公开(公告)号：US5998801A

公开(公告)日：1999-12-07

申请号：US281095

申请日：1999-03-30

申请人： Yuji Imai

发明人： Yuji Imai

IPC分类号： G01B11/00 ,  B23K20/02 ,  G03F7/20 ,  H01L21/027 ,  H01R43/02 ,  G01N21/86

CPC分类号： B23K20/02 ,  B23K20/023 ,  H01R43/02 ,  B23K2201/38

摘要： A projection area (exposure area) on a wafer W, in which a mask pattern is transferred, is divided into, for example, four quadrants. A slit or X-shaped pattern is projected by a light-transmitting optical system so that a plurality of images are formed at a regular interval in the projection area on the wafer W. Luminous flux reflected from the images on the wafer W is received by a light-receiver and converted into photoelectric signals. A master controller calculates the focal values of the first through fourth quadrants along the optical axis based on the photoelectric signals. An optimum focal position and a leveling amount are determined based on the focal values of the first through fourth quadrants. Even if there are level differences in the wafer surface, the optimum focal position and the leveling amount can be accurately determined.

摘要翻译： 将掩模图案转印到晶片W上的投影区域（曝光区域）被划分为例如四个象限。 狭缝或X形图案由透光光学系统投影，使得在晶片W的投影区域中以规则的间隔形成多个图像。从晶片W上的图像反射的光通量被 光接收器并转换为光电信号。 主控制器基于光电信号计算沿着光轴的第一至第四象限的焦点值。 基于第一至第四象限的焦点值来确定最佳焦点位置和调平量。 即使在晶片表面存在水平差，也可以精确地确定最佳焦点位置和调平量。

公开(公告)号：US5742067A

公开(公告)日：1998-04-21

申请号：US563096

申请日：1995-11-27

申请人： Yuji Imai

发明人： Yuji Imai

IPC分类号： G03F7/20 ,  G03F7/207 ,  G03F7/23 ,  G03F9/00 ,  H01L21/027 ,  G01N21/86

CPC分类号： G03F7/70425 ,  G03F7/70358 ,  G03F9/70

摘要： A projection exposure method is provided for transferring a pattern formed on a mask through a projection optical system onto a plurality of shot areas on a photosensitive substrate respectively. Correction for inclination of the entire photosensitive substrate (global leveling) is performed during movement of the substrate for positioning for a first exposure shot (step 110). Leveling at each exposure position (chip leveling) is performed after positioning for each exposure shot (step 112), and then exposure is performed. Therefore, the leveling operation is divided, the correction amount for leveling at each exposure position is small, and the leveling is completed in a short period of time at the exposure position. Positional adjustment for the substrate in a direction of an optical axis is performed during movement of the substrate to a shot to be subsequently exposed. The leveling and the focusing can be accurately performed at each exposure shot position without extremely lowering the throughput. The method is also is applicable to exposure methods of the step-and-repeat system and the slit scan system.

摘要翻译： 提供投影曝光方法，用于通过投影光学系统将形成在掩模上的图案分别转印到感光基板上的多个照射区域上。 在用于第一曝光拍摄的定位用基板的移动期间，进行整个感光基板倾斜的校正（全局调平）（步骤110）。 在每个曝光拍摄的定位之后执行每个曝光位置的水平调整（芯片调平）（步骤112），然后进行曝光。 因此，平整操作被划分，每个曝光位置处的调平的校正量小，并且在曝光位置的短时间内完成调平。 在基板移动到随后暴露的镜头期间执行基板在光轴方向上的位置调整。 可以在每个曝光拍摄位置精确地执行调平和聚焦，而不会极大地降低生产量。 该方法也适用于步进重复系统和狭缝扫描系统的曝光方法。

公开(公告)号：US5738165A

公开(公告)日：1998-04-14

申请号：US462589

申请日：1995-06-05

申请人： Yuji Imai

发明人： Yuji Imai

IPC分类号： G03F7/20 ,  H01L21/683 ,  F28F7/00

CPC分类号： G03F7/70875 ,  H01L21/6838 ,  Y10S269/903 ,  Y10T279/11

摘要： A substrate holding apparatus is provided with a plate-shaped substrated holding unit including a first surface having plural protruding portions coming into contact with a plate-shaped substrate. The apparatus is a substantially flat second surface and adapted to support the substrate on the substrate holding unit by suction and comprises a temperature regulating unit which is composed of a material of a high thermal conductivity and positioned as to contact the second surface, a heat discharging the heat from the substrate holding unit, and a heat discharge control unit for controlling the heat discharging property of the heat discharging unit. The substrate holding unit is composed of a material of a high thermal conductivity and a low thermal expansion coefficient and is formed as a thin plate smaller in volume than the temperature regulating unit, and the protruding portions are formed as small projections in order to transfer the localized heat of the substrate to the substrate holding unit through the protruding portions and a space formed by the substrate and the protruding portions.

摘要翻译： 基板保持装置设置有板状的小型保持单元，其包括具有与板状基板接触的多个突出部的第一表面。 该设备是基本上平坦的第二表面，并且适于通过抽吸将基板支撑在基板保持单元上，并且包括温度调节单元，该温度调节单元由具有高导热性的材料构成并定位成接触第二表面，放热 来自基板保持单元的热量和用于控制放热单元的散热性能的散热控制单元。 基板保持单元由具有高导热性和低热膨胀系数的材料构成，并且形成为比温度调节单元更小体积的薄板，并且突出部分形成为小突起，以便将 通过突出部分将衬底局部化到衬底保持单元，以及由衬底和突出部分形成的空间。

公开(公告)号：US5576788A

公开(公告)日：1996-11-19

申请号：US229461

申请日：1994-04-18

申请人： Azuma Miyazawa ,  Yuji Imai ,  Hisayuki Matsumoto ,  Hideto Kitazawa ,  Yoshinori Matsuzawa ,  Juro Kikuchi

发明人： Azuma Miyazawa ,  Yuji Imai ,  Hisayuki Matsumoto ,  Hideto Kitazawa ,  Yoshinori Matsuzawa ,  Juro Kikuchi

IPC分类号： G03B9/64 ,  G03B5/00 ,  G03B17/00 ,  G03B17/18

CPC分类号： G03B17/18 ,  G03B2207/005 ,  G03B2217/005

摘要： A camera which reduces camera shake by adjusting the shutter timing is characterized in that it has a mode for displaying a camera shake amount to allow a photographer to recognize a camera shake. A shutter timing determining section permits shutter release at a timing at which the camera shake amount becomes a predetermined amount or less during a shutter release operation on the basis of the camera shake amount detected by a camera shake detecting section. When a camera shake learning mode is set through an input section, a camera shake amount is converted into a display amount by a display data converting section through a camera shake mode selecting section. This display amount is displayed on a display section in real time while a shutter release button is depressed. The camera shake selecting section inhibits a shutter driving operation of the shutter timing determining section in the camera shake amount display mode, thus also allowing a photographer to learn how to depress the shutter release button without causing a camera shake.

摘要翻译： 通过调节快门时间来减少相机抖动的相机的特征在于其具有显示相机抖动量以允许摄影者识别相机抖动的模式。 基于由相机抖动检测部检测到的相机抖动量，快门定时确定部分在快门释放操作期间在相机抖动量变为预定量或更小的定时允许快门释放。 当通过输入部分设置相机抖动学习模式时，通过相机抖动模式选择部分，通过显示数据转换部分将照相机抖动量转换成显示量。 当按下快门释放按钮时，该显示量实时地显示在显示部分上。 在相机抖动量显示模式中，相机抖动选择部分禁止快门时机确定部分的快门驱动操作，因此也允许摄影师学习如何按下快门释放按钮而不引起相机抖动。

公开(公告)号：US5483056A

公开(公告)日：1996-01-09

申请号：US319634

申请日：1994-10-07

申请人： Yuji Imai

发明人： Yuji Imai

IPC分类号： G03F7/207 ,  G03F9/00 ,  H01L21/027 ,  G01J1/20

CPC分类号： G03F9/7026

摘要： A method of projection exposure of a shot area on a substrate to a mask pattern by detecting, by a focus detection mechanism, an amount of defocus, in the axial direction of a projection optical system, of a measuring point on the substrate with reference to the focal plane of the projection optical system, then loading the substrate, and moving the substrate to a predetermined height by a Z-stage movable in the axial direction of the projection optical system, based on the value detected by the focus detection mechanism; thereby exposing a shot area of the substrate to the mask pattern.

摘要翻译： 通过焦点检测机构在投影光学系统的轴向上检测基板上的测量点的散焦量来参考以下方式，将基板上的照射区域投射到掩模图案上的方法： 投影光学系统的焦平面，然后装载基板，并且基于由焦点检测机构检测的值，通过可在投影光学系统的轴向方向上移动的Z级将基板移动到预定高度; 从而将衬底的照射区域暴露于掩模图案。

公开(公告)号：US5369462A

公开(公告)日：1994-11-29

申请号：US72837

申请日：1993-06-07

申请人： Azuma Miyazawa ,  Kouji Mizobuchi ,  Takeshi Ito ,  Masataka Ide ,  Atsushi Maruyama ,  Juro Kikuchi ,  Yuji Imai

发明人： Azuma Miyazawa ,  Kouji Mizobuchi ,  Takeshi Ito ,  Masataka Ide ,  Atsushi Maruyama ,  Juro Kikuchi ,  Yuji Imai

IPC分类号： G01S17/87 ,  G03B7/091 ,  G03B17/00 ,  H04N5/232 ,  G01C3/08

CPC分类号： H04N5/23258 ,  G01S17/875 ,  G03B17/00 ,  G03B7/091 ,  H04N5/23248 ,  G03B2217/005

摘要： An inclination detecting apparatus includes a light projecting section, a light receiving section and an operating section. The light projection section projects light towards an object. The light receiving section receives lights reflected from at least two points of the object and outputs a photoelectric current signal. The operating section derives a difference between the reciprocals of the square roots of the photoelectric currents output from the light receiving section. An output of the operating section represents an inclination signal of the object. A shake detecting apparatus includes a light projecting/receiving section and an operating section. The light projecting/receiving section is disposed on the rear surface of a camera, so as to project light towards a photographer, receive lights reflected from at least two points on light receiving elements, and output photoelectric current signals for the respective points. The operating section derives a difference between the reciprocals of the square roots of the photoelectric currents output from the light receiving elements. An output of the operating section is used as a hand shake signal.

摘要翻译： 倾斜检测装置包括光投射部，光接收部和操作部。 光投射部分朝向物体投射光。 光接收部接收从物体的至少两个点反射的光并输出光电流信号。 操作部分导出从光接收部分输出的光电流的平方根的倒数之间的差。 操作部的输出表示物体的倾斜信号。 振动检测装置包括光投射/接收部分和操作部分。 光投射/接收部分设置在照相机的后表面上，以向摄影者投射光，接收从光接收元件上的至少两个点反射的光，并输出各个点的光电流信号。 操作部分导出从光接收元件输出的光电流的平方根的倒数之间的差。 操作部的输出用作手抖动信号。

公开(公告)号：US5296889A

公开(公告)日：1994-03-22

申请号：US879160

申请日：1992-04-30

申请人： Yuji Imai

发明人： Yuji Imai

IPC分类号： G03B7/08 ,  G03B17/42 ,  G03B7/00

CPC分类号： G03B17/425 ,  G03B7/0807

摘要： Between a central processing unit for sequence control of a camera and a plurality of controlled systems is connected an interface serving as a predriver, which is formed of a monolithic integrated circuit. The controlled systems are transistors forming bridge circuits of drivers for controlling motors acting as driving sources of the camera. Between the central processing unit and the interface is a serial communication line system which comprises at least one serial data line and at least one serial clock line. The interface includes a serial-to-parallel conversion circuit for converting serial data transmitted over the serial data communication line system to parallel data, a latch circuit for latching the parallel data output from the serial-to-parallel conversion circuit and an output buffer circuit responsive to output signals of the latch circuit for providing drive signals to the controlled systems.

摘要翻译： 在用于相机的顺序控制的中央处理单元和多个受控系统之间连接有作为预驱动器的接口，其由单片集成电路形成。 受控系统是形成驱动器的桥接电路的晶体管，用于控制用作照相机的驱动源的电动机。 在中央处理单元和接口之间是串行通信线路系统，其包括至少一个串行数据线和至少一个串行时钟线。 该接口包括用于将通过串行数据通信线路系统发送的串行数据转换为并行数据的串行 - 并行转换电路，用于锁存从串行 - 并行转换电路输出的并行数据的锁存电路和输出缓冲电路 响应于锁存电路的输出信号，以向受控系统提供驱动信号。

公开(公告)号：US4702606A

公开(公告)日：1987-10-27

申请号：US737434

申请日：1985-05-24

申请人： Toshio Matsuura ,  Seiro Murakami ,  Yuji Imai ,  Kazuya Ohta ,  Akikazu Tanimoto

发明人： Toshio Matsuura ,  Seiro Murakami ,  Yuji Imai ,  Kazuya Ohta ,  Akikazu Tanimoto

IPC分类号： G03F7/20 ,  G03F9/00 ,  G01B11/00

CPC分类号： G03F9/7049 ,  G03F7/70358

摘要： An alignment system includes an element bearing a plurality of patterns on the surface thereof, the plurality of patterns being arranged in a predetermined direction, a stage for holding the element, scanning means for scanning the plurality of patterns of the element held by the stage in the predetermined direction and making position signals indicative of the positions of the plurality of patterns in the predetermined direction on the element, and operation means for operating and putting out a signal indicative of a position which is in a predetermined relation with the positions of the plurality of patterns in the predetermined direction, on the basis of the position signals.

摘要翻译： 对准系统包括在其表面上具有多个图案的元件，多个图案沿预定方向布置，用于保持元件的台架，用于扫描由台架保持的元件的多个图案的扫描装置 所述预定方向和指示所述多个图案在所述元件上的所述预定方向上的位置的位置信号，以及操作装置，用于操作和输出指示与所述多个位置相关的预定关系的位置的信号 的图案在预定方向上，基于位置信号。

公开(公告)号：US08230264B2

公开(公告)日：2012-07-24

申请号：US12582873

申请日：2009-10-21

申请人： Soichi Shigeta ,  Yuji Imai

发明人： Soichi Shigeta ,  Yuji Imai

IPC分类号： G06F11/00

CPC分类号： G06F11/3688 ,  Y10T74/18056 ,  Y10T74/18064 ,  Y10T74/18072 ,  Y10T74/1812 ,  Y10T74/1824

摘要： An apparatus for evaluating a change of an existing system to a modified system by using a test system including a subsystem having the same configuration with either of the existing subsystem and the modified system includes: a memory for storing configuration information of the test system and test information; and a processor for executing a process including: activating the test system to execute test on the subsystem, collecting test information from the test system, and storing the test result information while the subsystem has the same configuration as the existing system; confirming the test system has been modified; and activating the test system to execute test on the subsystem, collecting test result information from the test system, and storing the test result information while the subsystem has the same configuration as the modified system.

摘要翻译： 一种用于通过使用包括具有与现有子系统和修改系统中的任一个具有相同配置的子系统的测试系统来评估现有系统对修改系统的改变的装置包括：存储器，用于存储测试系统的配置信息和测试 信息; 以及用于执行处理的处理器，包括：激活测试系统以在子系统上执行测试，从测试系统收集测试信息，并且在子系统具有与现有系统相同的配置的情况下存储测试结果信息; 确认测试系统已经修改; 激活测试系统对子系统执行测试，从测试系统收集测试结果信息，并在子系统与修改后的系统配置相同的情况下存储测试结果信息。

公开(公告)号：US08219690B2

公开(公告)日：2012-07-10

申请号：US12750664

申请日：2010-03-30

申请人： Soichi Shigeta ,  Yuji Imai

发明人： Soichi Shigeta ,  Yuji Imai

IPC分类号： G06F15/16

CPC分类号： H04L29/12028 ,  H04L61/103 ,  H04L61/2015

摘要： An internet-protocol address assignment control apparatus obtains, via an interface provided in a first communication device, a first unique number for a first interface provided in a server apparatus connected to the interface provided in the first communication device and a second unique number for a second interface provided in the server apparatus connected to an interface provided in a second communication device. The apparatus stores, in a storage, the obtained second unique number for the second interface provided in the server apparatus on a basis of the first unique number for the first interface provided in the server apparatus.

摘要翻译： 互联网协议地址分配控制装置经由第一通信装置中提供的接口获得设置在连接到第一通信装置中提供的接口的服务器装置中的第一接口的第一唯一号码和第二唯一号码， 第二接口，设置在连接到设置在第二通信设备中的接口的服务器设备中。 该装置在存储器中，根据服务器装置中提供的第一接口的第一唯一编号，在服务器装置中存储获得的第二接口的第二唯一编号。