公开(公告)号：US09500530B2

公开(公告)日：2016-11-22

申请号：US14173793

申请日：2014-02-05

Applicant: AP SYSTEMS INC.

Inventor： Sang Hyun Ji

IPC: G01K15/00 ,  G01K1/00 ,  G01J5/00 ,  G01D18/00 ,  G01J5/52 ,  G01J5/08

CPC classification number: G01J5/522 ,  G01J5/0007 ,  G01J5/0887

Abstract: Disclosed is a calibrating apparatus which is adapted to remove a measurement deviation of a pyrometer, and more particularly, to an apparatus for calibrating a pyrometer, which calibrates a reference value so as to remove a deviation in a temperature measured in a pyrometer. The apparatus for calibrating a pyrometer includes a blackbody including a radiant space from which radiant energy is radiated, a body housing configured to receive the blackbody therein and including a light output wall having a light output port connected with the radiant space, a light output wall protecting cover configured to be coupled with the light output wall of the body housing so as to define a passage connecting the light output wall of the body housing and an outside environment, and a fixing member configured to fix the light output wall protecting cover to the light output wall of the body housing.

Abstract translation: 公开了一种校准装置，其适于去除高温计的测量偏差，更具体地，涉及用于校准高温计的装置，其校准参考值以消除在高温计中测量的温度的偏差。 用于校准高温计的装置包括黑体，其包括辐射能量辐射的辐射空间，被构造为在其中接收黑体的主体壳体，并且包括具有与辐射空间连接的光输出端口的光输出壁，光输出壁 保护盖，其构造成与所述主体壳体的所述光输出壁联接，以便限定连接所述主体壳体的光输出壁和外部环境的通​​道;以及固定构件，其将所述光输出壁保护盖固定到 光输出墙体的外壳。

公开(公告)号：US09117858B2

公开(公告)日：2015-08-25

申请号：US13791848

申请日：2013-03-08

Applicant: AP SYSTEMS INC.

Inventor： Il Hwan Lim ,  Jang Woo Shim ,  Chul Soo Kim ,  Seung Ae Choi

IPC: F26B3/30 ,  F26B19/00 ,  F24C7/00 ,  H01L21/67

CPC classification number: H01L21/67115

Abstract: A heater block according to the present invention comprises a light-emitting lamp; a concave reflecting member that is placed opposite the lamp and has a concave reflecting surface at one surface faced with the lamp; a lens module that is inserted into the concave reflecting member and has at least one lens; and a flat reflecting member that is placed opposite the lens module. According to embodiments of the present invention, light emitted from the lamp is reflected by the concave reflecting member. Then, light and heat are collected from the reflected light by the flat reflecting member and the lens module and are irradiated on a substrate. That is, light having energy greater than a conventional manner is irradiated on the substrate to enhance the instant heating temperature and temperature increasing rate of substrate and to increase a heat-focusing area. Therefore, it has an advantage that the productivity of semiconductor or display device manufacture that requires a rapid thermal process is improved.

Abstract translation: 根据本发明的加热器块包括发光灯; 与所述灯相对放置的凹面反射构件，在与所述灯对置的一个面上具有凹面反射面; 透镜模块，其插入到所述凹面反射构件中并且具有至少一个透镜; 以及与透镜模块相对放置的平坦的反射部件。 根据本发明的实施例，从灯发射的光被凹面反射部件反射。 然后，通过平面反射部件和透镜组件从反射光收集光和热，并将其照射在基板上。 也就是说，具有大于常规方式的能量的光被照射在基板上以增强基板的即时加热温度和温度升高速率并增加热聚焦区域。 因此，具有提高需要快速热处理的半导体或显示装置制造的生产率的优点。