公开(公告)号：US5126169A

公开(公告)日：1992-06-30

申请号：US639410

申请日：1991-01-10

申请人： Shunichi Ishihara ,  Hisanori Tsuda ,  Masahiro Kanai ,  Masafumi Sano

发明人： Shunichi Ishihara ,  Hisanori Tsuda ,  Masahiro Kanai ,  Masafumi Sano

IPC分类号： C23C16/452 ,  G03G5/082

CPC分类号： C23C16/452 ,  G03G5/08278

摘要： A process for forming a deposited film on a substrate which comprises introducing plural kinds of precursors formed in activation spaces (B), as starting materials for a deposited film and an active species formed in an activation space (C) which is to react with at least two kinds among said plural kinds of precursors respectively at different reaction rates into a deposition space (A) for forming a deposited film on a substrate, wherein the precursor having a property of reacting with said active species at a lower reaction rate is mixed with said active species at an upper stream position as compared with the precursor having a property of reacting with said active species at a higher reaction rate.

摘要翻译： 一种在基板上形成沉积膜的方法，包括引入在活化空间（B）中形成的多种前体，作为沉积膜的起始材料和形成于活化空间（C）中的活性物质，活化空间（C） 所述多种前体中的至少两种前体分别以不同的反应速率转化成用于在基底上形成沉积膜的沉积空间（A），其中具有与所述活性物质以较低反应速率反应的性质的前体与 所述活性物质在上游位置与前体相比具有与所述活性物质以更高反应速率反应的性质。

公开(公告)号：US4777494A

公开(公告)日：1988-10-11

申请号：US009546

申请日：1987-02-02

申请人： Makoto Shibata ,  Hiroto Matsuda ,  Masami Ikeda ,  Hirokazu Komuro ,  Hiroto Takahashi ,  Hisanori Tsuda

发明人： Makoto Shibata ,  Hiroto Matsuda ,  Masami Ikeda ,  Hirokazu Komuro ,  Hiroto Takahashi ,  Hisanori Tsuda

IPC分类号： B41J2/05 ,  B41J2/015 ,  B41J2/14 ,  B41J2/16 ,  G01D15/16

CPC分类号： B41J2/14129 ,  B41J2/1604 ,  B41J2/1626 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1646

摘要： In a process for manufacturing an electrothermal transducer for a liquid jet recording head comprising a support, a resistive heater layer overlying the support, at least a pair of electrodes electrically connected with the resistive heater layer and disposed opposite to each other, and a protective layer composed of an insulating material, at least defective portions in the protective layer of the electrothermal transducer are subjected to an anodic oxidation treatment.

摘要翻译： 在制造用于液体喷射记录头的电热转换器的方法中，所述液体喷射记录头包括支撑体，覆盖所述载体的电阻加热器层，至少一对与所述电阻加热器层电连接并且彼此相对设置的电极，以及保护层 由绝缘材料构成，对电热换能器的保护层中的至少有缺陷的部分进行阳极氧化处理。

公开(公告)号：US4450457A

公开(公告)日：1984-05-22

申请号：US409504

申请日：1982-08-19

申请人： Takeshi Miyachi ,  Hisanori Tsuda ,  Toshitami Hara ,  Yukio Kasugayama

发明人： Takeshi Miyachi ,  Hisanori Tsuda ,  Toshitami Hara ,  Yukio Kasugayama

IPC分类号： B41J2/05 ,  B41J2/14 ,  B41J2/16 ,  G01D15/18

CPC分类号： B41J2/14129 ,  B41J2/1604 ,  B41J2/1623 ,  B41J2/1626 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646

摘要： A liquid-jet recording head provided with a liquid ejecting section comprising an orifice for ejecting a liquid to form its flying droplets and a liquid flow path communicating with the orifice and having as a portion of the constitution a heat action zone where thermal energy for forming said droplets acts on the liquid and with an electro-thermal transducer comprising at least one pair of opposing electrodes electrically connecting to a heat-generating resistance layer formed on a base plate and a heat generating part formed between the electrodes, characterized by having a protective layer composed of a first layer of an organic material and a second layer of an inorganic material which are laminated on the portion of the electrode under the liquid flow path in that order from the electrode side.

摘要翻译： 一种液体喷射记录头，其具有液体喷射部分，该液体喷射部分包括用于喷射液体以形成其飞行液滴的孔口和与该孔口连通的液体流动通道，并且具有作为部分结构的热作用区域，其中形成热能的热作用区域 所述液滴作用在液体上，并具有电热换能器，该电热换能器包括电连接到形成在基板上的发热电阻层和形成在电极之间的发热部分的至少一对相对电极，其特征在于具有保护 由电极侧依次层叠在液体流路下方的电极部分上的由有机材料的第一层和第二无机材料层构成的层。