公开(公告)号：US07940486B2

公开(公告)日：2011-05-10

申请号：US11892882

申请日：2007-08-28

申请人： Koji Shimazawa ,  Kosuke Tanaka ,  Takaaki Domon

发明人： Koji Shimazawa ,  Kosuke Tanaka ,  Takaaki Domon

IPC分类号： G11B11/105 ,  G11B11/10 ,  G11B5/02 ,  G11B7/135 ,  G11B7/125

CPC分类号： G11B5/02 ,  G11B5/314 ,  G11B2005/0005 ,  G11B2005/0021

摘要： A laser diode is fixed to a light source support substrate and a first surface of a slider substrate is fixed to a second surface of the light source support substrate; therefore, the slider substrate and the laser diode are kept in a fixed positional relation. Since the laser diode faces a light entrance face of a core, long-distance propagation of light as in the conventional technology does not occur, and light emitted from a light emitting element is guided well to a medium-facing surface while permitting some mounting error and coupling loss of light. A spot size w of a light intensity distribution along the X-axis in the XY plane including an incident-light centroid position on the light entrance face is set larger than a thickness of the core, whereby variation in incidence efficiency is well suppressed against positional deviation.

摘要翻译： 激光二极管被固定到光源支撑基板上，并且滑块基板的第一表面固定到光源支撑基板的第二表面; 因此，滑块基板和激光二极管保持固定的位置关系。 由于激光二极管面向芯的光入射面，因此不会像现有技术那样发生长距离传播光，并且从发光元件发出的光很好地被引导到面向中间的表面，同时允许一些安装误差 和光耦合损耗。 在包括光入射面上的入射光重心位置的XY平面中沿着X轴的光强度分布的光斑尺寸w被设定为大于芯的厚度，由此良好地抑制了位置上的入射效率的变化 偏差。

公开(公告)号：US20110026156A1

公开(公告)日：2011-02-03

申请号：US12461157

申请日：2009-08-03

申请人： Koji Shimazawa ,  Yasuhiro Ito ,  Yuji Kakinuma ,  Daisuke Miyauchi ,  Kosuke Tanaka

发明人： Koji Shimazawa ,  Yasuhiro Ito ,  Yuji Kakinuma ,  Daisuke Miyauchi ,  Kosuke Tanaka

IPC分类号： G11B5/02

CPC分类号： G11B5/314 ,  G11B5/6088 ,  G11B2005/001 ,  G11B2005/0021

摘要： A heat-assisted magnetic recording head includes a slider, and an edge-emitting laser diode that emits polarized light of TM mode. The laser diode is arranged so that its bottom surface faces the top surface of the slider. An electrode of the laser diode closer to the active layer is bonded to a conductive layer of the slider, whereby the laser diode is fixed to the slider. As viewed from above the laser diode, the bottom surface of the electrode of the laser diode includes a first area that a light propagation path of the laser diode overlies, and a second area other than the first area. The top surface of the conductive layer is in contact not with the first area but with the second area of the bottom surface of the electrode.

摘要翻译： 热辅助磁记录头包括滑块和发射TM模的偏振光的边缘发射激光二极管。 激光二极管被布置成使得其底表面面向滑块的顶表面。 更靠近有源层的激光二极管的电极被接合到滑块的导电层，由此激光二极管被固定到滑块。 从激光二极管的上方观察，激光二极管的电极的底面包括激光二极管的光传播路径重叠的第一区域和第一区域以外的第二区域。 导电层的顶表面不与第一区域接触，而是与电极底表面的第二区域接触。

公开(公告)号：US20080043360A1

公开(公告)日：2008-02-21

申请号：US11889736

申请日：2007-08-16

申请人： Koji Shimazawa ,  Kosuke Tanaka ,  Takaaki Domon

发明人： Koji Shimazawa ,  Kosuke Tanaka ,  Takaaki Domon

IPC分类号： G11B5/02

CPC分类号： G11B5/02 ,  G11B5/314 ,  G11B5/6088 ,  G11B2005/0005 ,  G11B2005/0021

摘要： A thermally assisted magnetic head has a slider having a medium-facing surface, and a light source unit having a light source support substrate, and a light source disposed on the light source support substrate. The slider has a slider substrate and a magnetic head portion disposed on a side of the medium-facing surface in the slider substrate; the magnetic head portion includes a magnetic recording element for generating a magnetic field, and a waveguide for receiving light through an end face opposite to the medium-facing surface, and guiding the light to the medium-facing surface; the light source support substrate is fixed to a surface opposite to the medium-facing surface in the slider substrate so that light emitted from the light source can enter the end face of the waveguide.

摘要翻译： 热辅助磁头具有具有中等面向表面的滑块和具有光源支撑基板的光源单元和设置在光源支撑基板上的光源。 滑块具有滑块基板和设置在滑块基板中的介质相对表面侧的磁头部分; 磁头部分包括用于产生磁场的磁记录元件和用于通过与中介面相对的端面接收光并将光引导到面向中介面的波导; 光源支撑基板被固定到与滑动器基板中的面向中间的表面相对的表面，使得从光源发射的光可以进入波导的端面。

公开(公告)号：US20050013063A1

公开(公告)日：2005-01-20

申请号：US10889053

申请日：2004-07-13

申请人： Kosuke Tanaka ,  Koji Shimazawa ,  Koichi Terunuma ,  Tomoaki Shimizu

发明人： Kosuke Tanaka ,  Koji Shimazawa ,  Koichi Terunuma ,  Tomoaki Shimizu

IPC分类号： G11B5/39 ,  G11B5/33 ,  H01F10/16 ,  H01L43/08

CPC分类号： G11B5/3932 ,  B82Y25/00 ,  G01R33/093 ,  G01R33/098 ,  Y10T428/1107 ,  Y10T428/1121

摘要： A pair of domain control layers are disposed on both sides of the track width direction of the MR film so as to be separated from each other such that the MR film is held therebetween, and apply a longitudinal magnetic field to the MR film (free layer). The MR film is flanked by the domain control layers, each including a layer structure constituted by a base layer, a ferromagnetic layer, and a hard magnetic layer. The base layer causes the hard magnetic layer to have a magnetization direction aligning with an in-plane direction, so as to enhance the coercive force of the hard magnetic layer.

摘要翻译： 一对域控制层设置在MR膜的轨道宽度方向的两侧，以便彼此分离，使得MR膜保持在它们之间，并将纵向磁场施加到MR膜（自由层 ）。 MR膜侧面是域控制层，每个层包括由基层，铁磁层和硬磁性层构成的层结构。 基层使得硬磁性层具有与面内方向对准的磁化方向，以增强硬磁性层的矫顽力。

公开(公告)号：US07813086B2

公开(公告)日：2010-10-12

申请号：US11802220

申请日：2007-05-21

申请人： Kosuke Tanaka ,  Kazuki Sato ,  Eiji Komura

发明人： Kosuke Tanaka ,  Kazuki Sato ,  Eiji Komura

IPC分类号： G11B5/39

CPC分类号： G11B5/3967 ,  B82Y25/00 ,  G01R33/093 ,  G11B5/3912 ,  G11B5/3932 ,  H01L43/08 ,  H01L43/12

摘要： Producing a thin film magnetic head includes forming a pair of openings in a predetermined region of a TMR layer formed on a lower magnetic shield layer; forming a pair of bias-applying layers in the pair of openings so that an upper surface thereof is located above an upper surface of the TMR layer; laminating a metal layer that covers the upper surface of a portion located between the pair of bias-applying layers in the TMR layer and the upper surface of the pair of bias-applying layers; forming a resist layer across the upper surface of a portion located above the pair of bias-applying layers in the metal layer and the upper surface of a portion located above the TMR layer in the metal layer; and etching a part of the TMR layer and a part of the pair of bias-applying layers with the resist layer being as a mask.

摘要翻译： 制造薄膜磁头包括在形成在下磁屏蔽层上的TMR层的预定区域中形成一对开口; 在所述一对开口中形成一对偏压施加层，使得其上表面位于所述TMR层的上表面之上; 层叠覆盖位于所述TMR层中的所述一对偏置施加层之间的部分的上表面的金属层和所述一对偏置施加层的上表面; 在位于所述金属层中的所述一对偏置施加层上方的部分的上表面和位于所述金属层中的所述TMR层上方的部分的上表面上形成抗蚀剂层; 并且将抗蚀剂层作为掩模蚀刻TMR层的一部分和一对偏置施加层的一部分。

公开(公告)号：US20080291583A1

公开(公告)日：2008-11-27

申请号：US11802220

申请日：2007-05-21

申请人： Kosuke Tanaka ,  Kazuki Sato ,  Eiji Komura

发明人： Kosuke Tanaka ,  Kazuki Sato ,  Eiji Komura

IPC分类号： G11B5/11

CPC分类号： G11B5/3967 ,  B82Y25/00 ,  G01R33/093 ,  G11B5/3912 ,  G11B5/3932 ,  H01L43/08 ,  H01L43/12

摘要： A method of producing a thin film magnetic head includes the steps of: forming a pair of openings in a predetermined region of a TMR layer formed on a lower magnetic shield layer; forming a pair of bias-applying layers in the pair of Openings so that an upper surface thereof may be located above an upper surface of the TMR layer; laminating a metal layer that covers the upper surface of a portion located between the pair of bias-applying layers in the TMR layer and the upper surface of the pair of bias-applying layers; forming a resist layer across the upper surface of a portion located above the pair of bias-applying layers in the metal layer and the upper surface of a portion located above the TMR layer in the metal layer; and etching a part of the TMR layer and a part of the pair of bias-applying layers with the resist layer being as a mask. Here, the reflectivity R for the incident light having a wavelength of 248 nm at an interface between the metal layer and the resist layer is set so as to satisfy the condition represented by the following formula (1), and also the magnitude D of a step is set so as to satisfy the condition represented by the following formula (2). R≧0.2   (1) D≧210 exp(−7.6R) [nm]   (2)

摘要翻译： 制造薄膜磁头的方法包括以下步骤：在形成在下磁屏蔽层上的TMR层的预定区域中形成一对开口; 在所述一对开口中形成一对偏置施加层，使得其上表面可以位于所述TMR层的上表面之上; 层叠覆盖位于所述TMR层中的所述一对偏置施加层之间的部分的上表面的金属层和所述一对偏置施加层的上表面; 在位于所述金属层中的所述一对偏置施加层上方的部分的上表面和位于所述金属层中的所述TMR层上方的部分的上表面上形成抗蚀剂层; 并且将抗蚀剂层作为掩模蚀刻TMR层的一部分和一对偏置施加层的一部分。 这里，在金属层和抗蚀剂层之间的界面处的波长为248nm的入射光的反射率R被设定为满足由下式（1）表示的条件，也设定为 设定步骤以满足由下式（2）表示的条件。 <？in-line-formula description =“In-line Formulas”end =“lead”？> R> = 0.2（1）<？in-line-formula description =“In-line Formulas”end =“tail”？ > <？in-line-formula description =“在线公式”end =“lead”？> D> = 210 exp（-7.6R）[nm]（2）<？in-line-formula description =“In “公式”end =“tail”？>

公开(公告)号：US08076246B2

公开(公告)日：2011-12-13

申请号：US12359508

申请日：2009-01-26

申请人： Kosuke Tanaka ,  Koji Shimazawa

发明人： Kosuke Tanaka ,  Koji Shimazawa

IPC分类号： H01L21/64

CPC分类号： G11B5/314 ,  G11B5/3163 ,  G11B2005/0021

摘要： A method comprises a first multilayer body forming step of forming a first multilayer body on a first cladding layer, the first multilayer body including a core layer and a first polishing stop layer in order from the first cladding layer side; a first multilayer body patterning step of pattering the first multilayer body, so as to expose the first cladding layer about the patterned first multilayer body; a second multilayer body forming step of forming a second multilayer body on the exposed first cladding layer and patterned first multilayer body, the second multilayer body including a second cladding layer and a second polishing stop layer in order from the first cladding layer side; and a removing step of polishing away a part of the second multilayer body formed on the first multilayer body.

摘要翻译： 一种方法包括：在第一包层上形成第一多层体的第一多层体形成步骤，所述第一层叠体包含从所述第一包层侧起的顺序的芯层和第一研磨停止层; 图案化第一多层体的第一多层体图案形成工序，使第一包层围绕图案化的第一多层体露出; 第二多层体形成步骤，在所述第一包覆层和所述第一层叠体上形成第二层叠体，所述第二层叠体包含第二覆层和所述第二覆层; 以及去除在第一多层体上形成的第二层叠体的一部分的除去工序。

公开(公告)号：US07974043B2

公开(公告)日：2011-07-05

申请号：US11896059

申请日：2007-08-29

申请人： Koji Shimazawa ,  Kosuke Tanaka ,  Takaaki Domon

发明人： Koji Shimazawa ,  Kosuke Tanaka ,  Takaaki Domon

IPC分类号： G11B11/105 ,  G11B7/135 ,  G11B5/02

CPC分类号： G11B5/02 ,  G11B5/105 ,  G11B5/314 ,  G11B2005/0002 ,  G11B2005/0021

摘要： A thermally assisted magnetic head has a slider having a medium-facing surface, and a light source unit having a light source support substrate, and a light source disposed on the light source support substrate; the slider has a slider substrate and a magnetic head portion disposed on a side surface of the slider substrate; the magnetic head portion has a magnetic recording element for generating a magnetic field, first and second waveguides, for receiving light through an end face and guiding the light to the medium-facing surface, and a near-field light generator disposed on an end face; the light source support substrate is fixed to a surface of the slider substrate so that light emitted from the light source can enter the end face of the first waveguide.

摘要翻译： 热辅助磁头具有具有中等面向表面的滑块和具有光源支撑基板的光源单元和设置在光源支撑基板上的光源; 滑块具有滑动器基板和设置在滑块基板的侧表面上的磁头部分; 磁头部具有用于产生磁场的磁记录元件，第一和第二波导，用于通过端面接收光并将光引导到面向中间的表面;以及近场光发生器，其设置在端面上 ; 光源支撑基板被固定在滑块基板的表面上，使得从光源发射的光可以进入第一波导的端面。

公开(公告)号：US07804655B2

公开(公告)日：2010-09-28

申请号：US11889736

申请日：2007-08-16

申请人： Koji Shimazawa ,  Kosuke Tanaka ,  Takaaki Domon

发明人： Koji Shimazawa ,  Kosuke Tanaka ,  Takaaki Domon

IPC分类号： G11B5/02

CPC分类号： G11B5/02 ,  G11B5/314 ,  G11B5/6088 ,  G11B2005/0005 ,  G11B2005/0021

摘要： A thermally assisted magnetic head has a slider having a medium-facing surface, and a light source unit having a light source support substrate, and a light source disposed on the light source support substrate. The slider has a slider substrate and a magnetic head portion disposed on a side of the medium-facing surface in the slider substrate; the magnetic head portion includes a magnetic recording element for generating a magnetic field, and a waveguide for receiving light through an end face opposite to the medium-facing surface, and guiding the light to the medium-facing surface; the light source support substrate is fixed to a surface opposite to the medium-facing surface in the slider substrate so that light emitted from the light source can enter the end face of the waveguide.

摘要翻译： 热辅助磁头具有具有中等面向表面的滑块和具有光源支撑基板的光源单元和设置在光源支撑基板上的光源。 滑块具有滑块基板和设置在滑块基板中的介质相对表面侧的磁头部分; 磁头部分包括用于产生磁场的磁记录元件和用于通过与中介面相对的端面接收光并将光引导到面向中介面的波导; 光源支撑基板被固定到与滑动器基板中的面向中间的表面相对的表面，使得从光源发射的光可以进入波导的端面。

公开(公告)号：US07710677B2

公开(公告)日：2010-05-04

申请号：US12000753

申请日：2007-12-17

申请人： Kosuke Tanaka ,  Koji Shimazawa

发明人： Kosuke Tanaka ,  Koji Shimazawa

IPC分类号： G11B5/02

CPC分类号： G11B5/314 ,  G11B5/02 ,  G11B2005/0002 ,  G11B2005/0021

摘要： A thermally assisted magnetic head has a medium-facing surface facing a medium, and comprises: a waveguide an end face of which is exposed in the medium-facing surface; an electroconductive near-field light generator plate disposed on a medium-facing surface of the waveguide so that a principal face thereof faces the medium; and an electroconductive near-field light scatter plate disposed on the medium-facing surface of the thermally assisted magnetic head so that a principal face thereof faces the medium; when viewed from a direction perpendicular to the medium-facing surface, the near-field light generator plate has a cusp portion at an end; when viewed from the direction perpendicular to the medium-facing surface, the near-field light scatter plate is arranged along the other end opposite to the cusp portion of the near-field light generator plate; when viewed from the direction perpendicular to the medium-facing surface, a width of the near-field light scatter plate in a first direction perpendicular to a direction connecting the cusp portion and the other end of the near-field light generator plate is larger than a width in the first direction of the near-field light generator plate.

摘要翻译： 热辅助磁头具有面向介质的面向中间的表面，并且包括：波导，其端面暴露在面向介质的表面中; 导电近场光发生器板，其设置在波导的面向中的表面上，使得其主面面向介质; 以及设置在所述热辅助磁头的面向中间的表面上的导电近场光散射板，使得其主面面向介质; 当从垂直于介质中的表面的方向观察时，近场光发生器板在端部具有尖端部分; 当从垂直于中间面的方向观察时，近场光散射板沿着与近场光发生器板的尖部相对的另一端配置; 当从垂直于介质相对表面的方向观察时，近场光散射板在与连接近场光发生器板的尖端部分和另一端的方向垂直的第一方向上的宽度大于 近场光发生器板的第一方向的宽度。