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公开(公告)号：US06285497B1
公开(公告)日：2001-09-04
申请号：US09615795
申请日：2000-07-13
IPC分类号： G02B508
CPC分类号： G03F7/702 , G03F7/70066 , G03F7/70158 , Y10S359/90
摘要： Condensers having a mirror with a diffraction grating in projection lithography using extreme ultra-violet significantly enhances critical dimension control. The diffraction grating has the effect of smoothing the illumination at the camera's entrance pupil with minimum light loss. Modeling suggests that critical dimension control for 100 nm features can be improved from 3 nm to less than about 0.5 nm.
摘要翻译： 具有使用极紫外线投射光刻的衍射光栅的反射镜的冷凝器显着增强了关键尺寸控制。 衍射光栅具有以最小光损耗平滑照相机入射光瞳的照明效果。 建模表明，100 nm特征的临界尺寸控制可以从3 nm提高到小于约0.5 nm。
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公开(公告)号：US5870176A
公开(公告)日：1999-02-09
申请号：US878444
申请日：1997-06-18
CPC分类号： G03F7/70091 , G02B26/0841 , G03F7/70291 , Y10S359/904
摘要： The present invention provides a method for maskless lithography. A plurality of individually addressable and rotatable micromirrors together comprise a two-dimensional array of micromirrors. Each micromirror in the two-dimensional array can be envisioned as an individually addressable element in the picture that comprises the circuit pattern desired. As each micromirror is addressed it rotates so as to reflect light from a light source onto a portion of the photoresist coated wafer thereby forming a pixel within the circuit pattern. By electronically addressing a two-dimensional array of these micromirrors in the proper sequence a circuit pattern that is comprised of these individual pixels can be constructed on a microchip. The reflecting surface of the micromirror is configured in such a way as to overcome coherence and diffraction effects in order to produce circuit elements having straight sides.
摘要翻译： 本发明提供一种无掩模光刻的方法。 多个独立可寻址和可旋转的微镜一起包括微镜的二维阵列。 可以将二维阵列中的每个微镜视为包括所需电路图案的图像中的可单独寻址的元件。 随着每个微镜被寻址，其旋转以将来自光源的光反射到光刻胶涂覆的晶片的一部分上，从而在电路图案内形成像素。 通过以适当的顺序电子地寻址这些微镜的二维阵列，可以在微芯片上构建由这些单独像素构成的电路图案。 微镜的反射表面被配置为克服相干和衍射效应，以便产生具有直边的电路元件。
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公开(公告)号：US5729365A
公开(公告)日：1998-03-17
申请号：US583889
申请日：1996-01-11
申请人： William C. Sweatt
发明人： William C. Sweatt
CPC分类号： B82Y15/00 , G03H1/0011 , G03H1/08 , G03H1/0891 , G03H1/0272 , G03H2001/0016 , G03H2001/0027 , G03H2001/0816 , G03H2001/0858 , G03H2001/2223 , G03H2001/2244 , G03H2210/20 , G03H2222/15 , G03H2230/10 , G03H2240/13 , G03H2250/34 , G03H2250/36 , G03H2250/39 , G03H2260/63
摘要： A microlithographic tag comprising an array of individual computer generated holographic patches having feature sizes between 250 and 75 nanometers. The tag is a composite hologram made up of the individual holographic patches and contains identifying information when read out with a laser of the proper wavelength and at the proper angles of probing and reading. The patches are fabricated in a steep angle Littrow readout geometry to maximize returns in the -1 diffracted order. The tags are useful as anti-counterfeiting markers because of the extreme difficulty in reproducing them.
摘要翻译： 一种微光刻标签，其包括具有250至75纳米特征尺寸的单独计算机产生的全息贴片阵列。 该标签是由各个全息贴片组成的复合全息图，并且在用适当波长的激光器和适当的探测和读取角度读出时包含识别信息。 贴片采用陡角Littrow读数几何制造，以最大化-1衍射顺序的回报。 这些标签是有用的防伪标记，因为它们难以复制。
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公开(公告)号：US5245473A
公开(公告)日：1993-09-14
申请号：US722995
申请日：1991-06-28
IPC分类号： G01P3/36
CPC分类号： G01P3/366
摘要： An apparatus and method for laser velocity interferometry employing a fixed interferometer cavity and delay element. The invention permits rapid construction of interferometers that may be operated by those non-skilled in the art, that have high image quality with no drift or loss of contrast, and that have long-term stability even without shock isolation of the cavity.
摘要翻译： 一种采用固定干涉仪腔和延迟元件的激光速度干涉测量装置和方法。 本发明允许快速构建可由本领域技术人员操作的干涉仪，其具有高图像质量，没有漂移或失去对比度，并且即使没有腔体的震动隔离也具有长期稳定性。
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