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公开(公告)号：US07025005B2
公开(公告)日：2006-04-11
申请号：US10347208
申请日：2003-01-21
IPC分类号： A47B85/00
CPC分类号： H01L21/682 , H01L21/68 , H01L21/681
摘要： The present disclosure provides a stage device applicable to a semiconductor manufacturing apparatus. A stage device 10 comprises a Y-axis stage 20 and an X-axis stage 40, the Y-axis stage 20 including a fixed component 21 and a movable component 26 movable along the Y-axis, the X-axis stage 40 including a fixed component 41 and a movable component 43 movable along the X-axis, wherein the fixed component 41 of the X-axis stage 40 is disposed on the movable component 26 of the Y-axis stage 20, the Y-axis is designed as a scanning axis, while the X-axis is designed as a stepping axis, and a non-contact sealing device is arranged between the fixed component 21 and the movable component 26 of the Y-axis stage 20.
摘要翻译： 本公开提供了一种适用于半导体制造装置的平台装置。 平台装置10包括Y轴平台20和X轴平台40，Y轴平台20包括可沿着Y轴移动的固定部件21和可移动部件26，X轴平台40包括 固定部件41和可沿着X轴移动的可动部件43，其中，X轴平台40的固定部件41设置在Y轴台20的可动部件26上，Y轴被设计为 扫描轴，而X轴被设计为步进轴，并且非接触式密封装置设置在固定部件21和Y轴级20的可动部件26之间。
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公开(公告)号：US06657345B2
公开(公告)日：2003-12-02
申请号：US10034123
申请日：2002-01-03
申请人： Hiroyuki Shinozaki
发明人： Hiroyuki Shinozaki
IPC分类号： H02K709
CPC分类号： F16C32/0457 , F16C32/0451 , F16C2300/62
摘要： It is an object of the present invention to provide magnetic bearing controller which is able to levitate the controlled object stably by using controlled magnetic forces. In the magnetic bearing controller which supplies a controlled current to an electromagnet for levitating a rotating body at a predetermined position, the controller is provided with an eliminator unit for eliminating frequency components of frequency area which is used by the status detector unit. The eliminator unit is inserted between signal amplifier unit and power amplifier unit for generating controlled current.
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公开(公告)号：US06603787B1
公开(公告)日：2003-08-05
申请号：US09576208
申请日：2000-05-23
IPC分类号： H01S3225
CPC分类号： F16C32/047 , H01S3/03 , H01S3/036 , H01S3/225
摘要： A discharge-pumped excimer laser device has a casing, a pair main discharge electrodes, a cross-flow fan for producing a high-speed laser gas flow between the main discharge electrodes, the cross-flow fan having a rotatable shaft projecting from opposite ends thereof, magnetic bearings, the rotatable shaft being rotatably supported by the bearings, protective bearings for supporting the rotatable shaft when the magnetic bearings are not in operation, and a motor for actuating the cross-flow fan. The magnetic bearings include radial magnetic bearings disposed on the opposite ends of the rotatable shaft. One of the radial magnetic bearings which is disposed closely to the motor has a bearing rigidity greater than the bearing rigidity of the magnetic bearing that is disposed remotely from the motor.
摘要翻译： 排出泵浦准分子激光装置具有壳体，一对主放电电极，用于在主放电电极之间产生高速激光气流的横流风扇，所述横流风扇具有从相对端突出的可旋转轴 磁轴承，可旋转轴由轴承可旋转地支撑，当磁轴承不运行时用于支撑可旋转轴的保护轴承，以及用于致动横流风扇的电动机。 磁性轴承包括设置在可旋转轴的相对端上的径向磁轴承。 靠近电机设置的径向磁轴承之一具有大于远离电动机的磁性轴承的轴承刚性的轴承刚度。
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公开(公告)号：US06515387B1
公开(公告)日：2003-02-04
申请号：US09647169
申请日：2000-09-27
申请人： Hiroyuki Shinozaki
发明人： Hiroyuki Shinozaki
IPC分类号： H02K709
CPC分类号： F16C32/0451
摘要： A controlled magnetic bearing apparatus which generates a control signal based on a sensor signal from a displacement sensor for detecting a radial displacement of a rotor to suppress whirling of the rotor due to an external force synchronized with a rotational movement, and can hence support the rotor stably in a levitated state. A controlled magnetic bearing apparatus including a displacement sensor for detecting a radial displacement of the rotor, a first control unit for calculating a first control signal based on a sensor signal from the displacement sensor and outputting the first control signal, a second control unit disposed in parallel with the first control unit for generating a second control signal changed in phase from the sensor signal inputted therein and outputting the second control signal, a signal synthesizer for adding the second control signal outputted from the second control unit to the first control signal outputted from the first control unit to generate a control signal and outputting the control signal to the power amplifier, a power amplifier for supplying an electric current based on the control signal, and an electromagnet for generating a magnetic force based on a signal from the power amplifier.
摘要翻译： 一种受控的磁轴承装置，其基于来自位移传感器的传感器信号产生控制信号，用于检测转子的径向位移以抑制由于与旋转运动同步的外力引起的转子的旋转，并且因此支撑转子 稳定地处于悬浮状态。 一种受控磁轴承装置，包括用于检测转子的径向位移的位移传感器，第一控制单元，用于基于来自位移传感器的传感器信号计算第一控制信号并输出第一控制信号;第二控制单元， 与第一控制单元并联，用于产生从其中输入的传感器信号相位改变的第二控制信号并输出第二控制信号;信号合成器，用于将从第二控制单元输出的第二控制信号与从 第一控制单元，用于产生控制信号并将该控制信号输出到功率放大器;基于控制信号提供电流的功率放大器;以及用于根据来自功率放大器的信号产生磁力的电磁体。
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公开(公告)号：US06326712B1
公开(公告)日：2001-12-04
申请号：US09643950
申请日：2000-08-23
申请人： Toshiharu Nakazawa , Toshimitsu Barada , Atsushi Ooyama , Masafumi Inoue , Shinichi Sekiguchi , Hiroyuki Shinozaki
发明人： Toshiharu Nakazawa , Toshimitsu Barada , Atsushi Ooyama , Masafumi Inoue , Shinichi Sekiguchi , Hiroyuki Shinozaki
IPC分类号： F16C3204
CPC分类号： F16C32/0451 , F16C32/047 , F16C2300/42 , F16C2360/45
摘要： A magnetic bearing device has an electromagnet for levitating an object under electromagnetic forces, a displacement sensor for detecting the displacement of the levitated object, a controller for supplying a signal to the displacement sensor through a cable and a current to the electromagnet through a cable, and a protective plate of nonmagnetic metal material disposed between the displacement sensor and the levitated object. The controller includes a levitation control system having a noise removing filter for preventing an abnormal signal caused by the protective plate from being applied to the displacement sensor.
摘要翻译： 磁性轴承装置具有用于在电磁力下悬浮物体的电磁体，用于检测悬浮物体的位移的位移传感器，用于通过电缆将信号通过电缆和电流提供给电磁体的控制器， 以及设置在位移传感器和悬浮物体之间的非磁性金属材料的保护板。 该控制器包括具有用于防止由保护板引起的异常信号施加到位移传感器的噪声去除滤波器的悬浮控制系统。
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公开(公告)号：US5397212A
公开(公告)日：1995-03-14
申请号：US19678
申请日：1993-02-19
CPC分类号： H01L21/67766 , B25J9/041 , B25J9/123 , B25J9/126 , F16C32/0465 , H01L21/67742
摘要： A robot with no mechanically contacting components are suitable for use in special environments such as semiconductor manufacturing processes where dust and lubrication are matters of important concern. The robot has a linear actuator composed of magnetic bearings and a linear motor for moving a robot arm linearly without mechanical contact, and a rotary actuator composed of magnetic bearings and a rotary motor for rotating a body which supports the linear actuator, around the rotary actuator without mechanical contact.
摘要翻译： 没有机械接触部件的机器人适用于特殊环境，如半导体制造过程，其中灰尘和润滑是重要关注的问题。 机器人具有由磁性轴承构成的线性致动器和用于在不机械接触的情况下线性地移动机器人手臂的线性电动机，以及由磁性轴承和用于使支撑线性致动器的主体旋转的旋转电动机，围绕旋转致动器 无机械接触。
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