FET-based gas sensor
    31.
    发明授权
    FET-based gas sensor 有权
    基于FET的气体传感器

    公开(公告)号:US07707869B2

    公开(公告)日:2010-05-04

    申请号:US11587172

    申请日:2005-04-21

    IPC分类号: G01N33/00 B01L5/00

    CPC分类号: G01N33/0013 G01N27/4143

    摘要: An operating method is disclosed for the selective detection of a target gas in a gas mixture to be measured by a field effect transistor with a gas-sensitive layer disposed on a carrier substrate, wherein the gas mixture to be measured is prepared by an electrochemical element such that the measured gas mixture includes minimal amounts of interfering gases that interfere with the measurement of the target gas, and/or at least one target gas is activated such that it is detected by the gas-sensitive layer.

    摘要翻译: 公开了一种操作方法,用于选择性地检测待由气体敏感层设置在载体基底上的场效应晶体管测量的气体混合物中的目标气体,其中待测量的气体混合物由电化学元素 使得测量的气体混合物包括干扰目标气体测量的最小量的干扰气体,和/或至少一个目标气体被激活,使得其被气敏层检测到。

    Sensor and Operating Method for Detecting Soot
    32.
    发明申请
    Sensor and Operating Method for Detecting Soot 有权
    用于检测烟灰的传感器和操作方法

    公开(公告)号:US20090126458A1

    公开(公告)日:2009-05-21

    申请号:US11988125

    申请日:2006-06-27

    IPC分类号: G01N27/04

    摘要: The invention relates to a sensor and a method for detecting soot, said method comprising the following steps: a first operating temperature is set on the sensor for a measuring phase, such that soot can be deposited on the surface of the substrate, but depositions interfering with the measurement of the soot are prevented; the time between the beginning of the measurement and the increase in conductivity between the electrodes is recorded; and a second operating temperature is set on the sensor for a regeneration phase, such that the deposited soot is burned with the oxygen in the test gas. The inventive product is a soot sensor for using in the automobile industry.

    摘要翻译: 本发明涉及一种用于检测烟灰的传感器和方法,所述方法包括以下步骤:在传感器上设置第一操作温度用于测量阶段,使得烟炱可以沉积在衬底的表面上,但沉积物干涉 防止烟灰的测量; 记录测量开始和电极间电导率增加之间的时间; 并且在传感器上设置第二工作温度用于再生阶段,使得沉积的烟灰与测试气体中的氧气一起燃烧。 本发明的产品是用于在汽车工业中使用的烟灰传感器。

    Gas-sensitive field-effect transistor with air gap
    33.
    发明授权
    Gas-sensitive field-effect transistor with air gap 失效
    具有气隙的气敏场效应晶体管

    公开(公告)号:US07459732B2

    公开(公告)日:2008-12-02

    申请号:US11396243

    申请日:2006-03-31

    IPC分类号: H01L27/108

    CPC分类号: G01N27/002 G01N27/414

    摘要: A gas-sensitive field-effect transistor may be formed from a substrate with a gas-sensitive layer and a transistor processed separately and then assembled. The substrate may be patterned to form spacers by which the height of an air gap between the transistor and the sensitive layer may be adjustable to a relatively precise degree. Formation of the spacers can be achieved by patterning the substrate using material-removal techniques. The height of the spacers may be adjusted in the layer thickness of the gas-sensitive layer and for the transistor fabricated using a CMOS process. Suitable techniques for producing recesses between the spacers include, for example, polishing, cutting, sandblasting, lithographic dry etching, or wet-chemical etching. Suitable materials for the substrate may include, for example, glass, ceramic, aluminum oxide, silicon, or a dimensionally stable polymer. Following preparation of the substrate and the transistor, the two elements of the transistor are joined, for example, using flip-chip methods or adhesive-bonding technology.

    摘要翻译: 气体敏感场效应晶体管可以由具有气体敏感层的衬底和分开处理的晶体管形成,然后组装。 衬底可以被图案化以形成间隔物,通过该间隔物,晶体管和敏感层之间的气隙的高度可以相对精确地调节。 可以通过使用材料去除技术对衬底进行图案化来实现间隔物的形成。 间隔物的高度可以在气敏层的层厚度和使用CMOS工艺制造的晶体管中进行调整。 用于在间隔件之间产生凹槽的合适技术包括例如抛光,切割,喷砂,光刻干蚀刻或湿法化学蚀刻。 用于基材的合适材料可以包括例如玻璃,陶瓷,氧化铝,硅或尺寸稳定的聚合物。 在准备衬底和晶体管之后,晶体管的两个元件例如使用倒装芯片方法或粘接技术连接。

    Soot sensor and operating method
    34.
    发明申请
    Soot sensor and operating method 审中-公开
    烟灰传感器和操作方法

    公开(公告)号:US20080011053A1

    公开(公告)日:2008-01-17

    申请号:US11827029

    申请日:2007-07-10

    IPC分类号: G01N33/00 G01N29/02

    摘要: A soot sensor includes a plurality of sensor elements including a base body having at least a part that is excitable to produce mechanical oscillations, the base body having at least one defined surface having predefined catalytic properties and subjected to a measurement gas, and a heating element acting on said base body, wherein a change in an oscillation frequency, an oscillation amplitude or the quality of the oscillation which has occurred due to increasing precipitation of soot on the defined surface indicates the presence of soot.

    摘要翻译: 烟炱传感器包括多个传感器元件,其包括具有至少一部分可激发以产生机械振荡的基体,所述基体具有至少一个具有预定催化特性且经受测量气体的限定表面,以及加热元件 作用在所述基体上,其中由于在限定表面上的烟灰的沉淀增加而发生的振荡频率,振荡幅度或振荡质量的变化表示烟灰的存在。

    Gas-sensitive field-effect transistor with air gap
    35.
    发明申请
    Gas-sensitive field-effect transistor with air gap 失效
    具有气隙的气敏场效应晶体管

    公开(公告)号:US20060260737A1

    公开(公告)日:2006-11-23

    申请号:US11396243

    申请日:2006-03-31

    IPC分类号: B32B37/00

    CPC分类号: G01N27/002 G01N27/414

    摘要: A gas-sensitive field-effect transistor may be formed from a substrate with a gas-sensitive layer and a transistor processed separately and then assembled. The substrate may be patterned to form spacers by which the height of an air gap between the transistor and the sensitive layer may be adjustable to a relatively precise degree. Formation of the spacers can be achieved by patterning the substrate using material-removal techniques. The height of the spacers may be adjusted in the layer thickness of the gas-sensitive layer and for the transistor fabricated using a CMOS process. Suitable techniques for producing recesses between the spacers include, for example, polishing, cutting, sandblasting, lithographic dry etching, or wet-chemical etching. Suitable materials for the substrate may include, for example, glass, ceramic, aluminum oxide, silicon, or a dimensionally stable polymer. Following preparation of the substrate and the transistor, the two elements of the transistor are joined, for example, using flip-chip methods or adhesive-bonding technology.

    摘要翻译: 气体敏感场效应晶体管可以由具有气体敏感层的衬底和分开处理的晶体管形成,然后组装。 衬底可以被图案化以形成间隔物,通过该间隔物,晶体管和敏感层之间的气隙的高度可以相对精确地调节。 可以通过使用材料去除技术对衬底进行图案化来实现间隔物的形成。 间隔物的高度可以在气敏层的层厚度和使用CMOS工艺制造的晶体管中进行调整。 用于在间隔件之间产生凹槽的合适技术包括例如抛光,切割,喷砂,光刻干蚀刻或湿法化学蚀刻。 用于基材的合适材料可以包括例如玻璃,陶瓷,氧化铝,硅或尺寸稳定的聚合物。 在准备衬底和晶体管之后,晶体管的两个元件例如使用倒装芯片方法或粘接技术连接。

    Optical measuring cell and gas monitor
    36.
    发明授权
    Optical measuring cell and gas monitor 失效
    光学测量单元和气体监测器

    公开(公告)号:US08570520B2

    公开(公告)日:2013-10-29

    申请号:US12516008

    申请日:2007-11-19

    IPC分类号: G01N21/00

    摘要: An optical measuring cell for measuring gas absorption with a light source for introducing light into a measuring volume and a light sensor located approximately opposite the light source in the direction of light propagation and relative to the measuring volume for receiving light that is guided through the measuring volume is provided. The concentration of one or multiple target gases in the measuring volume is detected by an evaluation unit. The measuring volume is constituted by an internal volume of a hollow fiber having an internal diameter less than 1 mm.

    摘要翻译: 一种用于测量气体吸收的光学测量单元,用于将光引入到测量体积中,并且光传感器位于光传播方向上相对于光源大致相对的位置,并且相对于用于接收通过测量引导的光的测量体积 提供体积。 测量体积中的一个或多个目标气体的浓度由评估单元检测。 测量体积由内径小于1mm的中空纤维的内部体积构成。

    Cage telemetry module and system
    40.
    发明授权
    Cage telemetry module and system 有权
    笼式遥测模块和系统

    公开(公告)号:US07667588B2

    公开(公告)日:2010-02-23

    申请号:US10951450

    申请日:2004-09-27

    IPC分类号: G08B19/00

    CPC分类号: A01K1/031

    摘要: A remote sensor assembly includes a silicon substrate, a plurality of microelectromechanical system (MEMS) sensors supported on the silicon substrate, a wireless communication circuit supported on the silicon substrate, and a processing device supported on the silicon substrate. The processing device is operable to obtain measurement values from at least one of plurality of MEMS sensors, perform a first filtering operation on the measurement values, and determine whether to cause the communication circuit to transmit a signal to an external device based on the first filtering operation.

    摘要翻译: 远程传感器组件包括硅衬底,支撑在硅衬底上的多个微机电系统(MEMS)传感器,支撑在硅衬底上的无线通信电路以及支撑在硅衬底上的处理设备。 处理装置可操作以从多个MEMS传感器中的至少一个获得测量值,对测量值执行第一滤波操作,并且基于第一滤波确定是否使通信电路向外部设备发送信号 操作。