound (A), a middle-chain fatty acid triglyceride and a liquefied hydrofluoroalkane is provided. In the production of an aerosol product using a liquefied hydrofluoroalkane as propellant, the use of a middle-chain fatty acid triglyceride as dispersant insures good dispersion of compound (A) in the propellant. The result is an aerosol product free from variation in the dispensed dose of compound (A).
摘要:
A transparent keyboard device is disclosed which is superior in design synthetically, including spacer portions. The keyboard device comprises a keyboard body with a large number of key tops attached to the upper surface thereof, an upper case, and a lower case, the upper and lower cases accommodating the keyboard body therein, the key tops being formed of a transparent resin, and the keyboard body having a housing formed of an opaque resin and which supports the key tops. Key-shaped spacers formed of the same transparent resin as that of the key tops are mounted on the upper surface of the keyboard body.
摘要:
In the keyboard assembly, post-like support members are formed sideways of each of the key top housings corresponding to key tops to which torsion bars are attached respectively, out of plural key top housings, the support members being erected integrally from a housing plate and having a hollow structure, through holes are formed respectively in base end portions of the support members so as to extend through the housing plate, and a sheet member is disposed on a back side of the housing plate, the sheet member comprising waterproofing protuberances for closing the through holes in a waterproof manner, spring portions for pushing back the key tops upward, and a sheet body portion which renders the spring portions and the waterproofing protuberances integral with each other.
摘要:
A keyboard device is disclosed which has a structure capable of ensuring positioning and fixing of a keyboard body relative to a case. The keyboard device has a keyboard body and a case. The case comprises an upper case which covers the upper surface side of the keyboard body and a lower case which covers the lower surface side of the keyboard body. A tongue piece and a cutout portion for engagement with the upper and lower cases are provided centrally of two longitudinally extending inner side and this side of the keyboard body. Positioning and fixing of the keyboard body relative to the case are effected by those two engaging portions. Also at two positions of the inner side of the keyboard body are provided fixing portions for fixing the keyboard body to the case, namely, the upper and lower cases.