公开(公告)号：US20050269655A1

公开(公告)日：2005-12-08

申请号：US11185271

申请日：2005-07-19

Applicant: Yee-Chung Fu

Inventor： Yee-Chung Fu

IPC: G02B26/08 ,  G02B26/10 ,  H01L21/00 ,  H01L29/84

CPC classification number: G02B26/0841

Abstract: A micro-electro-mechanical system (MEMS) device includes a mirror having a top surface with trenches, a beam connected to the mirror, rotational comb teeth connected to the beam, and one or more springs connecting the beam to a bonding pad. The mirror can have a bottom surface for reflecting light. Stationary comb teeth can be interdigitated with the rotational comb teeth either in-plane or out-of-plane. Steady or oscillating voltage difference between the rotational and the stationary comb teeth can be used to oscillate or tune the mirror. The comb teeth can have a tapered shape.

Abstract translation: 微电子机械系统（MEMS）装置包括具有沟槽的顶表面的反射镜，连接到反射镜的光束，连接到光束的旋转梳齿，以及将光束连接到接合焊盘的一个或多个弹簧。 镜子可以具有用于反射光的底面。 固定梳齿可以与旋转梳齿在平面内或平面外相互交错。 旋转和固定梳齿之间的稳定或振荡电压差可用于振荡或调谐镜子。 梳齿可以具有锥形形状。

公开(公告)号：US20050231065A1

公开(公告)日：2005-10-20

申请号：US10828946

申请日：2004-04-20

Applicant: Yee-Chung Fu

Inventor： Yee-Chung Fu

IPC: G02B26/08 ,  H02N1/00

CPC classification number: H02N1/008 ,  B81B3/0045 ,  B81B2201/033 ,  B81B2201/047 ,  B81B2203/0109 ,  B81B2203/058 ,  G02B26/0841 ,  Y10S359/904

Abstract: A micro-electro-mechanical system (MEMS) mirror device includes an mirror, bonding pads, springs, and beams connected to the mirror. The mirror has a width greater than 1000 and less than 1200 microns, a length greater than 4000 and less than 5500 microns, and a thickness greater than 240 microns. Each beam includes a plurality of rotational comb teeth and is connected by multiple springs to the bonding pads.

Abstract translation: 具有旋转梳齿（416,434）的梁连接到长度为4000-5500微米且厚度大于240微米的反射镜。 弹簧将梁连接到焊盘（436,472）。 梁的宽度为800-1400微米，长度为3000-9000微米，厚度为120-240微米。

公开(公告)号：US09690402B1

公开(公告)日：2017-06-27

申请号：US12876054

申请日：2010-09-03

Applicant: Yee-Chung Fu ,  Hsing C. Cheng

Inventor： Yee-Chung Fu ,  Hsing C. Cheng

IPC: G06F3/041

CPC classification number: G06F3/041 ,  G06F3/0423

Abstract: A touch panel system includes micro-electro-mechanical system (MEMS) groups. Each group includes an emitter producing a beam, and a MEMS mirror located about a corner of a touch panel screen. The MEMS mirror reflects the beam to create a beam sweep across a touch panel surface. An array of photo sensors is located parallel to an edge of the touch panel screen to detect reflected beams from an object about the touch panel surface. Based on when the reflected beams are detected, the angular positions of the MEMS mirrors can be determined and correlated to the object's position.

公开(公告)号：US08082788B1

公开(公告)日：2011-12-27

申请号：US12340146

申请日：2008-12-19

Applicant: Yee-Chung Fu

Inventor： Yee-Chung Fu

IPC: G01C19/00

CPC classification number: G01L1/2218

Abstract: A sensor includes at least one stationary pad with comb teeth, a hub, at least one actuator spoke coupled to a location on the hub, and at least one sensing spoke extending from the hub. The sensing spokes have comb teeth generally interdigitated with the comb teeth of the stationary pad. The location of the coupling between the actuator spoke and the hub offsets a line of action of a force on the actuator spoke from a center of rotation of the hub.

Abstract translation: 传感器包括具有梳齿的至少一个固定垫，轮毂，耦合到轮毂上的位置的至少一个致动器辐条以及从轮毂延伸的至少一个感测轮辐​​。 感测辐条具有通常与固定垫的梳齿相交的梳齿。 致动器轮辐和轮毂之间的联接的位置抵消了致动器上的力的作用线从轮毂的旋转中心辐射。

公开(公告)号：US07969637B1

公开(公告)日：2011-06-28

申请号：US12164358

申请日：2008-06-30

Applicant: Yee-Chung Fu

Inventor： Yee-Chung Fu

IPC: G02B26/08

CPC classification number: G02B26/0841 ,  G02B26/0858 ,  G02B26/101

Abstract: A micro-electro-mechanical system (MEMS) mirror system has an actuator that imparts a motion with a first periodic movement of high frequency superimposed a second periodic movement of low frequency to a frame and a mirror coupled to the frame so that the mirror rotates about two axes. The mirror is coupled by springs to the frame so the mirror is rotatable about a first axis. The frame has pivots each coupled by springs to actuators so the frame is rotatable about a second axis. The mirror has a first resonant frequency and the frame including the mirror has a second resonant frequency. The low frequency of the second periodic movement is equal to one of the first and the second resonant frequencies, and the high frequency of the first periodic movement is equal to the other one of the first and the second resonant frequencies.

Abstract translation: 微机电系统（MEMS）镜系统具有致动器，其致动器具有高频率的第一周期性移动，叠加低频的第二周期性移动到帧和耦合到该框架的反射镜，使得反射镜旋转 约两个轴。 反射镜通过弹簧耦合到框架，使得反射镜可绕第一轴线旋转。 框架具有每个由弹簧耦合到致动器的枢轴，使得框架可绕第二轴线旋转。 镜具有第一谐振频率，并且包括反射镜的框具有第二谐振频率。 第二周期性运动的低频等于第一和第二谐振频率中的一个，第一周期性运动的高频等于第一和第二谐振频率中的另一个。

公开(公告)号：US07821693B1

公开(公告)日：2010-10-26

申请号：US11951277

申请日：2007-12-05

Applicant: Yee-Chung Fu

Inventor： Yee-Chung Fu

IPC: G02B26/08

CPC classification number: G02B26/0816

Abstract: A micro-electro-mechanical system (MEMS) mirror device includes a mirror coupled to an actuator by a first torsional hinge along a rotational axis. The actuator has a body and a group of coils extending from the body. An anchor is coupled another end of the actuator by a second torsional hinge along the rotational axis.

Abstract translation: 微机电系统（MEMS）镜装置包括通过沿旋转轴线的第一扭转铰链联接到致动器的反射镜。 致动器具有从主体延伸的主体和一组线圈。 锚固体通过沿着旋转轴线的第二扭转铰链联接致动器的另一端。

公开(公告)号：US07282775B2

公开(公告)日：2007-10-16

申请号：US10779952

申请日：2004-02-13

Applicant: Yee-Chung Fu

Inventor： Yee-Chung Fu

IPC: H01L29/84

CPC classification number: G02B26/0841

Abstract: A micro-electro-mechanical system (MEMS) device includes a mirror having a top surface with trenches, a beam connected to the mirror, rotational comb teeth connected to the beam, and one or more springs connecting the beam to a bonding pad. The mirror can have a bottom surface for reflecting light. Stationary comb teeth can be interdigitated with the rotational comb teeth either in-plane or out-of-plane. Steady or oscillating voltage difference between the rotational and the stationary comb teeth can be used to oscillate or tune the mirror. The comb teeth can have a tapered shape.

Abstract translation: 微电子机械系统（MEMS）装置包括具有沟槽的顶表面的反射镜，连接到反射镜的光束，连接到光束的旋转梳齿，以及将光束连接到接合焊盘的一个或多个弹簧。 镜子可以具有用于反射光的底面。 固定梳齿可以与旋转梳齿在平面内或平面外相互交错。 旋转和固定梳齿之间的稳定或振荡电压差可用于振荡或调谐镜子。 梳齿可以具有锥形形状。

公开(公告)号：US07187488B2

公开(公告)日：2007-03-06

申请号：US11077099

申请日：2005-03-09

Applicant: Yee-Chung Fu

Inventor： Yee-Chung Fu

IPC: G02B26/00

CPC classification number: G02B26/0841

Abstract: A mirror device includes a mirror, an anchor, and a spring coupling the mirror to the anchor. The anchor and/or mirror can define one or more rows of holes adjacent to the coupling location of the spring. The natural frequency of the device can be adjusted by removing material between the perimeter of the mirror/anchor and the outermost holes, and between adjacent holes in the same row.Another mirror device includes a mirror, anchors, and springs coupling the mirror to the anchors. The natural frequency of the device can be adjusted by decoupling one or more springs coupling the mirror to the anchors.The mirror of both devices can includes one or more sacrificial portions. The natural frequencies of the both devices can also be adjusted by trimming the sacrificial portions.

Abstract translation: 反射镜装置包括镜子，锚固器和将镜子连接到锚固件的弹簧。 锚和/或反射镜可以限定与弹簧的联接位置相邻的一排或多排孔。 可以通过去除反射镜/锚的周边和最外面的孔之间以及相邻的相邻孔之间的材料来调节装置的固有频率。 另一个反射镜装置包括将反射镜，锚固器和将反射镜联接到锚固件的弹簧。 装置的固有频率可以通过将耦合反射镜的一个或多个弹簧与锚固件分离来调节。 两个装置的镜子可以包括一个或多个牺牲部分。 两个装置的固有频率也可以通过修整牺牲部分来调节。

公开(公告)号：US07088556B1

公开(公告)日：2006-08-08

申请号：US10611419

申请日：2003-06-30

Applicant: Yee-Chung Fu ,  Ken Chang ,  Ross Pace

Inventor： Yee-Chung Fu ,  Ken Chang ,  Ross Pace

IPC: G11B21/08

CPC classification number: G11B5/5569

Abstract: A disk drive includes a storage disk, a data transducer, an actuator assembly and a positioner. The actuator assembly supports the data transducer over the storage disk. The actuator assembly includes a rotatable actuator hub and a longitudinal axis. The positioner moves the actuator assembly to position the data transducer relative to the storage disk. During movement of the actuator assembly, the actuator hub is subject to a resultant force that causes track misregistration of the data transducer. The positioner includes a magnet assembly that generates a magnetic field, a first conductor region and a second conductor region. In one embodiment, the conductor regions cooperate with the magnet assembly to generate a first force and a second force that are each directed at an angle having an absolute value that is greater than zero degrees and less than approximately 45 degrees relative to the longitudinal axis of the actuator assembly. In another embodiment, the conductor regions are each positioned at an angle having an absolute value of greater than approximately 45 degrees and less than 90 degrees relative to the longitudinal axis of the actuator assembly.

Abstract translation: 磁盘驱动器包括存储盘，数据传感器，致动器组件和定位器。 执行器组件在存储盘上支撑数据传感器。 致动器组件包括可旋转的致动器毂和纵向轴线。 定位器移动致动器组件以相对于存储盘定位数据传感器。 在致动器组件的运动期间，致动器毂受到导致数据传感器的轨迹重合失调的合力。 定位器包括产生磁场的磁体组件，第一导体区域和第二导体区域。 在一个实施例中，导体区域与磁体组件配合以产生第一力和第二力，每一个力和第二力均以相对于纵向轴线的纵向轴线的绝对值大于零度且小于大约45度的角度定向 致动器组件。 在另一个实施例中，导体区域各自以相对于致动器组件的纵向轴线的绝对值大于大约45度且小于90度的角度定位。

公开(公告)号：US20060023295A1

公开(公告)日：2006-02-02

申请号：US11201672

申请日：2005-08-10

Applicant: Yee-Chung Fu

Inventor： Yee-Chung Fu

IPC: G02B26/00

CPC classification number: G02B26/0841

Abstract: A micro-electro-mechanical system (MEMS) mirror device includes a mirror coupled to an actuator by a first torsional hinge along a rotational axis. The actuator has a body and a group of rotational teeth extending from the body. An anchor is coupled another end of the actuator by a second torsional hinge along the rotational axis.

Abstract translation: 微机电系统（MEMS）镜装置包括通过沿旋转轴线的第一扭转铰链联接到致动器的反射镜。 致动器具有从主体延伸的主体和一组旋转齿。 锚固体通过沿着旋转轴线的第二扭转铰链联接致动器的另一端。