公开(公告)号：US20220130685A1

公开(公告)日：2022-04-28

申请号：US17331751

申请日：2021-05-27

Applicant: Samsung Electronics Co., Ltd.

Inventor： Seokhyun Lee ,  Kyoung Lim Suk ,  Ae-Nee Jang ,  Jaegwon Jang

IPC: H01L21/56 ,  H01L23/485 ,  H01L23/498 ,  H01L23/00

Abstract: Disclosed is a semiconductor package comprising a semiconductor chip, an external connection member on the semiconductor chip, and a dielectric film between the semiconductor chip and the external connection member. The semiconductor chip includes a substrate, a front-end-of-line structure on the substrate, and a back-end-of-line structure on the front-end-of-line structure. The back-end-of-line structure includes metal layers stacked on the front-end-of-line structure, a first dielectric layer on the uppermost metal layer and including a contact hole that vertically overlaps a pad of an uppermost metal layer, a redistribution line on the first dielectric layer and including a contact part in the contact hole and electrically connected to the pad, a pad part, and a line part that electrically connects the contact part to the pad part, and an upper dielectric layer on the redistribution line.

公开(公告)号：US20210407940A1

公开(公告)日：2021-12-30

申请号：US17474614

申请日：2021-09-14

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jongyoun Kim ,  Jungho Park ,  Seokhyun Lee ,  Yeonho Jang ,  Jaegwon Jang

IPC: H01L23/00 ,  H01L23/498 ,  H01L21/768 ,  H01L25/065

Abstract: A semiconductor package includes a redistribution structure including a redistribution insulating layer and a redistribution pattern, a semiconductor chip provided on a first surface of the redistribution insulation layer and electrically connected to the redistribution pattern, and a lower electrode pad provided on a second surface opposite to the first surface of the redistribution insulating layer, the lower electrode pad including a first portion embedded in the redistribution insulating layer and a second portion protruding from the second surface of the redistribution insulating layer, wherein a thickness of the first portion of the lower electrode pad is greater than a thickness of the second portion of the lower electrode pad.