公开(公告)号：US20150028882A1

公开(公告)日：2015-01-29

申请号：US14384782

申请日：2013-03-13

Applicant: MKS Instruments, Inc.

Inventor： Gerardo A. Brucker ,  Timothy C. Swinney ,  G. Jeffery Rathbone

IPC: G01N27/64 ,  H01J49/06 ,  G01N27/60

CPC classification number: G01N27/64 ,  G01N1/405 ,  G01N27/60 ,  H01J49/06 ,  H01J49/162 ,  H01J49/4245

Abstract: A method of detecting specific gas species in an ion trap, the specific gas species initially being a trace component of a first low concentration in the volume of gas, includes ionizing the gas including the specific gas species, thereby creating specific ion species. The method further includes producing an electrostatic potential in which the specific ion species are confined in the ion trap to trajectories. The method also includes exciting confined specific ion species with an AC excitation source having an excitation frequency, scanning the excitation frequency of the AC excitation source to eject the specific ion species from the ion trap, and detecting the ejected specific ion species. The method further includes increasing the concentration of the specific ion species within the ion trap relative to the first low concentration prior to scanning the excitation frequency that ejects the ions of the specific gas species.

Abstract translation: 一种在离子阱中检测特定气体种类的方法，特定气体种类最初是气体体积中第一低浓度的微量成分，包括电离包括特定气体种类的气体，从而产生特定的离子物质。 该方法还包括产生静电电位，其中特定离子种类被限制在离子阱中的轨迹上。 该方法还包括具有激发频率的AC激发源的激发约束特定离子种类，扫描AC激发源的激发频率以从离子阱中排出特定离子种类，并检测喷出的特定离子种类。 该方法还包括在扫描喷射特定气体物质的离子的激发频率之前相对于第一低浓度增加离子阱内的特定离子种类的浓度。