公开(公告)号：US20200321225A1

公开(公告)日：2020-10-08

申请号：US16376861

申请日：2019-04-05

Applicant: MKS Instruments, Inc.

Inventor： Junhua Ding ,  Michael L'Bassi

IPC: H01L21/67 ,  G05D7/06

Abstract: In a pulse gas delivery system, a chamber is pre-charged to a prescribed pressure through an upstream valve. Thereafter, a downstream control valve is opened to control flow of the gas during a gas pulse. A dedicated controller may control the downstream control valve in a feedback loop during the pulse based on pressure and temperature detected during the pulse.

公开(公告)号：US10725484B2

公开(公告)日：2020-07-28

申请号：US16124669

申请日：2018-09-07

Applicant: MKS Instruments, Inc.

Inventor： Michael L'Bassi ,  Mark J. Quaratiello ,  Junhua Ding

IPC: G05D7/06 ,  G01F1/36

Abstract: A fluid control system and associated method for pulse delivery of a fluid includes a shutoff valve and a mass flow controller (MFC) upstream of the shutoff valve. The MFC includes a flow channel, a control valve to control flow of fluid in the flow channel, a flow sensor to measure flow rate in the flow channel, and a controller having a valve input from the shutoff valve indicating opening of the shutoff valve. The controller is configured to respond to the valve input to control flow of fluid through the control valve to initiate and terminate a pulse of fluid from the flow channel to the shutoff valve to control a mass of fluid delivered during the pulse of fluid. The valve input can be a pressure signal, and the MFC can include a pressure sensor to sense the pressure signal.

公开(公告)号：US10031005B2

公开(公告)日：2018-07-24

申请号：US13626432

申请日：2012-09-25

Applicant: MKS Instruments, Inc.

Inventor： Junhua Ding

IPC: G01F1/36 ,  G05D7/06 ,  G01F25/00 ,  G01F1/86 ,  G01F1/88 ,  G01F15/02 ,  G01F15/04

CPC classification number: G01F1/363 ,  G01F1/86 ,  G01F1/88 ,  G01F15/022 ,  G01F15/024 ,  G01F15/043 ,  G01F15/046 ,  G01F25/0007 ,  G05D7/0647 ,  Y10T137/0379 ,  Y10T137/7761

Abstract: A mass flow control system can be self verified for its accuracy when controlling a flow to a process. The system comprises: a control valve for controlling the flow of fluid through the system as a function of a control signal; a controller for generating the control signal as a function of measured flow of fluid through the system and a targeted flow set point; a pressure sensor for measuring the controlling fluid pressure for use in measuring and verifying the flow rate; and a source of fluid for providing a known volume of fluid for use in verifying the system accuracy anytime between steps of the flow control process.

公开(公告)号：US20150066395A1

公开(公告)日：2015-03-05

申请号：US14304463

申请日：2014-06-13

Applicant: MKS Instruments, Inc.

Inventor： Junhua Ding ,  Kaveh H. Zarkar

IPC: G01F1/80 ,  G01F25/00

CPC classification number: G01F1/80 ,  G01F5/00 ,  G01F25/00 ,  G01F25/0038 ,  G01F25/0053

Abstract: This disclosure relates to mass flow verification systems for and methods of measuring and verifying the mass flow through a mass flow delivery/measurement device such as a mass flow controller. A mass flow verification system comprises a preset volume, a temperature sensor, and a pressure sensor. The measured verified flow determined by the mass flow verification system can be adjusted to compensate for errors resulting from a dead volume within the mass flow measurement device.

Abstract translation: 本公开涉及用于测量和验证通过诸如质量流量控制器的质量流量输送/测量装置的质量流量的质量流量验证系统和方法。 质量流量验证系统包括预设体积，温度传感器和压力传感器。 可以调整由质量流量验证系统确定的测量的验证流量，以补偿由质量流量测量装置内的死体积引起的误差。