公开(公告)号：US06774650B2

公开(公告)日：2004-08-10

申请号：US10392925

申请日：2003-03-21

申请人： Shigeyuki Maruyama ,  Daisuke Koizumi ,  Naoyuki Watanabe ,  Yoshito Konno ,  Eiji Yoshida ,  Toshiyuki Honda ,  Toshimi Kawahara ,  Kenichi Nagashige

发明人： Shigeyuki Maruyama ,  Daisuke Koizumi ,  Naoyuki Watanabe ,  Yoshito Konno ,  Eiji Yoshida ,  Toshiyuki Honda ,  Toshimi Kawahara ,  Kenichi Nagashige

IPC分类号： G01R3102

CPC分类号： G01R31/2886 ,  H01L2224/05001 ,  H01L2224/05008 ,  H01L2224/05022 ,  H01L2224/05024 ,  H01L2224/05568 ,  H01L2224/05569 ,  H01L2224/05573 ,  H01L2224/11 ,  H05K3/326

摘要： A probe card for testing a wafer having formed a plurality of semiconductor chips, the probe card including a board and a multi-layer substrate. The probe card may also include a flexible substrate. A contact electrode, located opposite from an electrode on one of the chips, is disposed above or below the flexible substrate, or may be provided on an elastic material on the multi-layered substrate. A first wiring has a first portion connected to the contact electrode, a level transitioning portion extending from a level of the first portion to the multi-layer substrate at a lower level, and a connecting terminal at an end of the level transitioning portion connected to an internal terminal on the multi-layered substrate. A second wiring in the multi-layered substrate connects the internal terminal to an external terminal at a periphery of the multi-layer substrate. A third wiring on the board connects the external terminal on the multi-layer substrate to an external connecting terminal on the board. Displacements of the internal terminal resulting from the temperature load applied during testing of the wafer are compensated by the level transitioning portion of the first wiring. Unevenness involved with the contact between the contact electrodes on the probe card and the electrodes on the chips are compensated by the contact electrodes and/or elastic material. An electrode pitch of the contact electrodes is expanded by the first wiring.

摘要翻译： 一种用于测试形成多个半导体芯片的晶片的探针卡，所述探针卡包括基板和多层基板。 探针卡还可以包括柔性基底。 在其中一个芯片上与电极相对设置的接触电极设置在柔性基板的上方或下方，或者可以设置在多层基板上的弹性材料上。 第一布线具有连接到接触电极的第一部分，从第一部分的电平延伸到较低电平的多层基板的电平转换部分，以及连接到电平转换部分的端部处的连接端子 多层基板上的内部端子。 多层基板中的第二布线将内部端子连接到多层基板的外围的外部端子。 电路板上的第三个接线将多层基板上的外部端子连接到电路板上的外部连接端子。 在晶片测试期间施加的温度负载导致的内部端子的位移由第一布线的电平转换部分补偿。 与探针卡上的接触电极和芯片上的电极之间的接触相关的不均匀性由接触电极和/或弹性材料补偿。 接触电极的电极间距由第一布线扩大。