公开(公告)号：US20130301986A1

公开(公告)日：2013-11-14

申请号：US13863433

申请日：2013-04-16

Applicant: International Business Machines Corporation

Inventor： Daiju Nakano ,  Masao Tokunari ,  Kazushige Toriyama ,  Yutaka Tsukada

IPC: G02B6/42 ,  H01L31/0232 ,  H01L33/58

CPC classification number: G02B6/4236 ,  G02B6/4214 ,  H01L25/167 ,  H01L31/0232 ,  H01L33/58 ,  H01L2224/11 ,  H01L2924/0002 ,  H01L2924/00

Abstract: Spacer resin pattern layer which precisely aligns a light-emitting element or a light-receiving element relative to both a waveguide pattern layer and electrical circuit pattern layer from the semiconductor wafer level. A substratum of resin having a through-hole provided for electrical communication with an electrical circuit pattern layer is formed on a semiconductor wafer. A truncated cone-shaped three-dimensional reflective surface is formed to guide the emitted light towards or received light from a waveguide pattern layer. A metal film is deposited planarly in a predetermined range from the center when positioned relative to the position of the through-hole. A truncated cone-shaped mold is stamped in the center. By modifying the direction of the light using this tapered structure, the precision tolerance is increased and optical loss is reduced.

Abstract translation: 间隔树脂图案层，其相对于波导图案层和电路图案层相对于半导体晶片级精确对准发光元件或光接收元件。 在半导体晶片上形成具有用于与电路图案层电连通的通孔的树脂基底。 形成截头圆锥形的三维反射表面以将发射的光引导到波导图案层或从波导图案层接收光。 当相对于通孔的位置定位时，金属膜从中心平面地沉积在预定范围内。 一个截头圆锥形的模具被冲压在中心。 通过使用这种锥形结构改变光的方向，提高了精度公差，降低了光损耗。