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公开(公告)号：US07100340B2
公开(公告)日：2006-09-05
申请号：US10087638
申请日：2002-03-01
IPC分类号： H01J5/02
CPC分类号： H01L21/68707 , H01L21/67766 , H01L21/67775 , H01L21/67778 , Y10S414/135
摘要： The present invention is a unified spine structure that EFEM components, such as a wafer handling robot and a SMIF pod advance assembly, may mount to. The frame includes multiple vertical struts that are mounted to an upper support member and a lower support member. Structurally tying the vertical struts to the support members creates a rigid body to support the EFEM components. The vertical struts also provide a common reference that the EFEM components may align with. This eliminates the need for each EFEM component to align with respect to each other. Thus, if one EFEM component is removed it will not affect the alignment and calibration of the remaining secured EFEM components. The unified frame also creates an isolated storage area for the SMIF pod door and the port door within the environment that is isolated from the outside ambient conditions.
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公开(公告)号：US07066707B1
公开(公告)日：2006-06-27
申请号：US10087400
申请日：2002-03-01
IPC分类号： B65G49/07
CPC分类号： H01L21/67778 , H01L21/67766 , H01L21/67775 , H01L21/68707 , Y10S414/137
摘要： An integrated system is disclosed for workpiece handling and/or inspection at the front end of a tool. The system comprises a rigid member of unitary construction such as a metal plate which mounts to the front of a tool associated with a semiconductor process. The front end components, including the load port assemblies, prealigners and workpiece handling robot, are mounted to the plate to provide precise and repeatable positioning of the front end components with respect to each other.
摘要翻译： 公开了一种用于工具前端的工件处理和/或检查的集成系统。 该系统包括一体式结构的刚性构件，例如安装到与半导体工艺相关联的工具的前部的金属板。 包括负载端口组件，预对准器和工件处理机器人的前端部件安装到板上，以提供前端部件相对于彼此的精确和可重复的定位。
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公开(公告)号：US07055875B2
公开(公告)日：2006-06-06
申请号：US10888819
申请日：2004-07-10
申请人： Anthony C. Bonora , Roger G. Hine
发明人： Anthony C. Bonora , Roger G. Hine
IPC分类号： A47J45/00
CPC分类号： H01L21/6838 , H01L21/68707 , Y10S414/141
摘要： The present invention comprises a vacuum end effector having workpiece supports that work in conjunction with distorted workpiece surfaces. In one embodiment, each workpiece support has the ability to gimbal and conform the workpiece surface in contact with an outer edge of the support. Each workpiece support preferably provides a knife-like contact edge to minimize the contact area between the support and the workpiece while still providing an effective vacuum area to hold the wafer securely on the support. In another embodiment, each workpiece support is replaceable without having to remove the end effector from the robot assembly
摘要翻译： 本发明包括具有工件支撑件的真空端部执行器，其与变形的工件表面一起工作。 在一个实施例中，每个工件支撑件具有万向架和使工件表面与支撑件的外边缘接触的能力。 每个工件支撑件优选地提供刀形接触边缘以最小化支撑件和工件之间的接触面积，同时仍然提供有效的真空区域以将晶片牢固地保持在支撑件上。 在另一个实施例中，每个工件支撑件是可更换的，而不必从机器人组件移除端部执行器
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