Method to print photoresist lines with negative sidewalls
    42.
    发明授权
    Method to print photoresist lines with negative sidewalls 失效
    打印具有负侧壁的光刻胶线的方法

    公开(公告)号:US07368227B2

    公开(公告)日:2008-05-06

    申请号:US11588574

    申请日:2006-10-27

    IPC分类号: G03C5/00

    摘要: It is very difficult to produce a negative wall angle from either negative or positive-tone chemically amplified resists, especially by e-beam lithography. This problem has now been overcome by first forming a photoresist pedestal in the conventional way, followed by flood exposing with electrons. Then, a second development treatment is given. This results in removal of additional material from the sidewalls, said removal being greatest at the substrate and least at the pedestal's top surface, resulting in negatively sloping sidewalls. Application of this method to a process for forming a pole tip for a vertical magnetic writer is also discussed.

    摘要翻译: 从负极或正音色化学放大抗蚀剂产生负的壁角是非常困难的,特别是通过电子束光刻。 现在已经通过首先以常规方式形成光致抗蚀剂基座,随后用电子暴露而克服了这个问题。 然后,给出第二次开发处理。 这导致从侧壁去除附加材料,所述去除在基底处至少在基座的顶表面处最大,导致负斜面的侧壁。 还讨论了该方法在用于形成用于垂直磁性写入器的极尖的处理中的应用。

    Two pass calculation to optimize formula calculations for a spreadsheet
    43.
    发明申请
    Two pass calculation to optimize formula calculations for a spreadsheet 审中-公开
    两次计算,以优化电子表格的公式计算

    公开(公告)号:US20060085386A1

    公开(公告)日:2006-04-20

    申请号:US10969381

    申请日:2004-10-19

    IPC分类号: G06F17/30 G06F17/00 G06F17/24

    摘要: Current cell values are provided to a client using two-passes. When a first request to provide values is received during a first pass, default values are provided to the client. Upon receiving each value request, the formula parameters are collected that are associated with the cell. The formula parameters are parsed to determine data that is to be retrieved from a database. Once the locations for all of the data to be retrieved has been determined, the data is retrieved from a database in as few as hits as possible. After obtaining the current values from the database, the client is informed to request the values a second time. When the second request to provide values is received, the client is provided with the calculated values during the second pass.

    摘要翻译: 当前单元格值使用双程提供给客户端。 当在第一次通过期间收到提供值的第一个请求时,将向客户端提供默认值。 收到每个值请求后,收集与该单元格关联的公式参数。 解析公式参数以确定要从数据库检索的数据。 一旦确定要检索的所有数据的位置,就尽可能少地从数据库中检索数据。 在从数据库获取当前值之后,通知客户端再次请求值。 当接收到提供值的第二请求时,在第二次通过期间向客户端提供计算的值。