公开(公告)号：US20050225772A1

公开(公告)日：2005-10-13

申请号：US11154130

申请日：2005-06-15

申请人： Henry Hill

发明人： Henry Hill

IPC分类号： G01B9/02 ,  G02B9/02 ,  G02B11/02 ,  G03F7/20 ,  G05B19/19

CPC分类号： G01B9/02007 ,  G01B9/02003 ,  G01B9/02059 ,  G01B9/02067 ,  G01B9/02083 ,  G01B2290/70 ,  G03F7/70725 ,  G03F7/70775 ,  G05B19/19 ,  G05B2219/37275 ,  G05B2219/37506 ,  G05B2219/41184

摘要： The invention features a method for determining non-linear cyclic errors in a metrology system that positions a measurement object under servo-control based on an interferometrically derived position signal. The method includes: translating the measurement object under servo-control at a fixed speed; identifying frequencies of any oscillations in the position of measurement object as it is translated at the fixed speed; and determining amplitude and phase coefficients for sinusoidal components at the identified frequencies which when combined with the position signal suppress the oscillations. The invention also features a method for positioning a measurement object under servo-control based on an interferometrically derived position signal indicative of a position for the measurement object. This method includes: generating a compensated position signal based on the interferometrically derived position signal and at least one correction term that has a sinusoidal dependence on the position of the measurement object; and repositioning the measurement object based on the compensated position signal and a desired position for the measurement object.

公开(公告)号：US4528507A

公开(公告)日：1985-07-09

申请号：US315200

申请日：1981-10-26

申请人： Thomas M. Domin ,  Dan R. Landis ,  Paul Williams

发明人： Thomas M. Domin ,  Dan R. Landis ,  Paul Williams

IPC分类号： G01B7/02 ,  G01B7/06 ,  G01B11/02 ,  G01B15/02 ,  G01N27/72 ,  G01R33/12 ,  G02B11/02 ,  H03K17/00 ,  G01B7/10

CPC分类号： G01B7/107 ,  G01B2210/62

摘要： For measuring a property such as caliper of a traveling sheet, a sensor body and a target body are located on opposite sides of the sheet and constrained (e.g., by gas bearings) along a sensor path intersecting the path of the sheet. Gas bearings maintain these bodies at, substantially constant distances from the opposite surfaces of the sheet while permitting them to move in response to the position and thickness of the sheet. An active sensor element aboard the sensor body and a passive sensor element aboard the target body interact through the sheet to produce aboard the sensor body a response dependent on the sheet property. Manifestations of this response, such as light beam modulations, are produced, without solid bodily connections, at a location spaced from the sensor body where the manifestations are detected to produce a sheet property-indicative signal.

摘要翻译： 为了测量诸如行进薄片的厚度的特性，传感器主体和目标体位于薄片的相对侧上，并且沿着与薄片的路径相交的传感器路径被约束（例如通过气体轴承）。 气体轴承将这些本体保持在与片材的相对表面基本上恒定的距离，同时允许它们响应于片材的位置和厚度移动。 传感器主体上的主动传感器元件和目标主体上的无源传感器元件通过纸张相互作用，以在传感器主体上产生依赖于纸张特性的响应。 在与检测到表现的传感器主体间隔开的位置产生纸张特性指示信号，产生了这种响应的表现，例如光束调制，没有实体身体连接。