Chemical vapor deposition functionalization

    公开(公告)号:US09975143B2

    公开(公告)日:2018-05-22

    申请号:US14784731

    申请日:2014-05-14

    Applicant: SILCOTEK CORP.

    CPC classification number: B05D1/60 B05D5/083 C09D5/08

    Abstract: Chemical vapor deposition articles and processes include a chemical vapor deposition functionalization on a material, the material including an sp3 arrangement of carbon. The chemical vapor deposition functionalization is positioned to be contacted by a process fluid, a hydrocarbon, an analyte, exhaust, or a combination thereof. Additionally or alternatively, the chemical vapor deposition functionalization is not of a refrigerator shelf or a windshield.

    Chemical vapor deposition process and coated article

    公开(公告)号:US09915001B2

    公开(公告)日:2018-03-13

    申请号:US14821949

    申请日:2015-08-10

    Applicant: SILCOTEK CORP.

    CPC classification number: C23C16/52 C23C16/22 C23C16/30 C23C16/46 C23C16/56

    Abstract: A chemical vapor deposition process and coated article are disclosed. The chemical vapor deposition process includes positioning an article in a chemical vapor deposition chamber, then introducing a deposition gas to the chemical vapor deposition chamber at a sub-decomposition temperature that is below the thermal decomposition temperature of the deposition gas, and then heating the chamber to a super-decomposition temperature that is equal to or above the thermal decomposition temperature of the deposition gas resulting in a deposited coating on at least a surface of the article from the introducing of the deposition gas. The chemical vapor deposition process remains within a pressure range of 0.01 psia and 200 psia and/or the deposition gas is dimethylsilane. The coated article includes a substrate subject to corrosion and a deposited coating on the substrate, the deposited coating having silicon, and corrosion resistance.

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