公开(公告)号：US08085522B2

公开(公告)日：2011-12-27

申请号：US11819253

申请日：2007-06-26

申请人： Yoshitaka Sasaki ,  Tatsushi Shimizu ,  Takehiro Horinaka ,  Kazuo Ishizaki ,  Shigeki Tanemura

发明人： Yoshitaka Sasaki ,  Tatsushi Shimizu ,  Takehiro Horinaka ,  Kazuo Ishizaki ,  Shigeki Tanemura

IPC分类号： H01G4/005 ,  H01G4/06

CPC分类号： H01G4/005 ,  H01G4/38 ,  Y10T29/435

摘要： The present invention has a configuration which allows manufacturing a capacitor including a first electrode layer, conductive first convex sections layered on a surface of the first electrode layer, a first dielectric layer formed on a surface of the first convex sections and a surface of the first electrode layer, and a second electrode layer formed so as to be superimposed on the first convex sections and the first electrode layer via the first dielectric layer.

摘要翻译： 本发明的制造方法，其特征在于，制造包括第一电极层，层叠在第一电极层的表面上的导电性第一凸部，形成在第一凸部的表面上的第一电介质层和第一电极层的表面的电容器 电极层，以及经由第一电介质层与第一电极层重叠地形成的第二电极层。

公开(公告)号：US20110303637A1

公开(公告)日：2011-12-15

申请号：US12814669

申请日：2010-06-14

申请人： Hironori ARAKI ,  Yoshitaka Sasaki ,  Hiroyuki Ito ,  Shigeki Tanemura ,  Kazuo Ishizaki ,  Takehiro Horinaka

发明人： Hironori ARAKI ,  Yoshitaka Sasaki ,  Hiroyuki Ito ,  Shigeki Tanemura ,  Kazuo Ishizaki ,  Takehiro Horinaka

IPC分类号： B05D5/06 ,  G02B6/02

CPC分类号： G02B6/1226 ,  B82Y20/00

摘要： A near-field light generator includes: a waveguide; a clad layer having a penetrating opening and disposed on the waveguide; a plasmon generator accommodated in the opening; and a dielectric film interposed between the plasmon generator and each of the waveguide and the clad layer. In a method of manufacturing the near-field light generator, an initial clad layer is initially formed on the waveguide, and then the initial clad layer is taper-etched by RIE to form a recess that does not reach the top surface of the waveguide. Subsequently, the recess is etched by wet etching until the top surface of the waveguide is exposed in part. Next, the dielectric film is formed in the opening, and the plasmon generator is formed on the dielectric film.

摘要翻译： 近场光发生器包括：波导; 具有穿透开口并布置在波导上的覆层; 容纳在开口中的等离子体发生器; 以及介于所述等离子体发生器与所述波导管和所述包覆层中的每一个之间的电介质膜。 在制造近场光发生器的方法中，最初在波导上形成初始包层，然后通过RIE对初始包层进行锥蚀刻，以形成不到达波导顶表面的凹部。 随后，通过湿蚀刻蚀刻凹部，直到波导的顶表面部分露出。 接着，在开口部形成电介质膜，在电介质膜上形成等离子体发生器。

公开(公告)号：US07933095B2

公开(公告)日：2011-04-26

申请号：US11987786

申请日：2007-12-04

申请人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Hironori Araki ,  Takehiro Horinaka ,  Kowang Liu ,  Erhard Schreck

发明人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Hironori Araki ,  Takehiro Horinaka ,  Kowang Liu ,  Erhard Schreck

IPC分类号： G11B5/33 ,  G11B5/127

CPC分类号： G11B5/1278 ,  G11B5/112 ,  G11B5/3116 ,  G11B5/3136 ,  G11B5/3146 ,  G11B5/315 ,  G11B5/3163

摘要： A magnetic head includes a pole layer and a shield. The shield includes a shield layer having a front end face located in the medium facing surface at a position forward of an end face of the pole layer along a direction of travel of the recording medium. The magnetic head further includes a stopper layer for suppressing protrusion of the front end face of the shield layer, the stopper layer being disposed adjacent to the shield layer and made of a nonmagnetic material having a linear thermal expansion coefficient of 5×10−6/° C. or smaller at a temperature of 25° C. to 100° C.

摘要翻译： 磁头包括极层和屏蔽。 屏蔽层包括屏蔽层，该屏蔽层具有前端面，该前端面沿着记录介质的行进方向位于磁极层的端面的前方的位置处于介质相对表面。 磁头还包括用于抑制屏蔽层的前端面的突出的阻挡层，该阻挡层与屏蔽层相邻设置，并且由线性热膨胀系数为5×10 -6 / 在25℃至100℃的温度下，

公开(公告)号：US07924528B2

公开(公告)日：2011-04-12

申请号：US11896705

申请日：2007-09-05

申请人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Hironori Araki ,  Shigeki Tanemura ,  Kazuo Ishizaki ,  Takehiro Horinaka

发明人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Hironori Araki ,  Shigeki Tanemura ,  Kazuo Ishizaki ,  Takehiro Horinaka

IPC分类号： G11B5/31

CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/3163 ,  Y10T29/49046

摘要： A top surface of a pole layer of a magnetic head includes: a first portion having a first edge located in a medium facing surface and a second edge opposite thereto; and a second portion located farther from the medium facing surface than the first portion and connected to the first portion at the second edge. The distance from a substrate to an arbitrary point on the first portion increases with increasing distance from the medium facing surface to the arbitrary point. The angle of inclination of the first portion taken at the arbitrary point with respect to a direction perpendicular to the medium facing surface increases stepwise or continuously with increasing distance from the medium facing surface to the arbitrary point. The angle of inclination taken at the first edge is greater than zero degree. The second portion extends in a direction substantially perpendicular to the medium facing surface.

摘要翻译： 磁头的极层的顶表面包括：第一部分，其具有位于介质相对表面中的第一边缘和与其相对的第二边缘; 以及位于比所述第一部分更远离所述介质面对表面并且在所述第二边缘处连接到所述第一部分的第二部分。 从基板到第一部分的任意点的距离随着从介质面向表面到任意点的距离的增加而增加。 相对于与面向介质的表面垂直的任意点处的第一部分的倾斜角度随着从介质面向表面到任意点的距离的增加而逐步或连续地增加。 在第一边缘处采取的倾斜角大于零度。 第二部分在基本上垂直于介质面向表面的方向上延伸。

公开(公告)号：US07916425B2

公开(公告)日：2011-03-29

申请号：US11812757

申请日：2007-06-21

申请人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Hironori Araki ,  Shigeki Tanemura ,  Kazuo Ishizaki ,  Lijie Guan ,  Takehiro Horinaka

发明人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Hironori Araki ,  Shigeki Tanemura ,  Kazuo Ishizaki ,  Lijie Guan ,  Takehiro Horinaka

IPC分类号： G11B5/127

CPC分类号： G11B5/3116 ,  G11B5/1278

摘要： A magnetic head includes: a pole layer; a nonmagnetic layer disposed on part of the top surface of the pole layer; a gap layer disposed on the pole layer and the nonmagnetic layer; and a shield disposed on the gap layer. The top surface of the pole layer includes: a first portion having a first edge located in a medium facing surface and a second edge opposite thereto; and a second portion located farther from the medium facing surface than the first portion and connected to the first portion at the second edge. The first portion is inclined with respect to a direction orthogonal to the medium facing surface so that the distance from a substrate increases with increasing distance from the medium facing surface. The nonmagnetic layer has a bottom surface touching the second portion, and this bottom surface has an edge located at the second edge.

摘要翻译： 磁头包括：极层; 设置在所述极层的顶表面的一部分上的非磁性层; 设置在所述极层和所述非磁性层上的间隙层; 以及设置在间隙层上的屏蔽件。 极层的顶表面包括：第一部分，其具有位于介质相对表面中的第一边缘和与其相对的第二边缘; 以及位于比所述第一部分更远离所述介质面对表面并且在所述第二边缘处连接到所述第一部分的第二部分。 第一部分相对于与介质相对表面正交的方向倾斜，使得距衬底的距离随着距离介质面向表面的距离的增加而增加。 非磁性层具有接触第二部分的底面，该底面具有位于第二边缘的边缘。

公开(公告)号：US07870660B2

公开(公告)日：2011-01-18

申请号：US12379044

申请日：2009-02-11

申请人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Hironori Araki ,  Takehiro Horinaka ,  Shigeki Tanemura

发明人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Hironori Araki ,  Takehiro Horinaka ,  Shigeki Tanemura

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/1278 ,  G11B5/3116 ,  Y10T29/49032 ,  Y10T29/49034 ,  Y10T29/49041 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A magnetic head includes: an encasing layer made of a nonmagnetic material and having a groove that opens in the top surface; a nonmagnetic metal layer made of a nonmagnetic metal material, disposed on the top surface of the encasing layer, and having a penetrating opening that is contiguous to the groove; and a pole layer made of a magnetic metal material and encased in the groove of the encasing layer and in the opening of the nonmagnetic metal layer. The pole layer has an end face located in a medium facing surface, the end face having a first portion and a second portion that is located farther from a substrate than the first portion and connected to the first portion. The first portion has a width that decreases as the distance from the substrate decreases. The second portion has a uniform width that defines the track width. In the medium facing surface, the nonmagnetic metal layer exists on both sides of the second portion, the sides being opposed to each other in the direction of track width.

摘要翻译： 磁头包括：由非磁性材料制成并具有在顶表面上开口的凹槽的封装层; 由非磁性金属材料制成的非磁性金属层，设置在所述封装层的顶表面上，并且具有与所述凹槽相邻的穿透开口; 以及由磁性金属材料制成并封装在封装层的凹槽中和非磁性金属层的开口中的极层。 极层具有位于介质面对表面中的端面，端面具有第一部分和第二部分，其位于比第一部分更远离基板并且连接到第一部分。 第一部分具有随着距离衬底的距离减小而减小的宽度。 第二部分具有定义轨道宽度的均匀宽度。 在面向介质的表面中，非磁性金属层存在于第二部分的两侧，侧面在轨道宽度方向上彼此相对。

公开(公告)号：US20100165517A1

公开(公告)日：2010-07-01

申请号：US12318412

申请日：2008-12-29

申请人： Hironori Araki ,  Yoshitaka Sasaki ,  Hiroyuki Ito ,  Shigeki Tanemura ,  Kazuo Ishizaki ,  Takehiro Horinaka

发明人： Hironori Araki ,  Yoshitaka Sasaki ,  Hiroyuki Ito ,  Shigeki Tanemura ,  Kazuo Ishizaki ,  Takehiro Horinaka

IPC分类号： G11B5/33 ,  B44C1/22

CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/313 ,  G11B5/315 ,  Y10T29/49048

摘要： A magnetic head includes a side shield layer and an encasing layer. The side shield layer has a first end face located in the medium facing surface, a second end face opposite to the first end face, and a first groove accommodating a portion of a pole layer. The first end face includes two portions located on both sides of an end face of the pole layer that are opposite to each other in a track width direction. The encasing layer is formed of a nonmagnetic material and disposed on a side of the side shield layer opposite to a medium facing surface. The encasing layer has a front end face touching the second end face of the side shield layer, and a second groove accommodating another portion of the pole layer. The distance from the medium facing surface to an arbitrary point on the second end face of the side shield layer decreases with decreasing distance from the arbitrary point to the top surface of a substrate.

摘要翻译： 磁头包括侧屏蔽层和封装层。 侧面屏蔽层具有位于介质相对表面中的第一端面，与第一端面相对的第二端面和容纳极层的一部分的第一凹槽。 第一端面包括在磁极层的端面的沿着磁道宽度方向彼此相对的两侧的两个部分。 封装层由非磁性材料形成，并且设置在侧面屏蔽层的与介质相对表面相对的一侧上。 封装层具有接触侧屏蔽层的第二端面的前端面和容纳极层的另一部分的第二槽。 从侧面屏蔽层的第二端面到中间面向任意点的距离随着从任意点到基板顶面的距离的减小而减小。

公开(公告)号：US07628071B2

公开(公告)日：2009-12-08

申请号：US11812629

申请日：2007-06-20

申请人： Yoshitaka Sasaki ,  Tatsushi Shimizu ,  Takehiro Horinaka ,  Kazuo Ishizaki ,  Shigeki Tanemura

发明人： Yoshitaka Sasaki ,  Tatsushi Shimizu ,  Takehiro Horinaka ,  Kazuo Ishizaki ,  Shigeki Tanemura

IPC分类号： G01P15/10 ,  G01P15/12 ,  G01P15/11

CPC分类号： G01P15/0802 ,  G01P15/12 ,  G01P15/123 ,  Y10T29/49002

摘要： In a sensing unit according to the present invention, a movable portion of a spring portion is supported floatably above a recessed portion formed in a substrate. Thus, the movable portion is capable of oscillating in any direction parallel to the substrate surface. Moreover, the movable portion is capable of oscillating in the thickness direction of the substrate such that the amplitude of a center side end portion thereof reaches a maximum. A sensor portion is provided on the movable portion. As a result, the sensing unit according to the present invention has a higher degree of freedom in terms of the measurement direction than a conventional sensing unit that oscillates in only one direction.

摘要翻译： 在根据本发明的感测单元中，弹簧部分的可移动部分可浮动地支撑在形成于基底中的凹部上。 因此，可移动部分能够在平行于基板表面的任何方向上振动。 此外，可移动部分能够在基板的厚度方向上振动，使得其中心侧端部的振幅达到最大。 传感器部分设置在可动部分上。 结果，根据本发明的感测单元在仅在一个方向上振荡的常规感测单元方面具有比测量方向更高的自由度。

公开(公告)号：US20090277870A1

公开(公告)日：2009-11-12

申请号：US12149987

申请日：2008-05-12

申请人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Hironori Araki ,  Shigeki Tanemura ,  Kazuo Ishizaki ,  Takehiro Horinaka

发明人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Hironori Araki ,  Shigeki Tanemura ,  Kazuo Ishizaki ,  Takehiro Horinaka

IPC分类号： B44C1/22

CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116

摘要： A magnetic head includes a pole layer, and an encasing layer having a groove that accommodates the pole layer. A manufacturing method for the magnetic head includes the steps of forming a nonmagnetic layer that will later undergo formation of the groove therein and will thereby become the encasing layer; forming the groove in the nonmagnetic layer so that the nonmagnetic layer becomes the encasing layer; and forming the pole layer such that the pole layer is accommodated in the groove of the encasing layer. The nonmagnetic layer is formed of Al2O3. The step of forming the groove in the nonmagnetic layer includes the step of taper-etching the nonmagnetic layer by reactive ion etching with an etching gas containing at least BCl3 and N2 among BCl3, Cl2 and N2.

摘要翻译： 磁头包括极层和具有容纳极层的凹槽的封装层。 磁头的制造方法包括以下步骤：形成将在其中形成凹槽的非磁性层，从而成为包层; 在非磁性层中形成凹槽，使得非磁性层成为包层; 以及形成所述极层，使得所述极层容纳在所述封装层的槽中。 非磁性层由Al2O3形成。 在非磁性层中形成槽的步骤包括通过在BCl 3，Cl 2和N 2中至少含有BCl 3和N 2的蚀刻气体的反应离子蚀刻来对非磁性层进行锥蚀刻的步骤。

公开(公告)号：US07518824B2

公开(公告)日：2009-04-14

申请号：US11213863

申请日：2005-08-30

申请人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Hironori Araki ,  Takehiro Horinaka ,  Shigeki Tanemura

发明人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Hironori Araki ,  Takehiro Horinaka ,  Shigeki Tanemura

IPC分类号： G11B5/147 ,  G11B5/127

CPC分类号： G11B5/1278 ,  G11B5/3116 ,  Y10T29/49032 ,  Y10T29/49034 ,  Y10T29/49041 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A magnetic head includes an encasing layer made of a nonmagnetic material and having a groove that opens in the top surface; a nonmagnetic metal layer made of a nonmagnetic metal material, disposed on the top surface of the encasing layer, and having a penetrating opening that is contiguous to the groove; and a pole layer made of a magnetic metal material and encased in the groove of the encasing layer and in the opening of the nonmagnetic metal layer. The pole layer has an end face located in a medium facing surface, the end face having a first portion and a second portion that is located farther from a substrate than the first portion and connected to the first portion. The first portion has a width that decreases as the distance from the substrate decreases. The second portion has a uniform width that defines the track width. In the medium facing surface, the nonmagnetic metal layer exists on both sides of the second portion, the sides being opposed to each other in the direction of track width.

摘要翻译： 磁头包括由非磁性材料制成并具有在顶表面上开口的凹槽的封装层; 由非磁性金属材料制成的非磁性金属层，设置在所述封装层的顶表面上，并且具有与所述凹槽相邻的穿透开口; 以及由磁性金属材料制成并封装在封装层的凹槽中和非磁性金属层的开口中的极层。 极层具有位于介质面对表面中的端面，端面具有第一部分和第二部分，其位于比第一部分更远离基板并且连接到第一部分。 第一部分具有随着距离衬底的距离减小而减小的宽度。 第二部分具有定义轨道宽度的均匀宽度。 在面向介质的表面中，非磁性金属层存在于第二部分的两侧，侧面在轨道宽度方向上彼此相对。