公开(公告)号：US20060076487A1

公开(公告)日：2006-04-13

申请号：US11199116

申请日：2005-08-09

申请人： Ju-hwan Jung ,  Sung-dong Kim ,  Seung-bum Hong

发明人： Ju-hwan Jung ,  Sung-dong Kim ,  Seung-bum Hong

IPC分类号： G01N23/00

CPC分类号： G01Q60/48

摘要： Provided are a semiconductor probe, a method of manufacturing the same, and an apparatus and method for analyzing a semiconductor surface using the semiconductor probe. The semiconductor probe includes a semiconductor tip containing a low concentration of impurities and a cantilever having a conductive area formed in close proximity to the semiconductor tip attached at one end thereof and doped with a high concentration of impurities. The analysis apparatus and method uses high resolution, non-destructive measurement by forming a PN junction between the sample and the semiconductor probe, thereby enabling quantitative extraction of impurity concentration of the sample.

摘要翻译： 提供半导体探针及其制造方法，以及使用半导体探针分析半导体表面的装置和方法。 半导体探针包括含有低浓度杂质的半导体尖端和具有导电区域的悬臂，该导电区域形成在与其一端附接并掺杂高浓度杂质的半导体尖端附近。 分析装置和方法通过在样品和半导体探针之间形成PN结来进行高分辨率，非破坏性的测量，从而能够定量提取样品的杂质浓度。

公开(公告)号：US07888718B2

公开(公告)日：2011-02-15

申请号：US10996057

申请日：2004-11-24

申请人： Ju-hwan Jung ,  Seung-bum Hong ,  Hong-sik Park

发明人： Ju-hwan Jung ,  Seung-bum Hong ,  Hong-sik Park

IPC分类号： H01L21/02

CPC分类号： H01L27/11502 ,  G11B9/02 ,  G11C11/22

摘要： An information storage medium in which charges and electric dipoles are coupled with one another. The information storage medium includes a substrate, an electrode layer formed on the substrate, a ferroelectric layer formed on the electrode layer, and an insulating layer formed on the ferroelectric layer. Accordingly, it is possible to stably record information on the information storage medium.

摘要翻译： 一种信息存储介质，其中电荷和电偶极子彼此耦合。 信息存储介质包括基板，形成在基板上的电极层，形成在电极层上的铁电层，以及形成在铁电层上的绝缘层。 因此，可以将信息稳定地记录在信息存储介质上。

公开(公告)号：US07479212B2

公开(公告)日：2009-01-20

申请号：US11640229

申请日：2006-12-18

申请人： Seung-bum Hong ,  In-kyeong Yoo ,  Ju-hwan Jung

发明人： Seung-bum Hong ,  In-kyeong Yoo ,  Ju-hwan Jung

IPC分类号： C25D1/00 ,  C25D11/02

CPC分类号： B82Y10/00 ,  G11B9/08 ,  G11B9/14 ,  G11B9/1409 ,  G11B9/1472 ,  G11B9/149 ,  G11B11/08 ,  G11B13/06

摘要： A high-density data storage medium, a method of manufacturing the data storage medium, a high-density data storage apparatus, and methods of writing data on, and reading and erasing data from the data storage medium by using the data storage apparatus are provided. The data storage medium includes a lower electrode, an insulation layer deposited on the lower electrode, a photoelectron emission layer deposited on the insulation layer and having a plurality of protrusions from which photoelectrons are emitted due to collisions between the protrusions and photons, and a dielectric layer deposited on the photoelectron emission layer and storing the photoelectrons emitted from the photoelectron emission layer. The data storage apparatus includes a stage supporting a data storage medium, which includes a lower electrode, an insulation layer deposited on the lower electrode, a photoelectron emission layer deposited on the insulation layer and having a plurality of protrusions from which photoelectrons are emitted due to collisions between the protrusions and photons, and a dielectric layer deposited on the photoelectron emission layer and storing the photoelectrons emitted from the photoelectron emission layer, a scanner driving the stage, a probe placed over the data storage medium and including a tip forming an electric field with the data storage medium and a cantilever supporting the tip placed at its one end so as to maintain a predetermined distance between the data storage medium and the tip, a circuit unit applying a driving signal, a data write signal, and a data erase signal to the scanner and the probe and detecting a data read signal, and a light source irradiating light on the data storage medium.

摘要翻译： 提供高密度数据存储介质，数据存储介质的制造方法，高密度数据存储装置以及通过使用数据存储装置从数据存储介质写数据和读取和擦除数据的方法 。 数据存储介质包括下电极，沉积在下电极上的绝缘层，沉积在绝缘层上的光电子发射层，并且具有多个突起，由于突起和光子之间的碰撞而从其中发射光电子;以及电介质 层沉积在光电子发射层上并存储从光电子发射层发射的光电子。 该数据存储装置包括支持数据存储介质的载台，该载台包括下电极，沉积在下电极上的绝缘层，沉积在绝缘层上的光电子发射层，并且具有多个突起，由于 突起和光子之间的碰撞，以及沉积在光电子发射层上并存储从光电子发射层发射的光电子的介电层，驱动载物台的扫描仪，放置在数据存储介质上的探针，并且包括形成电场的尖端 数据存储介质和悬臂支撑设置在其一端的尖端，以便保持数据存储介质和尖端之间的预定距离，施加驱动信号的电路单元，数据写入信号和数据擦除信号 扫描仪和探头，并检测数据读取信号，以及光源照射数据 存储介质。

公开(公告)号：US07287421B2

公开(公告)日：2007-10-30

申请号：US11482690

申请日：2006-07-10

申请人： Ju-hwan Jung ,  Jun-soo Kim ,  Hyung-cheol Shin ,  Seung-bum Hong

发明人： Ju-hwan Jung ,  Jun-soo Kim ,  Hyung-cheol Shin ,  Seung-bum Hong

IPC分类号： G01R31/02

CPC分类号： G01Q60/30 ,  G01Q60/38

摘要： A semiconductor probe with a high-resolution tip and a method of fabricating the same are provided. The semiconductor probe includes: a cantilever doped with a first impurity; a resistive convex portion projecting from an end portion of the cantilever and lightly doped with a second impurity opposite in polarity to the first impurity; and first and second electrode regions formed on either side of the resistive convex portion and heavily doped with the second impurity.

摘要翻译： 提供了具有高分辨率尖端的半导体探针及其制造方法。 半导体探针包括：掺杂有第一杂质的悬臂; 从所述悬臂的端部突出并轻微掺杂与所述第一杂质极性相反的第二杂质的电阻凸部; 以及第一和第二电极区域，形成在电阻凸部的任一侧上并且重掺杂有第二杂质。

公开(公告)号：US07247968B2

公开(公告)日：2007-07-24

申请号：US10922861

申请日：2004-08-23

申请人： Kyoung-lock Baeck ,  Jong-up Jun ,  Ju-hwan Jung ,  Seung-bum Hong

发明人： Kyoung-lock Baeck ,  Jong-up Jun ,  Ju-hwan Jung ,  Seung-bum Hong

IPC分类号： H02K1/00

CPC分类号： H02N1/008

摘要： Provided is a two-axis actuator having a large stage area. The two-axis actuator includes a stage moving in two directions and connected to an upper part of an inertial part. The two-axis actuator is configured to maximize a stage area relative to the overall area of the actuator, thereby increasing the data storage capacity of the stage.

摘要翻译： 提供了具有大台阶面积的双轴致动器。 双轴致动器包括在两个方向上移动并连接到惯性部件的上部的台架。 双轴致动器被配置为使得相对于致动器的总体区域最大化舞台区域，从而增加舞台的数据存储容量。

公开(公告)号：US07142077B2

公开(公告)日：2006-11-28

申请号：US10922140

申请日：2004-08-20

申请人： Kyoung-lock Baeck ,  Jong-up Jun ,  Ju-hwan Jung ,  Seung-bum Hong ,  Dong-ki Min ,  Hong-sik Park

发明人： Kyoung-lock Baeck ,  Jong-up Jun ,  Ju-hwan Jung ,  Seung-bum Hong ,  Dong-ki Min ,  Hong-sik Park

IPC分类号： H01H51/22

CPC分类号： H02N1/008 ,  H02K2201/18

摘要： A two-axis actuator having a large stage area and including includes a substrate, an anchor unit having sides approximately in a rectangular shape, fixed on the substrate, a plurality of first actuating parts actuating in a first direction and separated from the substrate within regions of both sides of the anchor unit, a plurality of second actuating parts actuating in a second direction between the first actuating parts, a rectangular shaped stage that actuates in the second direction, disposed above the second actuating parts, a third actuating part formed on the first actuating part, and elevated at a predetermined distance from the stage and the anchor unit, first direction deformable springs that support the first actuating part in inner parts of the anchor unit, and second direction deformable springs formed to fix the second actuating part in an inner part of the third actuating part.

摘要翻译： 具有大台阶区域的双轴致动器包括：基板，具有固定在基板上的大致矩形形状的侧面的锚定单元，多个第一致动部件，其在第一方向上致动并且在区域内与基板分离 所述锚定单元的两侧的多个第二致动部件在所述第一致动部件之间沿第二方向致动，所述第二致动部件设置在所述第二致动部件上方的在所述第二方向上致动的矩形台架， 第一致动部件，并且与所述平台和所述锚固单元一起预定距离地升高，所述第一方向可变形弹簧，其支撑所述锚固单元的内部部分中的所述第一致动部件;以及第二方向可变形弹簧，其形成为将所述第二致动部件固定在 第三驱动部件的内部部分。

公开(公告)号：US07602202B2

公开(公告)日：2009-10-13

申请号：US11652596

申请日：2007-01-12

申请人： Ju-hwan Jung ,  Jun-soo Kim ,  Hyung-cheol Shin ,  Seung-bum Hong

发明人： Ju-hwan Jung ,  Jun-soo Kim ,  Hyung-cheol Shin ,  Seung-bum Hong

IPC分类号： G01R31/02 ,  G01R31/26

CPC分类号： G11B9/1409 ,  B82Y10/00 ,  G11B9/149

摘要： A semiconductor probe and a method of fabricating the same are provided. The semiconductor probe includes a cantilever doped with first impurities, a resistive tip which protrudes from an end of the cantilever and doped lightly with second impurities, doping control layers formed on both sides of a protruding portion of the resistive tip, and first and second electrode regions formed under the doping control layers and doped heavily with the second impurities.

摘要翻译： 提供半导体探针及其制造方法。 半导体探针包括掺杂有第一杂质的悬臂，从悬臂的端部突出并与第二杂质轻微掺杂的电阻尖端，形成在电阻尖端的突出部分两侧的掺杂控制层，以及第一和第二电极 形成在掺杂控制层下面并且与第二杂质大量掺杂的区域。

公开(公告)号：US07316072B2

公开(公告)日：2008-01-08

申请号：US11546240

申请日：2006-10-12

申请人： Hong-sik Park ,  Ju-hwan Jung ,  Seung-bum Hong ,  Dong-ki Min

发明人： Hong-sik Park ,  Ju-hwan Jung ,  Seung-bum Hong ,  Dong-ki Min

IPC分类号： G01B5/004

CPC分类号： G11B9/1454 ,  B82Y10/00

摘要： An XY stage module, a storage system including the same and a method for facating the XY stage module are provided. The XY stage module includes: a base; an XY stage horizontally moving above the base in a first direction and a second direction that is orthogonal to the first direction; a supporting unit disposed at the base for elastically supporting the XY stage; a stiffener for preventing the XY stage from being rotated; and a position sensor having a movable comb-shaped structure disposed at one side of the stiffener and having at least one movable comb and a fixed comb-shaped structure fixed on the base and having at least one fixed comb meshed with the movable comb to be separated at a predetermined gap for measuring a movement of the XY stage in the first direction and the second direction.

摘要翻译： 提供了一种XY平台模块，包括该XY平台模块的存储系统和用于使XY平台模块的平面化的方法。 XY台模块包括：基座; XY台在第一方向上在基座上方水平移动，第二方向与第一方向正交; 设置在所述基座上用于弹性地支撑所述XY平台的支撑单元; 用于防止XY平台旋转的加强件; 以及位置传感器，其具有设置在所述加强件的一侧的可移动梳状结构，并且具有固定在所述基座上的至少一个活动梳和固定梳状结构，并且具有与所述活动梳状物啮合的至少一个固定梳 在预定间隙处分离，以测量XY台在第一方向和第二方向上的运动。

公开(公告)号：US20070176616A1

公开(公告)日：2007-08-02

申请号：US11652596

申请日：2007-01-12

申请人： Ju-hwan Jung ,  Jun-soo Kim ,  Hyung-cheol Shin ,  Seung-bum Hong

发明人： Ju-hwan Jung ,  Jun-soo Kim ,  Hyung-cheol Shin ,  Seung-bum Hong

IPC分类号： G01D21/00 ,  G01R31/02

CPC分类号： G11B9/1409 ,  B82Y10/00 ,  G11B9/149

摘要： A semiconductor probe and a method of fabricating the same are provided. The semiconductor probe includes a cantilever doped with first impurities, a resistive tip which protrudes from an end of the cantilever and doped lightly with second impurities, doping control layers formed on both sides of a protruding portion of the resistive tip, and first and second electrode regions formed under the doping control layers and doped heavily with the second impurities.

摘要翻译： 提供半导体探针及其制造方法。 半导体探针包括掺杂有第一杂质的悬臂，从悬臂的端部突出并与第二杂质轻微掺杂的电阻尖端，形成在电阻尖端的突出部分两侧的掺杂控制层，以及第一和第二电极 形成在掺杂控制层下面并且与第二杂质大量掺杂的区域。

公开(公告)号：US20070157479A1

公开(公告)日：2007-07-12

申请号：US11546240

申请日：2006-10-12

申请人： Hong-sik Park ,  Ju-hwan Jung ,  Seung-bum Hong ,  Dong-ki Min

发明人： Hong-sik Park ,  Ju-hwan Jung ,  Seung-bum Hong ,  Dong-ki Min

IPC分类号： G01B5/004

CPC分类号： G11B9/1454 ,  B82Y10/00

摘要： An XY stage module, a storage system including the same and a method for fabricating the XY stage module are provided. The XY stage module includes: a base; an XY stage horizontally moving above the base in a first direction and a second direction that is orthogonal to the first direction; a supporting unit disposed at the base for elastically supporting the XY stage; a stiffener for preventing the XY stage from being rotated; and a position sensor having a movable comb-shaped structure disposed at one side of the stiffener and having at least one movable comb and a fixed comb-shaped structure fixed on the base and having at least one fixed comb meshed with the movable comb to be separated at a predetermined gap for measuring a movement of the XY stage in the first direction and the second direction.

摘要翻译： 提供XY台模块，包括该XY平台模块的存储系统和用于制造XY平台模块的方法。 XY台模块包括：基座; XY台在第一方向上在基座上方水平移动，第二方向与第一方向正交; 设置在所述基座上用于弹性地支撑所述XY平台的支撑单元; 用于防止XY平台旋转的加强件; 以及位置传感器，其具有设置在所述加强件的一侧的可移动梳状结构，并且具有固定在所述基座上的至少一个活动梳和固定梳状结构，并且具有与所述活动梳状物啮合的至少一个固定梳 在预定间隙处分离，以测量XY台在第一方向和第二方向上的运动。