公开(公告)号：US20100158345A1

公开(公告)日：2010-06-24

申请号：US12637331

申请日：2009-12-14

申请人： Tadashi Kitamura ,  Akio Ishikawa

发明人： Tadashi Kitamura ,  Akio Ishikawa

IPC分类号： G06K9/00

CPC分类号： G06T7/0006 ,  G06T7/13 ,  G06T2207/30148

摘要： Apparatus and method evaluate a wafer fabrication process for forming patterns on a wafer based upon design data. Within a recipe database, two or more inspection regions are defined on the wafer for analysis. Patterns within each of the inspection regions are automatically selected based upon tendency for measurement variation resulting from variation in the fabrication process. For each inspection region, at least one image of patterns within the inspection region is captured, a reference pattern, represented by one or both of (a) one or more line segments and (b) one or more curves, is automatically generated from the design data. An inspection unit detects edges within each of the images and registers the image with the reference pattern. One or more measurements are determined from the edges for each of the selected patterns and are processed within a statistical analyzer to form statistical information associated with the fabrication process.

摘要翻译： 基于设计数据，装置和方法评估在晶片上形成图案的晶片制造工艺。 在配方数据库中，在晶片上定义两个或更多个检查区域用于分析。 基于制造过程的变化导致的测量变化的趋势，自动地选择每个检查区域内的图案。 对于每个检查区域，捕获检查区域内的图案的至少一个图像，由（a）一个或多个线段和（b）一个或多个曲线中的一个或两个表示的参考图案从 设计数据。 检查单元检测每个图像内的边缘，并用参考图案注册图像。 从针对每个所选择的图案的边缘确定一个或多个测量值，并在统计分析器内处理以形成与制造过程相关联的统计信息。

公开(公告)号：US07336815B2

公开(公告)日：2008-02-26

申请号：US11255136

申请日：2005-10-19

申请人： Akio Ishikawa

发明人： Akio Ishikawa

IPC分类号： G06K9/00

CPC分类号： G06T7/001 ,  G01N21/95607 ,  G01R31/311 ,  G06T2207/30148

摘要： In an image defect inspection method and apparatus which detects a gray level difference between corresponding portions of two images, automatically sets a threshold value based on the distribution thereof, compares the gray level difference with the threshold value, and judges one or the other of the portions to be defective if the gray level difference is larger than the threshold value, provisions are made to enhance defect detection sensitivity by correcting the threshold value when the distribution of the gray level difference is different from the usual distribution. A cumulative frequency of the gray level difference between the corresponding portions of the two images is computed (S103); a converted cumulative frequency is computed by converting the cumulative frequency so that the cumulative frequency shows a linear relationship to the gray level difference when a prescribed distribution is assumed (S104); an approximate straight line is computed in each of two regions, one where the gray level difference is positive and the other where the gray level difference is negative (S105); when the difference between the slopes of the approximate straight lines is larger than a predetermined value (S106), the approximate straight line having the smaller slope is corrected in such a manner the slope increases (S107); and based on the approximate straight line, the threshold value is determined from a prescribed cumulative frequency value in accordance with a prescribed calculation method.

摘要翻译： 在检测两个图像的对应部分之间的灰度差的图像缺陷检查方法和装置中，基于其分布自动设置阈值，将灰度级差与阈值进行比较，并判断其中的一个或另一个 如果灰度级差大于阈值，则有缺陷的部分，通过在灰度级差的分布与通常分布不同的情况下，通过校正阈值来提高缺陷检测灵敏度。 计算两个图像的对应部分之间的灰度级差的累积频率（S103）; 通过转换累积频率来计算转换的累积频率，使得当假设规定分布时，累积频率显示与灰度级差的线性关系（S104）; 在两个区域中的每一个中计算近似的直线，其中灰度级差为正，其中灰度级差为负的另一个（S105）; 当近似直线的斜率之间的差大于预定值时（S106），以斜率增加的方式校正具有较小斜率的近似直线（S107）。 并且基于近似直线，根据规定的计算方法从规定的累积频率值确定阈值。

公开(公告)号：US07330581B2

公开(公告)日：2008-02-12

申请号：US10674654

申请日：2003-09-29

申请人： Akio Ishikawa

发明人： Akio Ishikawa

IPC分类号： G06K9/00

CPC分类号： G06T7/001 ,  G06T2207/30148

摘要： A new image defect inspection method and a new image defect inspection apparatus capable of being used for automatic setting of a threshold value for an appearance inspection apparatus with a high throughput have been disclosed. According to the image defect inspection method and the image defect inspection apparatus, cumulative frequencies of gray level differences of the corresponding parts of two images are calculated, converted cumulative frequencies are calculated by converting the cumulative frequencies so as to be linear with the gray level differences in a predetermined distribution, a straight line approximation to the converted cumulative frequencies is calculated, and a threshold value is determined from a predetermined cumulative frequency based on the calculated straight line approximation according to a predetermined calculation method. Because there holds a linear relationship between the converted cumulative frequencies and the gray level differences, the following process for determining a threshold value is facilitated.

摘要翻译： 已经公开了一种新的图像缺陷检查方法和能够用于自动设置具有高通量的外观检查装置的阈值的新的图像缺陷检查装置。 根据图像缺陷检查方法和图像缺陷检查装置，计算两个图像的相应部分的灰度级差的累积频率，通过将累积频率转换为与灰度级差异成线性来计算转换的累积频率 在预定分布中，计算对转换的累积频率的直线近似，并且根据预定的计算方法基于所计算的直线近似，从预定的累积频率确定阈值。 因为在转换的累积频率和灰度级差之间保持线性关系，因此有助于确定阈值的以下过程。

公开(公告)号：US20080001946A1

公开(公告)日：2008-01-03

申请号：US11808831

申请日：2007-06-13

申请人： Akio Ishikawa

发明人： Akio Ishikawa

IPC分类号： G06T17/00

CPC分类号： G06F9/44526 ,  G06F16/54

摘要： A plurality of viewers which correspond to a plurality of different image file formats, respectively, are activated. An image file retrieving means retrieves a desired image file according a retrieval condition entered by a retrieval condition inputting means. An extension confirming means confirms an image file format of the retrieved image file. A viewer selecting means selects a viewer corresponding to the retrieved image file format to display the image data of the retrieved image file.

摘要翻译： 分别对应于多个不同图像文件格式的多个观看者被激活。 图像文件检索装置根据检索条件输入装置输入的检索条件检索所需的图像文件。 扩展确认装置确认检索到的图像文件的图像文件格式。 观众选择装置选择与所检索的图像文件格式对应的观众来显示检索到的图像文件的图像数据。

公开(公告)号：US20060126914A1

公开(公告)日：2006-06-15

申请号：US11255136

申请日：2005-10-19

申请人： Akio Ishikawa

发明人： Akio Ishikawa

IPC分类号： G06K9/00

CPC分类号： G06T7/001 ,  G01N21/95607 ,  G01R31/311 ,  G06T2207/30148

摘要： In an image defect inspection method and apparatus which detects a gray level difference between corresponding portions of two images, automatically sets a threshold value based on the distribution thereof, compares the gray level difference with the threshold value, and judges one or the other of the portions to be defective if the gray level difference is larger than the threshold value, provisions are made to enhance defect detection sensitivity by correcting the threshold value when the distribution of the gray level difference is different from the usual distribution. A cumulative frequency of the gray level difference between the corresponding portions of the two images is computed (S103); a converted cumulative frequency is computed by converting the cumulative frequency so that the cumulative frequency shows a linear relationship to the gray level difference when a prescribed distribution is assumed (S104); an approximate straight line is computed in each of two regions, one where the gray level difference is positive and the other where the gray level difference is negative (S105); when the difference between the slopes of the approximate straight lines is larger than a predetermined value (S106), the approximate straight line having the smaller slope is corrected in such a manner the slope increases (S107); and based on the approximate straight line, the threshold value is determined from a prescribed cumulative frequency value in accordance with a prescribed calculation method.

摘要翻译： 在检测两个图像的相应部分之间的灰度差的图像缺陷检查方法和装置中，基于其分布自动设置阈值，将灰度级差与阈值进行比较，并判断其中的一个或另一个 如果灰度级差大于阈值，则有缺陷的部分，通过在灰度级差的分布与通常分布不同的情况下，通过校正阈值来提高缺陷检测灵敏度。 计算两个图像的对应部分之间的灰度级差的累积频率（S103）; 通过转换累积频率来计算转换的累积频率，使得当假设规定的分布时，累积频率显示与灰度级差的线性关系（S104）; 在两个区域中的每个区域中计算近似直线，其中灰度级差为正，其中灰度级差为负的另一区域（S105）; 当近似直线的斜率之间的差大于预定值时（S106），以斜率增加的方式校正具有较小斜率的近似直线（S107）。 并且基于近似直线，根据规定的计算方法从规定的累积频率值确定阈值。

公开(公告)号：US07010504B2

公开(公告)日：2006-03-07

申请号：US09817033

申请日：2001-03-27

申请人： Akio Ishikawa ,  Satoshi Konishi ,  Hajime Nakamura

发明人： Akio Ishikawa ,  Satoshi Konishi ,  Hajime Nakamura

IPC分类号： G06F17/60

CPC分类号： G06Q30/08 ,  G06Q40/04

摘要： There is proposed a competitive buying and selling system that avoids unnatural bidding prices and exclusive possession of resources, stabilizes bidding prices, and provides such an environment that participants can bid easily. There are included a first step in which a server opens a subject of buying and selling and a successful bid evaluation function thereof to a plurality of clients, a second step in which each of the clients makes a participant determine the subject of buying and selling and a bidding price thereof by using the successful bid evaluation function, and notifies a determined result to the server, and a third step in which the server selects a bidding price of a participant who has indicated a highest evaluation value based on the successful bid evaluation function among all bidding prices notified from the clients and designates the participant as a successful bidder. The successful bid evaluation function is based on past bidding prices per unit volume and utilization efficiencies of resources knocked down in past. Furthermore, the successful bid evaluation function is based further on a resource occupation rate in bidding of this time.

摘要翻译： 提出了一种竞争性的买卖制度，避免不自然的投标价格和独家拥有的资源，稳定投标价格，并提供参与者轻松投标的环境。 包括第一步骤，其中服务器向多个客户端打开购买和销售的主题以及成功的投标评估功能;第二步，其中每个客户使得参与者确定购买和销售的主题;以及 通过使用成功投标评价功能的投标价格，并将确定的结果通知给服务器，以及第三步骤，其中服务器基于成功的投标评估函数选择已经指示了最高评估值的参与者的投标价格 在客户通知的所有招标价格中，将参与者指定为中标者。 成功的投标评估功能是基于过去每单位数量的出价价格和资源的利用效率。 此外，成功的投标评估功能进一步基于此次投标的资源占用率。

公开(公告)号：US5828120A

公开(公告)日：1998-10-27

申请号：US804413

申请日：1997-02-21

申请人： Akio Ishikawa

发明人： Akio Ishikawa

IPC分类号： H01L21/762 ,  H01L21/765 ,  H01L27/06 ,  H01L27/115 ,  H01L29/00

CPC分类号： H01L27/115 ,  H01L21/76229 ,  H01L21/765 ,  H01L27/0688 ,  H01L27/10894 ,  H01L27/11548 ,  H01L27/11551

摘要： A semiconductor device equipped on the same substrate thereof with a first area isolated for device isolation by a first device isolation structure and with a second area isolated for device isolation by a second device isolation structure, wherein the thickness of the substrate inside the first area is different from the thickness of the substrate inside the second area, and the first and second device isolation structures are buried into the substrate so as to bring their tops into about the same level.

摘要翻译： 一种半导体器件，其配置在同一基板上，第一区域通过第一器件隔离结构隔离用于器件隔离，第二区域被隔离用于通过第二器件隔离结构进行器件隔离，其中第一区域内的衬底的厚度为 不同于第二区域内的衬底的厚度，并且第一和第二器件隔离结构被埋入衬底中，以使它们的顶部达到大致相同的水平。

公开(公告)号：US20130295389A1

公开(公告)日：2013-11-07

申请号：US13877000

申请日：2011-09-30

申请人： Akio Ishikawa ,  Udo Merker ,  Klaus Wussow ,  Katrin Asteman

发明人： Akio Ishikawa ,  Udo Merker ,  Klaus Wussow ,  Katrin Asteman

IPC分类号： H01G9/00 ,  H01G9/025

CPC分类号： H01G9/025 ,  C08G2261/3223 ,  C08K5/13 ,  C08K5/132 ,  C08L25/18 ,  C08L65/00 ,  C09D5/24 ,  C09D165/00 ,  H01G9/0036 ,  H01G9/028 ,  H01G11/48 ,  H01G11/56 ,  Y02E60/13 ,  Y10T428/31533 ,  C08L2666/06

摘要： The present invention relates to a process for the production of a layer composition (10) with an electrically conductive layer (11), comprising the process steps: a) provision of a substrate (12) with a substrate surface (13); b) formation of a polymer layer (14) comprising an electrically conductive polymer (15) on at least a part of the substrate surface (13); c) application of a liquid stabilizer phase, comprising a stabilizer and a liquid phase, to the polymer layer (14) from process step b), wherein the stabilizer phase comprises less than 0.2 wt. %, based on the stabilizer phase, of the electrically conductive polymer, wherein the stabilizer is an aromatic compound with at least two OH groups, and a layer composition (10) and uses thereof.

摘要翻译： 本发明涉及一种用导电层（11）制备层组合物（10）的方法，包括以下工艺步骤：a）提供具有衬底表面（13）的衬底（12）; b）在所述基材表面（13）的至少一部分上形成包含导电聚合物（15）的聚合物层（14）; c）从方法步骤b）向所述聚合物层（14）施加包含稳定剂和液相的液体稳定剂相，其中所述稳定剂相包含小于0.2wt。 基于稳定剂相的导电聚合物，其中稳定剂是具有至少两个OH基团的芳族化合物，以及层组合物（10）及其用途。

公开(公告)号：US07356249B2

公开(公告)日：2008-04-08

申请号：US09904793

申请日：2001-07-13

申请人： Kiyoshi Ota ,  Toshimasa Mizunashi ,  Akio Ishikawa

发明人： Kiyoshi Ota ,  Toshimasa Mizunashi ,  Akio Ishikawa

IPC分类号： H04N5/00 ,  H04N5/91

CPC分类号： G11B20/1251 ,  G11B20/10527 ,  G11B27/11 ,  G11B27/28 ,  G11B27/329 ,  G11B27/36 ,  G11B2220/20 ,  G11B2220/65 ,  H04N5/781 ,  H04N9/7921 ,  H04N9/8042

摘要： The hard disc is provided with two areas for storing file system management information and content management information. The disc recorder records double file system management information and content management information onto the hard disc. Further, information indicating a procedure for updating file system management information is described in a flash descriptor, and a procedure for updating content management information is described in a robust descriptor.

摘要翻译： 该硬盘具有用于存储文件系统管理信息和内容管理信息的两个区域。 光盘刻录机将双文件系统管理信息和内容管理信息记录在硬盘上。 此外，在闪速描述符中描述了指示用于更新文件系统管理信息的过程的信息，并且在鲁棒描述符中描述了用于更新内容管理信息的过程。

公开(公告)号：US07327871B2

公开(公告)日：2008-02-05

申请号：US10875040

申请日：2004-06-22

申请人： Akio Ishikawa

发明人： Akio Ishikawa

IPC分类号： G06K9/00

CPC分类号： G01R31/311 ,  G01N21/95607 ,  G06T7/0004 ,  G06T2207/30148

摘要： According to a defect inspecting method implemented in a semiconductor circuit inspection machine, a difference in a gray-scale level of a pattern edge image is corrected. A procedure of determining a magnitude of correction is modified in efforts to improve the sensitivity in detecting a defective pattern edge image. A defect inspecting system comprises: an image alignment unit that detects a sub-pixel deviation of two images, which are objects of inspection, from each other; and a magnitude-of-correction determination unit that determines a magnitude of correction, by which the difference in a gray-scale level of a pattern edge image between the two images that is detected by the difference detector is corrected, according to the detected sub-pixel deviation.

摘要翻译： 根据在半导体电路检查机中实施的缺陷检查方法，校正图案边缘图像的灰度级的差异。 在改进检测缺陷图案边缘图像时的灵敏度的努力中，修改了确定校正幅度的过程。 缺陷检查系统包括：图像对准单元，其检测作为检查对象的两个图像的子像素偏差; 以及校正量值确定单元，其确定校正的大小，通过该校正幅度校正由差分检测器检测的两个图像之间的图案边缘图像的灰度级的差异，根据检测到的子 像素偏差