公开(公告)号：US06794793B2

公开(公告)日：2004-09-21

申请号：US09966963

申请日：2001-09-27

Applicant: Samuel Lee Miller ,  Murray Steven Rodgers ,  Stephen Matthew Barnes ,  Jeffry Joseph Sniegowski ,  Paul Jackson McWhorter

Inventor： Samuel Lee Miller ,  Murray Steven Rodgers ,  Stephen Matthew Barnes ,  Jeffry Joseph Sniegowski ,  Paul Jackson McWhorter

IPC: H02N100

CPC classification number: B81B3/0062 ,  B33Y80/00 ,  H02N1/006 ,  H02N1/008

Abstract: The present invention provides a MEM system (10) having a platform (14) that is both elevatable from the substrate (12) on which it is fabricated and tiltable with one, two or more degrees of freedom with respect to the substrate (12). In one embodiment, the MEM system (10) includes the platform (14), a pair of A-frame structures (40), and two pairs of actuators (30) formed on the substrate (12). Ends (46A) of rigid members (46) extending from apexes (40A) of the A-frame structures (40) are attached to the platform (14) by compliant members (48A, 48B). The platform (14) is also attached to the substrate (12) by a compliant member (48C). The A-frame structures (40) are separately pivotable about bases (40B) thereof. Each pair of actuators (30) is coupled through a yoke (32) and displacement multiplier (34) to one of the A-frame structures (40) and is separately operable to effect pivoting of the A-frame structures (40) with respect to the substrate (12) by equal or unequal angular amounts. Upon pivoting, the A-frame structures (40) act as lever arms to both lift the platform (14) and tilt the platform (14) with respect to the substrate (12) with at least one degree of freedom. Since the platform (14) lifts up from the surface of the substrate (12), it may be tilted at large angles with respect to the substrate (12).

Abstract translation: 本发明提供了一种具有平台（14）的MEM系统（10），该平台可从其上制造并可相对于基板（12）的一个或多个自由度倾斜的基板（12）升高， 。 在一个实施例中，MEM系统（10）包括平台（14），一对A框架结构（40）和形成在基板（12）上的两对致动器（30）。 从A框架结构（40）的顶点（40A）延伸的刚性构件（46）的端部（46A）通过柔性构件（48A，48B）附接到平台（14）。 平台（14）也通过顺应构件（48C）附接到基板（12）。 A框架结构（40）可以围绕其基部（40B）分开枢转。 每对致动器（30）通过轭（32）和位移乘法器（34）耦合到A框架结构（40）中的一个，并且可单独地操作以实现A框架结构（40）相对于 通过相等或不相等的角度量到基板（12）。 在枢转时，A框架结构（40）用作杠杆臂，以提升平台（14）并且以至少一个自由度相对于基板（12）倾斜平台（14）。 由于平台（14）从基板（12）的表面上升，所以可以相对于基板（12）以大的角度倾斜。

公开(公告)号：US06706619B2

公开(公告)日：2004-03-16

申请号：US10099140

申请日：2002-03-16

Applicant: Samuel Lee Miller ,  Murray Steven Rodgers

Inventor： Samuel Lee Miller ,  Murray Steven Rodgers

IPC: H01L21301

CPC classification number: H01L21/302 ,  B81B7/0006 ,  B81B7/04

Abstract: A method for creating a layout of at least a portion of a microelectromechanical system is disclosed. In one embodiment, a plurality of die are formed on a wafer. Each die includes a plurality of rows of a plurality of mirror assemblies, a plurality of off-chip electrical contacts, and an electrical trace bus that is disposed between adjacent pairs of rows. This electrical trace bus is electrically interconnected with mirror assemblies in at least one of the rows. A plurality of these die are formed on a wafer. A chip is separated from the wafer such that a chip width is an integer multiple of the die width and such that a chip height is an integer number of the rows of mirror assemblies without requiring the chip height to be an integer multiple of the die height.

Abstract translation: 公开了一种用于创建微机电系统的至少一部分的布局的方法。 在一个实施例中，在晶片上形成多个管芯。 每个管芯包括多行多个反射镜组件，多个片外电触点和布置在相邻的行对之间的电迹线总线。 该电迹线总线与至少一行中的反射镜组件电互连。 多个这些管芯形成在晶片上。 芯片与晶片分离，使得芯片宽度是芯片宽度的整数倍，并且使得芯片高度是整数行的反射镜组件，而不需要芯片高度为模具高度的整数倍 。