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公开(公告)号：US07771151B2
公开(公告)日：2010-08-10
申请号：US11178072
申请日：2005-07-08
申请人： Anthony C. Bonora , Michael Krolak , Roger G. Hine
发明人： Anthony C. Bonora , Michael Krolak , Roger G. Hine
IPC分类号： H01L21/68
CPC分类号： H01L21/67766 , H01L21/67736 , H01L21/67769 , H01L21/67775 , Y10S414/14 , Y10T74/20305
摘要： The present invention generally comprises a tool load device for transferring a container between a container transport system and a processing tool. The tool load device may service a single load port or multiple load ports. Regardless, the tool load device is preferably located between the load port of the processing tool and the section of the container transport system passing the processing tool. The tool load device provides an improved method of moving containers between a conventional load port and, for example, a conveyor. In another embodiment, the tool load device is coupled with an x-drive assembly that moves the tool load device along a path that is substantially parallel to the container transport system passing in front of the load port—allowing the tool load device to service multiple load ports.
摘要翻译： 本发明通常包括用于在容器运输系统和加工工具之间转运容器的工具装载装置。 工具装载设备可以服务于单个装载端口或多个装载端口。 无论如何，工具装载装置优选地位于处理工具的装载端口和通过处理工具的容器运输系统的部分之间。 工具装载装置提供了一种在常规负载端口和例如输送机之间移动容器的改进方法。 在另一个实施例中，工具装载装置与x驱动组件联接，该x驱动组件沿着基本上平行于通过装载端口前方的集装箱运输系统的路径移动工具装载装置 - 允许工具装载装置服务多个 加载端口。
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公开(公告)号：US07410340B2
公开(公告)日：2008-08-12
申请号：US11064880
申请日：2005-02-24
申请人： Anthony C. Bonora , Michael Krolak , Roger G. Hine
发明人： Anthony C. Bonora , Michael Krolak , Roger G. Hine
IPC分类号： B65G1/133
CPC分类号： H01L21/67775 , H01L21/67736 , Y10S414/14
摘要： The present invention comprises a container transport and loading system. The system generally comprises a load port for presenting articles to a tool and a container transport system. In one embodiment, the load port includes a vertically movable FOUP advance plate assembly that is adapted to load and unload a FOUP from a conveyor that passes by the load port and move the FOUP horizontally. In another embodiment, the load port includes a vertically movable support structure that is adapted to load and unload a container from a shuttle that passes by the load port. The various embodiments of the load port and container transport system are improvements over conventional container transport systems. The present invention also includes a shuttle for simultaneously transporting multiple containers that a load port may load or unload a container from.
摘要翻译： 本发明包括容器运输和装载系统。 该系统通常包括用于将物品呈现给工具的装载端口和容器运输系统。 在一个实施例中，负载端口包括可垂直移动的FOUP提前板组件，其适于从通过负载端口的传送器加载和卸载FOUP并水平移动FOUP。 在另一个实施例中，负载端口包括可垂直移动的支撑结构，其适于从穿过负载端口的梭子加载和卸载容器。 负载端口和集装箱运输系统的各种实施例是相对于常规集装箱运输系统的改进。 本发明还包括用于同时运送多个容器的梭子，负载口可装载或卸载容器。
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公开(公告)号：US20080152466A1
公开(公告)日：2008-06-26
申请号：US11644240
申请日：2006-12-22
IPC分类号： B65H5/08
CPC分类号： B65G1/0407 , B65G37/02 , B65G2201/0297
摘要： A system comprising a load port and a transfer module. In one embodiment, the load port includes a plate having a first opening and a second opening, a first workpiece access port, a second workpiece access port and at least one storage location. The storage location(s) may be located either beneath the second workpiece access port or above the first workpiece access port. The transfer mosule, which is located adjacent the load port, includes a load arm for moving the workpiece containers between the first workpiece access port, the second workpiece access port, any of the storage shelves and a material transport system.
摘要翻译： 一种包括负载端口和转移模块的系统。 在一个实施例中，负载端口包括具有第一开口和第二开口的板，第一工件接入端口，第二工件接入端口和至少一个存储位置。 存储位置可以位于第二工件访问端口下方或第一工件访问端口的上方。 位于负载端口附近的转移清除器包括用于在第一工件接入端口，第二工件接入端口，任何存储搁板和材料输送系统之间移动工件容器的负载臂。
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公开(公告)号：US06634851B1
公开(公告)日：2003-10-21
申请号：US09483625
申请日：2000-01-14
IPC分类号： B25J1804
CPC分类号： H01L21/68707 , B25J9/042 , B25J9/104 , B25J18/02 , B25J18/04 , B25J19/0079 , H01L21/67742 , Y10T74/20323
摘要： A wafer handling robot is disclosed for transporting workpieces such as semiconductor wafers and flat panel displays between process tools and/or workpiece storage locations within a wafer fab. The robot includes a base comprising a rigid backbone for providing a significant degree of structural stability to the robot. The base further includes a mast, a linear drive system for translating the mast, and a shoulder drive system for rotating the mast. The shoulder drive system includes a harmonic drive reduction system for providing a stiff, smooth and precise output rotation of the mast section. The robot further includes a proximal link fixedly mounted to the mast for rotation with the mast, and a distal link rotatably mounted to the proximal link. An end effector for supporting various workpieces is rotationally mounted to the distal end of the distal link. An elbow drive is mounted to the proximal link, extending down into the mast section, for driving rotation of the distal link with respect to the proximal link. Torque is transmitted from the elbow drive to the distal link by steel straps wrapped around a drive pulley from the elbow drive and a driven pulley in the distal link. Similarly, torque is transmitted from the distal link to the end effector via a second set of steel straps wrapped around pulleys provided in the distal link and end effector, respectively.
摘要翻译： 公开了一种晶片处理机器人，用于在晶片制造厂内的工艺工具和/或工件存储位置之间输送诸如半导体晶片和平板显示器的工件。 机器人包括一个底座，它包括一个刚性骨架，为机器人提供了很大程度的结构稳定性。 基座还包括桅杆，用于平移桅杆的线性驱动系统和用于旋转桅杆的台肩驱动系统。 肩部驱动系统包括用于提供桅杆部分的刚性，平滑和精确的输出旋转的谐波驱动减速系统。 机器人还包括固定地安装到桅杆上以使桅杆旋转的近端链节和可旋转地安装到近端连杆的远端连杆。 用于支撑各种工件的端部执行器旋转地安装到远端连杆的远端。 肘部驱动器安装到近端连杆，向下延伸到桅杆部分中，用于驱动远端连杆相对于近端连杆的旋转。 扭矩由弯头驱动器和远端连杆的从动皮带轮缠绕在驱动皮带轮周围的钢带从弯头传动装置传递到远端连杆。 类似地，扭矩通过分别缠绕在设置在远端连杆和端部执行器中的滑轮周围的第二组钢带从远端连杆传递到末端执行器。
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公开(公告)号：US07798759B2
公开(公告)日：2010-09-21
申请号：US11433980
申请日：2006-05-15
申请人： Anthony C. Bonora , Michael Krolak , Roger G. Hine
发明人： Anthony C. Bonora , Michael Krolak , Roger G. Hine
IPC分类号： B65G1/00
CPC分类号： H01L21/67715 , H01L21/67727 , H01L21/6773 , H01L21/67733 , H01L21/67736 , H01L21/67766 , H01L21/67769 , H01L21/67775 , Y10S414/14
摘要： The present invention generally comprises an apparatus for transporting containers between a first transport system and a second transport system. In one embodiment, the first transport system comprises a ceiling-based conveyor and the second transport system comprises a floor-based conveyor. The present invention may further include storage shelves, preferably substantially horizontally aligned about a common vertical plane with a section of one of the transport systems. The transport system may be located either directly above the uppermost storage shelf or beneath the lowermost storage shelf in order to add storage capacity within the fab. A vertical module transports containers between the transport systems and the at least one storage shelf.
摘要翻译： 本发明通常包括用于在第一输送系统和第二输送系统之间输送容器的装置。 在一个实施例中，第一输送系统包括基于天花板的输送机，第二输送系统包括基于地板的输送机。 本发明还可以包括存储架，优选地基本上水平地围绕公共垂直平面对准，其中一个传送系统的一部分。 运输系统可以位于最上面的储物架的正上方，或者位于最下面的储物架之下，以便增加储存容量。 垂直模块在运输系统和至少一个存储架之间运输容器。
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公开(公告)号：US20100080672A1
公开(公告)日：2010-04-01
申请号：US12456645
申请日：2009-06-19
IPC分类号： H01L21/677 , B65G15/20 , B65G15/22
CPC分类号： H01L21/67706 , H01L21/6773 , H01L21/67736 , H01L21/67775
摘要： A direct load system and conveyor is disclosed. The direct load system includes a load port for moving containers in a vertical orientation between a lower position near the conveyor and up to an upper position proximate to a load port door. The load port includes a single arm that moves a support in a vertical configuration, such that moving the single arm allows for the support to be lowered to the conveyor in a nested location between beams of the conveyor. The conveyor includes a single slot in a beam that allows the single arm to pass, and allows the support to be placed in the nested location, which is below a conveyor path defined by the belts of the conveyor. If a container is to be lifted off of the belts, the single arm raises up from the nested location, to then raise the container up and off of the conveyor and to the load port door. The single arm and interface with the conveyor slot can be used by other tools, such as stockers or tools that need to directly access a conveyor used to transport containers (e.g., wafers, etc.) to locations/tools of a fabrication facility. In alternate embodiments, it is possible to replace the belt with conveying wheels.
摘要翻译： 公开了一种直接负载系统和输送机。 直接负载系统包括用于在垂直方向移动容器的装载端口，其位于靠近输送机的下部位置和靠近装载端口门的上部位置之间。 负载端口包括单个臂，其以垂直构造移动支撑件，使得移动单臂允许支撑件在输送机的梁之间的嵌套位置中降低到输送机。 输送机包括梁中的单个槽，其允许单臂通过，并且允许支撑件被放置在嵌套位置，该嵌套位置位于由输送机的带定义的传送路径的下方。 如果一个集装箱要从皮带上提起，那么单臂从嵌套的位置上升，然后将容器从输送机上升起并离开装载口门。 单个臂和输送机槽的接口可以被其他工具使用，例如储存器或工具，其需要直接访问用于将容器（例如，晶片等）运送到制造设施的位置/工具的输送机。 在替代实施例中，可以用输送轮代替带。
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公开(公告)号：US07669903B2
公开(公告)日：2010-03-02
申请号：US11870560
申请日：2007-10-11
申请人： Anthony C. Bonora , Roger G. Hine
发明人： Anthony C. Bonora , Roger G. Hine
IPC分类号： B25J15/06
CPC分类号： H01L21/6838 , Y10S294/902 , Y10S414/141
摘要： The present invention comprises a vacuum end effector having workpiece supports that work in conjunction with distorted workpiece surfaces. In one embodiment, each workpiece support has the ability to gimbal and conform the workpiece surface in contact with an outer edge of the support. Each workpiece support preferably provides a knife-like contact edge to minimize the contact area between the support and the workpiece while still providing an effective vacuum area to hold the wafer securely on the support. In another embodiment, each workpiece support is replaceable without having to remove the end effector from the robot assembly.
摘要翻译： 本发明包括具有工件支撑件的真空端部执行器，其与变形的工件表面一起工作。 在一个实施例中，每个工件支撑件具有万向架和使工件表面与支撑件的外边缘接触的能力。 每个工件支撑件优选地提供刀形接触边缘以最小化支撑件和工件之间的接触面积，同时仍然提供有效的真空区域以将晶片牢固地保持在支撑件上。 在另一个实施例中，每个工件支撑件是可更换的，而不必从机器人组件移除端部执行器。
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公开(公告)号：US07648327B2
公开(公告)日：2010-01-19
申请号：US11305256
申请日：2005-12-16
IPC分类号： B65G49/07
CPC分类号： H01L21/67778 , H01L21/67766 , H01L21/67775 , H01L21/68707 , Y10S414/137
摘要： The present invention is a wafer engine for transporting wafers. The wafer engine includes a linear drive for moving the wafer along an x axis, a rotational drive for rotating the wafer about a theta axis, a linear drive for moving the wafer along a z axis, and a linear drive for moving the wafer along a radial axis. The linear drive for moving the wafer along a z axis is offset from the rotational drive. When the rotational drive rotates about the theta axis, both the z axis and radial axis drives are also rotated about the theta axis. Preferably, the linear drive for moving the wafer along a radial axis is a dual or rapid swap slide body mechanism having an upper and lower end effector. The slide body mechanism preferably also has means to align the wafer and perform various inspection and marking procedures.
摘要翻译： 本发明是用于输送晶片的晶片引擎。 晶片引擎包括用于沿x轴移动晶片的线性驱动器，用于使晶片围绕θ轴旋转的旋转驱动器，用于沿着z轴移动晶片的线性驱动器和用于沿着径向移动晶片的线性驱动器 轴。 用于沿着z轴移动晶片的线性驱动器偏离旋转驱动。 当旋转驱动器围绕θ轴旋转时，z轴和径向轴驱动器也绕θ轴旋转。 优选地，用于沿着径向轴线移动晶片的线性驱动器是具有上端和下端执行器的双重或快速互换滑动体机构。 滑动体机构优选地还具有对准晶片并执行各种检查和标记程序的装置。
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公开(公告)号：US07217076B2
公开(公告)日：2007-05-15
申请号：US10087092
申请日：2002-03-01
IPC分类号： B65G49/07
CPC分类号： H01L21/67775 , H01L21/67766 , H01L21/67778 , H01L21/68707 , Y10S414/139
摘要： The semiconductor material handling system is an EFEM that may either mount to the front end of a processing tool or be integrated into the processing tool. The EFEM is built from a unified frame that the EFEM components, such as a wafer engine and a SMIF pod advance plate, may mount to. The frame serves as a common mounting structure that the EFEM components may use as a reference for alignment purposes. Since the EFEM components do not have to align with respect to the position of each other, the calibration, if any is required, is greatly simplified. The EFEM also has a reduced footprint, allowing the EFEM to mount to the front end of a processing tool and not extend to the fab floor. Thus, space is freed up between the EFEM and the fab floor. By way of example only, this space may be used as a maintenance access area to the processing tool without having to first remove the EFEM.
摘要翻译： 半导体材料处理系统是可以安装到处理工具的前端或被集成到处理工具中的EFEM。 EFEM由统一的框架构成，EFEM组件（如晶片引擎和SMIF盒前进板）可以安装到。 该框架用作通用安装结构，EFEM组件可用作对准目的的参考。 由于EFEM组件不必相对于彼此的位置对准，所以校准（如果需要）被大大简化。 EFEM还具有减少的占地面积，允许EFEM安装到加工工具的前端，而不是延伸到fab楼层。 因此，在EFEM和fab楼之间释放空间。 仅作为示例，该空间可以用作处理工具的维护访问区域，而不必首先去除EFEM。
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公开(公告)号：US09834378B2
公开(公告)日：2017-12-05
申请号：US11644240
申请日：2006-12-22
IPC分类号： H01L21/677 , B65G1/04 , B65G37/02
CPC分类号： B65G1/0407 , B65G37/02 , B65G2201/0297
摘要： A system comprising a load port and a transfer module. In one embodiment, the load port includes a plate having a first opening and a second opening, a first workpiece access port, a second workpiece access port and at least one storage location. The storage location(s) may be located either beneath the second workpiece access port or above the first workpiece access port. The transfer mosule, which is located adjacent the load port, includes a load arm for moving the workpiece containers between the first workpiece access port, the second workpiece access port, any of the storage shelves and a material transport system.
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