公开(公告)号：US20040048544A1

公开(公告)日：2004-03-11

申请号：US10654226

申请日：2003-09-02

Inventor： Ammar Derraa

IPC: H01J009/02

CPC classification number: H01J9/025

Abstract: An emission structure includes a resistor with at least one emitter tip thereover and at least one substantially vertically oriented conductive element positioned adjacent the resistor. The conductive element may contact the resistor. A method for fabricating the emission structure includes forming at least one conductive line, depositing at least one layer of semiconductive or conductive material over and laterally adjacent the at least one conductive line, and forming a hard mask in recessed areas of the surface of the uppermost material layer. The underlying material layer or layers are patterned through the hard mask, exposing substantially longitudinal center portions of the conductive lines. The remaining semiconductive or conductive material is patterned to form the emitter tip and resistor. At least the substantially central longitudinal portion of the conductive trace is removed to form the conductive element.

Abstract translation: 发射结构包括其上具有至少一个发射极尖端的电阻器和邻近电阻器定位的至少一个基本垂直定向的导电元件。 导电元件可以接触电阻器。 一种用于制造发射结构的方法包括形成至少一条导电线，在至少一条导电线上方并横向相邻地沉积至少一层半导体或导电材料，并在最上面的表面的凹陷区域中形成硬掩模 材料层。 通过硬掩模对下面的材料层或图案进行图案化，暴露导电线的基本上纵向的中心部分。 剩余的半导体或导电材料被图案化以形成发射极尖端和电阻器。 至少导电迹线的基本中心纵向部分被去除以形成导电元件。

公开(公告)号：US20040038614A1

公开(公告)日：2004-02-26

申请号：US10228343

申请日：2002-08-24

Inventor： Yu-Yang Chang ,  Hua-Chi Cheng ,  Jyh-Rong Sheu ,  Ching-Hsun Chao ,  Kuang-Chung Chen

IPC: H01J009/02

CPC classification number: B82Y10/00 ,  H01J9/025 ,  H01J9/185 ,  H01J2201/30469

Abstract: A triode structure of a field emission display is manufactured with thick-film technology. The triode structure includes a cathode electrode layer that comprises a metallic catalyst. Isomeric carbon emitters can be grown on the cathode electrode layer by CVD process at a low temperature because of the metallic catalyst. Instead of mixing the metallic catalyst in the cathode electrode layer, a metallic catalyst layer can be formed on the cathode electrode layer to facilitate the growth of the isomeric carbon emitters. The combination of thick film technology and low temperature CVD process provide a low cost method for fabricating a large area field emission display with isomeric carbon emitters.

公开(公告)号：US20030104751A1

公开(公告)日：2003-06-05

申请号：US10320394

申请日：2002-12-17

Applicant: CANON KABUSHIKI KAISHA

Inventor： Kazuhiro Jindai ,  Toshikazu Ohnishi

IPC: H01J009/02

CPC classification number: H01J1/316 ,  H01J9/027 ,  H01J31/127 ,  H01J2201/3165 ,  H01J2329/00 ,  H01J2329/0489

Abstract: A method of manufacturing an electron-emitting device has a step of forming a pair of conductors on a substrate, the conductors being spaced from each other, and an activation process of depositing carbon or carbon compound on at least one side of the pair of conductors in an atmosphere of carbon compound gas The activation process includes a plurality of processes of two or more stages including a first process and a second process. The first process is executed in an atmosphere of the carbon compound gas having a partial pressure higher than a partial process of the second process used as a last activation process.

Abstract translation: 制造电子发射器件的方法具有在衬底上形成一对导体的步骤，导体彼此间隔开，并且在一对导体的至少一侧上沉积碳或碳化合物的活化过程 在碳化合物气体的气氛中的激活过程包括两个或多个阶段的多个过程，包括第一过程和第二过程。 第一种方法是在碳化合物气体的气氛中进行，该气体的分压高于用作最后的活化方法的第二种方法的部分方法。

公开(公告)号：US20020197928A1

公开(公告)日：2002-12-26

申请号：US10087741

申请日：2002-03-05

Inventor： Sang-Hyuck Ahn ,  Sang-Jo Lee

IPC: H01J009/38 ,  H01J009/02

CPC classification number: H01J9/025

Abstract: In a method for fabricating a field emission device, a cathode electrode is first formed on a substrate and an emitter having a carbon-based material is formed on the cathode electrode. After an emitter surface treatment agent is deposited on the substrate to cover the emitter, the emitter surface treatment agent and hardened and removed from the substrate such that the carbon-based material contained in the emitter can be exposed out of a surface of the emitter.

Abstract translation: 在场致发射器件的制造方法中，首先在衬底上形成阴极，在阴极上形成具有碳基材料的发射极。 在基底上沉积发射体表面处理剂以覆盖发射体表面处理剂，并从衬底硬化并除去发光体中包含的碳基材料，从而可以暴露在发射体的表面之外。

公开(公告)号：US20020182970A1

公开(公告)日：2002-12-05

申请号：US10033754

申请日：2001-12-19

Inventor： Wen-Tsang Liu ,  Yui-Shin Fran ,  Lai-Cheng Chen

IPC: H01J009/02

CPC classification number: B82Y10/00 ,  H01J9/025 ,  H01J2201/30469

Abstract: A method of fabricating an emitter of a field emission display. A mixture of metal and silver paste with glass material is screen printed on a substrate as a silver electrode. The metal is selected from a hard solder alloy such as Al/Si alloy containing tin, zinc, aluminum or other low melting point metal. Alternatively, the metal and the silver paste with the glass material are separately screen printed on the substrate. The metal is selected from tin, zinc, aluminum, or an alloy with a low melting point such as aluminum/silicon alloy. A carbon nano-tube layer is formed on the silver electrode by coating the carbon nano-tube material with the electric arc. Alternately a catalyst layer can be formed on the silver electrode prior to the formation of the carbon nano-tube layer. A metal layer such as nickel and copper is formed on the carbon nano-tube layer to prevent the carbon nano-tube layer from absorbing gas.

Abstract translation: 一种制造场发射显示器的发射极的方法。 将金属和银糊与玻璃材料的混合物丝网印刷在基板上作为银电极。 该金属选自含有锡，锌，铝或其它低熔点金属的Al / Si合金等硬焊料合金。 或者，将具有玻璃材料的金属和银膏分别丝网印刷在基板上。 金属选自锡，锌，铝或低熔点合金，如铝/硅合金。 通过用电弧涂覆碳纳米管材料，在银电极上形成碳纳米管层。 或者，可以在形成碳纳米管层之前在银电极上形成催化剂层。 在碳纳米管层上形成镍和铜等金属层，以防止碳纳米管层吸收气体。

公开(公告)号：US20020137423A1

公开(公告)日：2002-09-26

申请号：US10086562

申请日：2002-03-04

Inventor： Junji Kawasaki

IPC: H01J009/44 ,  H01J009/02

CPC classification number: H01J9/261 ,  H01J2201/3165 ,  H01J2329/00

Abstract: A method of fabricating an electron source includes the steps of fixing a first sealing member to a substrate disposed with an electroconductive member, the first sealing member surrounding the electroconductive member excepting a portion of the electroconductive member, abutting a chamber on the first sealing member to cover the electroconductive member excepting the portion of the electroconductive member and form a hermetically sealed atmosphere between the substrate and the chamber, supplying power to the portion of the electroconductive member to give part of the electroconductive member covered with the chamber an electron-emitting function, and removing the chamber from the substrate.

Abstract translation: 制造电子源的方法包括以下步骤：将第一密封构件固定到设置有导电构件的基板上，第一密封构件围绕除导电构件的一部分之外的导电构件，将第一密封构件上的室邻接到 覆盖除了导电构件的部分之外的导电构件，并且在基板和室之间形成气密密封的气氛，向导电构件的该部分供电，从而给覆盖有腔室的导电构件的一部分形成电子发射功能， 以及从所述衬底移除所述腔室。

公开(公告)号：US20020127941A1

公开(公告)日：2002-09-12

申请号：US10112720

申请日：2002-04-02

Applicant: CANON KABUSHIKI KAISHA

Inventor： Miki Tamura ,  Toshikazu Ohnishi ,  Kazuhiro Jindai

IPC: H01J009/46 ,  H01J009/02

CPC classification number: H01J9/027

Abstract: The present invention provides a method of manufacturing an electron-emitting device, comprising a process for forming a pair of electric conductors spaced from each other on a substrate, and an activation process for forming a film of carbon or a carbon compound on at lease one of the pair of electric conductors, wherein the activation process is sequentially performed within plural containers having different atmospheres.

Abstract translation: 本发明提供了一种制造电子发射器件的方法，包括在衬底上形成彼此间隔开的一对电导体的工艺，以及用于形成至少一个碳或碳化合物的膜的活化工艺 的一对电导体，其中激活过程在具有不同气氛的多个容器内顺序地进行。

公开(公告)号：US20020117952A1

公开(公告)日：2002-08-29

申请号：US10075295

申请日：2002-02-15

Inventor： Christopher Chang ,  Edward Huang

IPC: H01J009/02

CPC classification number: H01J9/025 ,  H01J31/127

Abstract: A field emission display device is disclosed, which has a first substrate; a second substrate coated with at least a layer of phosphor; a first conducting layer locating on one surface of said first substrate; a plurality of connecting-conducting lines; an insulating layer having a plurality of holes; a second conducting layer having a plurality of holes; a plurality of cones having at least one microtip; and a sealing gel sandwiched by said second substrate and said insulating layer. The method for fabricating the field emission display device illustrated above is also disclosed.

Abstract translation: 公开了一种场致发射显示装置，其具有第一基板; 涂覆有至少一层磷光体的第二基板; 位于所述第一基板的一个表面上的第一导电层; 多条连接导线; 具有多个孔的绝缘层; 具有多个孔的第二导电层; 多个锥体，具有至少一个微尖端; 以及由所述第二基板和所述绝缘层夹持的密封凝胶。 还公开了用于制造上述场致发射显示装置的方法。

公开(公告)号：US20020106960A1

公开(公告)日：2002-08-08

申请号：US10057351

申请日：2002-01-24

Inventor： Aaron R. Wilson

IPC: H01J009/02

CPC classification number: H01J9/025

Abstract: A method of forming emitter tips for use in a field emission array is disclosed. The tips are formed by utilizing a polymer residue that forms during the dry etch sharpening step to hold the mask caps in place on the emitter tips. The residue polymer continues to support the mask caps as the tips are over-etched, enabling the tips to be etched past sharp without losing their shape and sharpness. The dry etch utilizes an etchant comprised of fluorine and chlorine gasses. The mask caps and residue polymer are easily removed after etching by washing the wafers in a wash of deionized water, or Buffered Oxide Etch.

公开(公告)号：US20020102899A1

公开(公告)日：2002-08-01

申请号：US09925356

申请日：2001-08-09

Applicant: National Science Council

Inventor： Huang-Chung Cheng ,  Fu-Gom Tarntair ,  Chia-Pin Lin

IPC: H01J009/02

CPC classification number: H01J9/025

Abstract: A process of forming a field emission electrode for manufacturing a field emission array is provided. The process includes steps of (a) providing a substrate having a metal layer thereon, (b) forming a plurality of mask units on the metal layer and partially removing the metal layer uncovered by the mask units, (c) oxidizing a surface of the remained metal layer by an anodic oxidization method for forming a metal oxide layer thereon such that an upper portion of the unoxidized remained metal layer is in the shape of plural conoids, and (d) removing the remained mask units and the metal oxide layer. Alternatively, the process includes steps of (a) providing a substrate having a first metal layer thereon, (b) forming a plurality of mask units on the first metal layer and partially removing the first metal layer uncovered by the mask units, (c) oxidizing a surface of the remained first metal layer by an anodic oxidization method for forming a metal oxide layer thereon such that an upper portion of the unoxidized remained first metal layer is in the shape of plural cylinders, (d) forming a second metal layer on the metal oxide layer, and (e) removing the remained mask units.

Abstract translation: 提供了一种形成用于制造场致发射阵列的场致发射电极的工艺。 该方法包括以下步骤：（a）提供其上具有金属层的基底，（b）在金属层上形成多个掩模单元，并部分去除未被掩模单元覆盖的金属层，（c） 通过用于在其上形成金属氧化物层的阳极氧化方法保留金属层，使得未氧化的残留金属层的上部为多个扁桃状，（d）除去残留的掩模单元和金属氧化物层。 或者，该方法包括以下步骤：（a）提供其上具有第一金属层的基底，（b）在第一金属层上形成多个掩模单元，并部分去除未被掩模单元覆盖的第一金属层，（c） 通过用于在其上形成金属氧化物层的阳极氧化方法氧化残留的第一金属层的表面，使得未氧化的残留的第一金属层的上部为多个圆柱体，（d）在第二金属层上形成第二金属层 金属氧化物层，和（e）去除残留的掩模单元。