公开(公告)号：US08692111B2

公开(公告)日：2014-04-08

申请号：US13298136

申请日：2011-11-16

申请人： Taeseok Kim ,  Gabriel Harley ,  David D. Smith ,  Peter John Cousins

发明人： Taeseok Kim ,  Gabriel Harley ,  David D. Smith ,  Peter John Cousins

IPC分类号： H01L21/00 ,  H01L31/00

CPC分类号： H01L31/1804 ,  H01L31/022441 ,  H01L31/0682 ,  Y02E10/547 ,  Y02P70/521

摘要： Contact holes of solar cells are formed by laser ablation to accommodate various solar cell designs. Throughput of the solar cell ablation process is improved by incorporating linear base diffusion regions with narrow width, for example as compared to an overlying metal contact. Throughput of the solar cell ablation process may also be improved by having contact holes to base diffusion regions that are perpendicular to contact holes to emitter diffusion regions. To allow for continuous laser scanning, a laser blocking layer may be located over an interlayer dielectric to prevent contact hole formation on certain regions, such as regions where a metal contact of one polarity may electrically shunt to a diffusion region of opposite polarity. In a hybrid design, a solar cell may have both linear and dotted base diffusion regions. An electro-optical modulator may be employed to allow for continuous laser scanning in dotted base diffusion designs.

摘要翻译： 通过激光烧蚀形成太阳能电池的接触孔，以适应各种太阳能电池设计。 通过结合具有窄宽度的线性基极扩散区域，例如与覆盖的金属接触相比，改善了太阳能电池烧蚀过程的吞吐量。 通过将与接触孔垂直的基底扩散区域的接触孔设置到发射极扩散区，也可以改善太阳能电池烧蚀过程的吞吐量。 为了允许连续激光扫描，激光阻挡层可以位于层间电介质上方，以防止在某些区域（例如一个极性的金属接触可以电分流到相反极性的扩散区域的区域）上的接触孔形成。 在混合设计中，太阳能电池可以具有线性和点状的基极扩散区域。 可以使用电光调制器来允许在虚点扩散设计中的连续激光扫描。

公开(公告)号：US08586403B2

公开(公告)日：2013-11-19

申请号：US13028059

申请日：2011-02-15

申请人： Gabriel Harley ,  David D. Smith ,  Tim Dennis ,  Ann Waldhauer ,  Taeseok Kim ,  Peter John Cousins

发明人： Gabriel Harley ,  David D. Smith ,  Tim Dennis ,  Ann Waldhauer ,  Taeseok Kim ,  Peter John Cousins

IPC分类号： H01L21/00

CPC分类号： H01L31/02168 ,  H01L31/022441 ,  H01L31/0682 ,  H01L31/1804 ,  Y02E10/52 ,  Y02E10/547 ,  Y02P70/521

摘要： Contact holes of solar cells are formed by laser ablation to accommodate various solar cell designs. Use of a laser to form the contact holes is facilitated by replacing films formed on the diffusion regions with a film that has substantially uniform thickness. Contact holes may be formed to deep diffusion regions to increase the laser ablation process margins. The laser configuration may be tailored to form contact holes through dielectric films of varying thicknesses.

摘要翻译： 通过激光烧蚀形成太阳能电池的接触孔，以适应各种太阳能电池设计。 通过用具有基本上均匀的厚度的膜代替在扩散区上形成的膜来促进使用激光来形成接触孔。 接触孔可以形成到深扩散区域，以增加激光烧蚀过程边缘。 可以调整激光器配置以通过不同厚度的介电膜形成接触孔。

公开(公告)号：US08324015B2

公开(公告)日：2012-12-04

申请号：US12895437

申请日：2010-09-30

申请人： Gabriel Harley ,  David Smith ,  Peter Cousins

发明人： Gabriel Harley ,  David Smith ,  Peter Cousins

IPC分类号： H01L21/00

CPC分类号： H01L31/02008 ,  H01L31/022441 ,  H01L31/0682 ,  Y02E10/547

摘要： The formation of solar cell contacts using a laser is described. A method of fabricating a back-contact solar cell includes forming a poly-crystalline material layer above a single-crystalline substrate. The method also includes forming a dielectric material stack above the poly-crystalline material layer. The method also includes forming, by laser ablation, a plurality of contacts holes in the dielectric material stack, each of the contact holes exposing a portion of the poly-crystalline material layer; and forming conductive contacts in the plurality of contact holes.

摘要翻译： 描述了使用激光器形成太阳能电池触点。 制造背接触太阳能电池的方法包括在单晶衬底上形成多晶材料层。 该方法还包括在多晶材料层上形成介电材料堆叠。 该方法还包括通过激光烧蚀形成介电材料堆叠中的多个接触孔，每个接触孔暴露多晶材料层的一部分; 以及在所述多个接触孔中形成导电接触。

公开(公告)号：US08263899B2

公开(公告)日：2012-09-11

申请号：US12829275

申请日：2010-07-01

申请人： Gabriel Harley ,  Thomas Pass ,  Peter John Cousins ,  John Viatella

发明人： Gabriel Harley ,  Thomas Pass ,  Peter John Cousins ,  John Viatella

IPC分类号： B23K26/067

CPC分类号： B23K26/40 ,  B23K26/067 ,  B23K26/082 ,  B23K26/0823 ,  B23K2103/50 ,  H01L31/02168 ,  H01L31/022441 ,  H01L31/0682 ,  H01L31/18 ,  H01L31/202 ,  Y02E10/52 ,  Y02E10/547

摘要： A solar cell is formed using a solar cell ablation system. The ablation system includes a single laser source and several laser scanners. The laser scanners include a master laser scanner, with the rest of the laser scanners being slaved to the master laser scanner. A laser beam from the laser source is split into several laser beams, with the laser beams being scanned onto corresponding wafers using the laser scanners in accordance with one or more patterns. The laser beams may be scanned on the wafers using the same or different power levels of the laser source.

摘要翻译： 使用太阳能电池消融系统形成太阳能电池。 消融系统包括单个激光源和几个激光扫描仪。 激光扫描仪包括主激光扫描仪，其余的激光扫描仪从属于主激光扫描仪。 来自激光源的激光束被分成几个激光束，根据一个或多个图案，使用激光扫描仪将激光束扫描到相应的晶片上。 可以使用激光源的相同或不同功率水平在晶片上扫描激光束。