公开(公告)号：US06829049B1

公开(公告)日：2004-12-07

申请号：US09848733

申请日：2001-05-03

Applicant: Craig Uhrich ,  Jianhui Chen

Inventor： Craig Uhrich ,  Jianhui Chen

IPC: G01J400

CPC classification number: G02B13/143 ,  G01N21/211 ,  G01N2021/213 ,  G02B1/02 ,  G02B7/026

Abstract: A broadband ellipsometer is disclosed with an all-refractive optical system for focusing a probe beam on a sample. The ellipsometer includes a broadband light source emitting wavelengths in the UV and visible regions of the spectrum. The change in polarization state of the light reflected from the sample is arranged to evaluate characteristics of a sample. The probe beam is focused onto the sample using a composite lens system formed from materials transmissive in the UV and visible wavelengths and arranged to minimize chromatic aberrations. The spot size on the sample is preferably less than 3 mm and the aberration is such that the focal shift over the range of wavelengths is less than five percent of the mean focal length of the system.

Abstract translation: 公开了一种宽带椭偏仪，其具有用于将探针束聚焦在样品上的全折射光学系统。 椭偏仪包括在光谱的UV和可见光区域发射波长的宽带光源。 从样品反射的光的偏振状态的变化被布置成评估样品的特性。 使用由在UV和可见波长透射的材料形成的复合透镜系统将探针束聚焦到样品上，并布置成使色差最小化。 样品上的斑点尺寸优选小于3mm，并且像差是使得波长范围上的焦点偏移小于系统的平均焦距的百分之五。

公开(公告)号：US06819423B2

公开(公告)日：2004-11-16

申请号：US10333416

申请日：2003-01-16

Applicant: Jean-Louise Stehle ,  Pierre Boher ,  Michel Luttmann

Inventor： Jean-Louise Stehle ,  Pierre Boher ,  Michel Luttmann

IPC: G01J400

CPC classification number: G01J4/04 ,  G01N21/211

Abstract: The invention concerns an ellipsometer comprising a source (S) supplying at least an infrared radiation, a sample-holder (PE), a sensor (D), a first optical system mounted between the source (S) and the sample-holder (PE), so as to illuminate a sample placed on the sample-holder, under oblique view with a polarised light beam and a second optical system mounted between the sample-holder (PE) and the sensor (D) for collecting the light reflected by the sample. The ellipsometer further comprises a blocking device (F2) mounted on the reflection path in the focal plane of the focusing device (M2) of the second optical system, and adapted to block parasite rays (RP) derived from the rear surface (FAR) of the sample and to allow through useful rays (RU) derived from the front surface (FAV) of the sample towards the sensor (D), thereby enabling to obtain a resolution with respect to the sample front and rear surfaces.

公开(公告)号：US06816260B2

公开(公告)日：2004-11-09

申请号：US10147143

申请日：2002-05-15

Applicant: Jens Peupelmann ,  Egbert Krause ,  Adalbert Bandemer

Inventor： Jens Peupelmann ,  Egbert Krause ,  Adalbert Bandemer

IPC: G01J400

CPC classification number: G02B6/274 ,  G01J4/00 ,  G02B6/02109 ,  G02B6/276 ,  G02B6/2766 ,  G02B6/29317

Abstract: A fiber polarimeter has one or more oblique fiber Bragg gratings disposed one behind the other in a fiber. The fiber Bragg gratings couple out portions of a light wave input to the fiber depending on its polarization. For more than one fiber Bragg grating a wave plate is disposed in the fiber between consecutive fiber Bragg gratings. The portions of the light wave from the fiber Bragg grating(s) are detected to produce measurement data that is used to calculate four Stokes parameters for determining polarization, degree of polarization and/or power of the light wave.

Abstract translation: 光纤偏振计具有在光纤中一个在另一个之后设置的一个或多个倾斜光纤布拉格光栅。 纤维布拉格光栅根据其极化将耦合到输入到光纤的光波的部分。 对于多于一个的光纤布拉格光栅，在连续的光纤布拉格光栅之间的光纤中设置波片。 检测来自光纤布拉格光栅的光波的部分，以产生用于计算用于确定光波的偏振度，偏振度和/或光功率的四个斯托克斯参数的测量数据。

公开(公告)号：US06798514B2

公开(公告)日：2004-09-28

申请号：US10298435

申请日：2002-11-18

Applicant: James Maurice Daniels

Inventor： James Maurice Daniels

IPC: G01J400

CPC classification number: G01J4/04

Abstract: This device makes measurements of the intensity of light in four different polarizations, chosen for maximum accuracy and efficiency. In the “measuring head” the light passes through two liquid crystal waveplates and a polarizing filter before falling on a light sensitive element. Different interchangeable measuring heads, using this principle, can be made for different applications. The device has electronic control and display circuits, coordinated by a microprocessor. With a photodiode as the light sensitive element, the device is a portable stand alone polarimeter which displays the polarization parameters in whatever representation the operator chooses. With a digital camera as the light sensitive element, the device produces four scenes which can be processed digitally and uploaded as a scene seen in any arbitrary polarization. Also, the unpolarized component can be filtered out; something impossible with physical filters placed before the lens.

Abstract translation: 该设备可以测量四种不同极化的光强度，以获得最大的精度和效率。 在“测量头”中，光在光敏元件落下之前通过两个液晶波片和偏振滤光片。 使用这种原理的不同的可互换的测量头可以用于不同的应用。该装置具有由微处理器协调的电子控制和显示电路。作为光敏元件的光电二极管，该装置是便携式独立的偏光计，其显示 极性参数以操作员选择的任何表示形式。以数码相机作为光敏元件，该设备产生四个可以数字处理的场景，并将其上传为任何极化中看到的场景。 此外，非偏振组件可以过滤掉; 物理滤镜放置在镜头之前是不可能的。

公开(公告)号：US06798513B2

公开(公告)日：2004-09-28

申请号：US10120641

申请日：2002-04-11

Applicant: Michael Abraham

Inventor： Michael Abraham

IPC: G01J400

CPC classification number: G01F23/284 ,  G01N21/211 ,  G01N21/47 ,  G01N21/9501

Abstract: The present invention relates to a measuring module, whose measuring device comprises a measuring head equipped with a miniaturized measuring unit, and a spatially separately arranged control and evaluation unit, and wherein the measuring head is arranged so as to be able to slide linearly by means of a sliding drive.

Abstract translation: 本发明涉及一种测量模块，其测量装置包括配备有小型化测量单元的测量头和空间上分开设置的控制和评估单元，其中测量头被布置成能够通过装置线性地滑动 的滑动驱动器。

公开(公告)号：US06795185B2

公开(公告)日：2004-09-21

申请号：US10094383

申请日：2002-03-08

Applicant: Tomoya Yoshizawa ,  Kunio Otsuki

Inventor： Tomoya Yoshizawa ,  Kunio Otsuki

IPC: G01J400

CPC classification number: G01B11/0641

Abstract: A film thickness measuring apparatus capable of restricting a measurement area on the surface of a sample is provided. An incident optical system provides an irradiating polarized light to the surface of the sample. A detecting optical system receives the reflected light having an elliptical polarization and provides a reduced aperture that can restrict the light provided through a fiber optic conduit to a spectrometer and thereby eliminate aberrations and noise problems.

Abstract translation: 提供了能够限制样品表面上的测量区域的膜厚度测量装置。 入射光学系统向样品的表面提供照射偏振光。 检测光学系统接收具有椭圆偏振的反射光，并提供减小的光圈，其可以将通过光纤导管提供的光限制在光谱仪上，从而消除像差和噪声问题。

公开(公告)号：US06774997B2

公开(公告)日：2004-08-10

申请号：US10395746

申请日：2003-03-24

Applicant: Allan Rosencwaig ,  Jon Opsal

Inventor： Allan Rosencwaig ,  Jon Opsal

IPC: G01J400

CPC classification number: G01B11/0641

Abstract: An optical measurement system is disclosed for evaluating samples with multi-layer thin film stacks. The optical measurement system includes a reference ellipsometer and one or more non-contact optical measurement devices. The reference ellipsometer is used to calibrate the other optical measurement devices. Once calibration is completed, the system can be used to analyze multi-layer thin film stacks. In particular, the reference ellipsometer provides a measurement which can be used to determine the total optical thickness of the stack. Using that information coupled with the measurements made by the other optical measurement devices, more accurate information about individual layers can be obtained.

Abstract translation: 公开了一种用于评估具有多层薄膜叠层的样品的光学测量系统。 光学测量系统包括参考椭偏仪和一个或多个非接触光学测量装置。 参考椭偏仪用于校准其他光学测量装置。 一旦校准完成，该系统可用于分析多层薄膜堆叠。 特别地，参考椭偏仪提供可用于确定叠层的总光学厚度的测量。 使用与其他光学测量装置的测量结合的信息，可以获得关于各个层的更准确的信息。

公开(公告)号：US06744509B2

公开(公告)日：2004-06-01

申请号：US10224041

申请日：2002-08-20

Applicant: Scott R. Davis ,  Radoslaw J. Uberna ,  Richard A. Herke

Inventor： Scott R. Davis ,  Radoslaw J. Uberna ,  Richard A. Herke

IPC: G01J400

CPC classification number: G01J4/00

Abstract: In a polarimeter for analyzing a state of polarization of a light beam incident thereon, the polarimeter including first and second variable retarders configured to exhibit first and second retardance values, respectively, variable over an overall retardance range, and a detector arrangement, a method includes the steps of directing the light beam through the first and second variable retarders and sweeping a selected one of the first and second retardance values progressively and unidirectionally through at least a part of the overall retardance range to produce a plurality of retardance values. The method further includes the steps of, for the plurality of retardance values, detecting at the detector arrangement at least a spatial portion of the beam and extracting the state of polarization based on the spatial portion of the light beam detected at the detector arrangement corresponding to the plurality of retardance values.

Abstract translation: 在用于分析入射到其上的光束的偏振状态的偏振计中，包括被配置为分别呈现第一和第二延迟值的第一和第二可变延迟器的偏振器分别在整个延迟范围内变化，并且检测器装置包括 将光束引导通过第一和第二可变延迟器并逐渐地和单向地扫过第一和第二延迟值中的所选择的一个延迟值的步骤通过整个延迟范围的至少一部分，以产生多个延迟值。 所述方法还包括以下步骤：对于所述多个延迟值，在所述检测器装置处至少检测所述光束的空间部分，并且基于在所述检测器装置处检测到的光束的空间部分提取偏振状态，对应于 多个延迟值。

公开(公告)号：US06738139B1

公开(公告)日：2004-05-18

申请号：US10407578

申请日：2003-04-07

Applicant: Ronald A. Synowicki ,  Thomas E. Tiwald

Inventor： Ronald A. Synowicki ,  Thomas E. Tiwald

IPC: G01J400

CPC classification number: G01N21/211

Abstract: Disclosed is a method for determination of bulk refractive indicies of fluids utilizing thin films thereof on a roughened surface of a two sided rigid or semi-rigid object.

Abstract translation: 公开了一种在双面刚性或半刚性物体的粗糙表面上利用其薄膜测定流体体积折射率的方法。

公开(公告)号：US06721050B2

公开(公告)日：2004-04-13

申请号：US09801838

申请日：2001-03-08

Applicant: Jaroslav Vecer ,  Petr Herman

Inventor： Jaroslav Vecer ,  Petr Herman

IPC: G01J400

CPC classification number: G01N21/21 ,  G01J3/447 ,  G01J4/00

Abstract: The method uses a physical phenomenon of dispersion of the optical rotation for identification of the spectral characteristics of light Polychromatic linearly polarized radiation passes through the environment that rotates a polarization plane of its spectral components, depending on their wavelength. After a subsequent passage through the analyzing polarizer, a dependence of the light intensity S(&phgr;) on the angle &phgr;, that the analyzing polarizer forms with the polarization plane of the analyzed light, is measured. S(&phgr;) is in a mathematical relationship with the spectrum of the analyzed radiation I(&lgr;), where &lgr; is a wavelength. S(&phgr;) allows for the determination of the spectral characteristics of the analyzed radiation. In devices based on the above principle, the collimated polarized beam of the analyzed radiation passes first through the optical element that exhibits a dispersion of the optical rotation, i.e. rotator (4), then through the analyzing polarizer (5), and after a projection is detected by a proper detector (7). The detector measures S(&phgr;) as a function of the angle &phgr; of the analyzer. From S(&phgr;) the parameters of the spectrum I(&lgr;) are determined.

Abstract translation: 该方法使用光学旋转的物理现象来识别光的光谱特性多色线性偏振辐射通过旋转其光谱分量的偏振面的环境，这取决于它们的波长。 在随后通过分析偏振器之后，测量光强度S（phi）对分析偏振器与分析光的偏振面形成的角度phi的依赖关系。 S（phi）与分析的辐射I（λ）的光谱成数学关系，其中λ是波长。 S（phi）允许确定分析的辐射的光谱特性。 在基于上述原理的装置中，分析的辐射的准直偏振光束首先通过表现出旋转的色散（即旋转体（4））然后穿过分析偏振器（5）的光学元件，并且在投影 由适当的检测器（7）检测。 检测器测量S（phi）作为分析仪角度phi的函数。 从S（phi）中确定光谱I（λ）的参数。