公开(公告)号：US5831163A

公开(公告)日：1998-11-03

申请号：US779464

申请日：1997-01-07

申请人： Kazuhiro Okada

发明人： Kazuhiro Okada

IPC分类号： G01C19/56 ,  G01P3/44

CPC分类号： G01P15/0907 ,  G01C19/56 ,  G01P15/0922 ,  G01P15/11 ,  G01P15/123 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/084

摘要： A flexible substrate (110) having flexibility and a fixed substrate (120) disposed so as to oppose it are supported at their peripheral portions by a sensor casing (140). An oscillator (130) is fixed on the lower surface of the flexible substrate. Five lower electrode layers (F1 to F5: F1 and F2 are disposed at front and back of F5) are formed on the upper surface of the flexible substrate. Five upper electrode layers (E1 to E5) are formed on the lower surface of the fixed substrate so as to oppose the lower electrodes. In the case of detecting an angular velocity .omega.x about the X-axis, an a.c. voltage is applied across a predetermined pair of opposite electrode layers (E5, F5) to allow the oscillator to undergo oscillation Uz in the Z-axis direction. By change of the capacitance value, it is possible to detect the magnitude of the Coriolis force Fy, and to determine angular velocity .omega.x. Similarly, it is possible to detect an angular velocity .omega.y about the Y-axis and an angular velocity .omega.z about the Z-axis.

摘要翻译： 具有柔性的柔性基板（110）和与其相对设置的固定基板（120）通过传感器外壳（140）支撑在其周边部分。 振荡器（130）固定在柔性基板的下表面上。 在柔性基板的上表面上形成有五个下电极层（F1至F5：F1和F2设置在F5的前后）。 在固定基板的下表面上形成五个上电极层（E1至E5），以与下电极相对。 在检测围绕X轴的角速度ωx的情况下， 电压施加在预定的一对相对电极层（E5，F5）上，以允许振荡器在Z轴方向上经历振荡Uz。 通过电容值的变化，可以检测科里奥利力Fy的大小，并确定角速度ωx。 类似地，可以检测关于Y轴的角速度ωy和围绕Z轴的角速度ωz。

公开(公告)号：US5780749A

公开(公告)日：1998-07-14

申请号：US819684

申请日：1997-03-17

申请人： Kazuhiro Okada

发明人： Kazuhiro Okada

IPC分类号： G01L1/16 ,  G01L5/16 ,  G01P15/09 ,  G01P15/18 ,  G01R33/02 ,  G01L3/00

CPC分类号： G01L5/167 ,  G01P2015/084 ,  Y10S73/04

摘要： The periphery of a disk having flexibility is fixed to a sensor casing, and a force applied to the central portion is detected. A doughnut disk-shaped piezoelectric element is positioned on the upper surface of the disk, and upper electrode layers indicated by patterns of D1 to D6 are formed on the upper surface of the piezoelectric element. Further, lower electrode layers similarly having pattern of D1 to D6 are formed on the lower surface of the piezoelectric element, and the lower surface of the lower electrode layer is fixed on the upper surface of the disk. Six detection elements D1 to D6 are formed each of which is constituted by a pair of upper and lower electrode layers and a portion of piezoelectric element put therebetween. Thus, force components exerted at an origin defined in the central portion of the disk in respective axes directions of X, Y, Z can be detected based on charges produced in detection elements D1, D2, detection elements D3, D4, and detection elements D5, D6, respectively.

摘要翻译： 具有柔性的盘的周边固定到传感器外壳，并且检测施加到中心部分的力。 圆环形压电元件位于盘的上表面上，在压电元件的上表面上形成由D1至D6的图案表示的上电极层。 此外，在压电元件的下表面上形成类似地具有D1至D6图案的下电极层，并且下电极层的下表面固定在盘的上表面上。 形成六个检测元件D1至D6，每个检测元件由一对上下电极层和放置在其间的一部分压电元件构成。 因此，可以基于在检测元件D1，D2，检测元件D3，D4和检测元件D5中产生的电荷来检测施加在盘的中心部分中的原点在X，Y，Z的各个轴线方向上的力分量 ，D6。

公开(公告)号：US5744718A

公开(公告)日：1998-04-28

申请号：US641078

申请日：1996-04-26

申请人： Kazuhiro Okada

发明人： Kazuhiro Okada

IPC分类号： G01L1/14 ,  G01L1/18 ,  G01L5/16 ,  G01L25/00 ,  G01P15/12 ,  G01P15/125 ,  G01P15/18 ,  G01P21/00 ,  G01P15/08

CPC分类号： G01P21/00 ,  G01L1/148 ,  G01L1/18 ,  G01L25/00 ,  G01L5/162 ,  G01P15/123 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/084

摘要： A sensor comprises a semiconductor pellet (10) including a working portion (11) adapted to undergo action of a force, a fixed portion (13) fixed on the sensor body, and a flexible portion (13) having flexibility formed therebetween, a working body (20) for transmitting an exterted force to the working portion, and detector means (60-63) for transforming a mechanical deformation produced in the semiconductor pellet to an electric signal to thereby detect a force exerted on the working body as an electric signal. A signal processing circuit is applied to the sensor. This circuit uses analog multipliers (101-109) and analog adders/subtracters (111-113), and has a function to cancel interference produced in different directions. Within the sensor, two portions (E3, E4-E8) located at positions opposite to each other and producing a displacement therebetween by action of a force are determined. By exerting a coulomb force between both the portions, the test of the sensor is carried out. Further, a pedestal (21, 22) is provided around the working body (20). The working body and the pedestal are located with a predetermined gap or spacing therebetween. A displacement of the working body is caused to limitatively fall within a predetermined range corresponding to the spacing. The working body and the pedestal are provided by cutting a same common substrate (350, 350').

摘要翻译： 传感器包括半导体颗粒（10），其包括适于承受力的作用部分（11），固定在传感器主体上的固定部分（13）和在其之间形成柔性的柔性部分（13），工作 用于向工作部分传递消除的力的主体（20）和用于将半导体芯片中产生的机械变形变换为电信号的检测器装置（60-63），从而检测施加在工作体上的力作为电信号 。 信号处理电路被应用于传感器。 该电路使用模拟乘法器（101-109）和模拟加法器/减法器（111-113），并具有消除在不同方向产生的干扰的功能。 在传感器内，确定位于彼此相对的位置并通过力的作用产生位移之间的两个部分（E3，E4-E8）。 通过在两个部分之间施加库仑力，进行传感器的测试。 此外，在工作体（20）周围设置基座（21,22）。 工作体和基座以其间具有预定的间隙或间隔而定位。 导致工作体的位移被限制地落在对应于间隔的预定范围内。 通过切割相同的公共衬底（350,350'）来提供工作体和基座。

公开(公告)号：US5639973A

公开(公告)日：1997-06-17

申请号：US647178

申请日：1996-05-09

申请人： Kazuhiro Okada

发明人： Kazuhiro Okada

IPC分类号： B81B3/00 ,  G01L1/14 ,  G01L5/16 ,  G01P15/08 ,  G01P15/09 ,  G01P15/105 ,  G01P15/125 ,  G01P15/18 ,  G02L3/00

CPC分类号： G01P15/18 ,  G01L1/144 ,  G01L5/165 ,  G01L5/167 ,  G01P15/0802 ,  G01P15/0922 ,  G01P15/105 ,  G01P15/125 ,  G01P2015/084 ,  Y10S73/04 ,  Y10T29/43 ,  Y10T29/49005 ,  Y10T29/49007

摘要： An electrode layer is formed on the upper surface of a first substrate, and a processing for partially removing the substrate is carried out in order to allow the substrate to have flexibility. To the lower surface of the first substrate, a second substrate is connected. Then, by cutting the second substrate, a working body and a pedestal are formed. On the other hand, a groove is formed on a third substrate. An electrode layer is formed on the bottom surface of the groove. The third substrate is connected to the first substrate so that both the electrodes face to each other with a predetermined spacing therebetween. Finally, the first, second and third substrates are cut off every respective unit regions to form independent sensors, respectively. When an acceleration is exerted on the working body, the first substrate bends. As a result, the distance between both the electrodes changes. Thus, an acceleration exerted is detected by changes in an electrostatic capacitance between both the electrodes.

摘要翻译： 在第一基板的上表面上形成电极层，进行部分除去基板的处理，以使基板具有挠性。 连接到第一基板的下表面，连接第二基板。 然后，通过切割第二基板，形成工作体和基座。 另一方面，在第三基板上形成槽。 在槽的底面上形成电极层。 第三基板连接到第一基板，使得两个电极以彼此之间的预定间隔彼此面对。 最后，第一，第二和第三基板分别切断各个单元区域以分别形成独立的传感器。 当对工作体施加加速度时，第一基板弯曲。 结果，两个电极之间的距离变化。 因此，通过两个电极之间的静电电容的变化来检测施加的加速度。

公开(公告)号：US5531092A

公开(公告)日：1996-07-02

申请号：US393801

申请日：1995-02-24

申请人： Kazuhiro Okada

发明人： Kazuhiro Okada

IPC分类号： G01L1/14 ,  G01L1/18 ,  G01L5/16 ,  G01L25/00 ,  G01P15/12 ,  G01P15/125 ,  G01P15/18 ,  G01P21/00 ,  G01P15/04

CPC分类号： G01P21/00 ,  G01L1/148 ,  G01L1/18 ,  G01L25/00 ,  G01L5/162 ,  G01P15/123 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/084

摘要： A sensor comprises a semiconductor pellet (10) including a working portion (11) adapted to undergo action of a force, a fixed portion (13) fixed on the sensor body, and a flexible portion (13) having flexibility formed therebetween, a working body (20) for transmitting an exterted force to the working portion, and detector means (60-63) for transforming a mechanical deformation produced in the semiconductor pellet to an electric signal to thereby detect a force exerted on the working body as an electric signal. A signal processing circuit is applied to the sensor. This circuit uses analog multipliers (101-109) and analog adders/subtracters (111-113), and has a function to cancel interference produced in different directions. Within the sensor, two portions (E3, E4-8) located at positions opposite to each other and producing a displacement therebetween by action of a force are determined. By exerting a coulomb force between both the portions, the test of the sensor is carried out. Further, a pedestal (21, 22) is provided around the working body (20). The working body and the pedestal are located with a predetermined gap or spacing therebetween. A displacement of the working body is caused to limitatively fall within a predetermined range corresponding to the spacing. The working body and the pedestal are provided by cutting a same common substrate (350, 350').

摘要翻译： 传感器包括半导体颗粒（10），其包括适于承受力的作用部分（11），固定在传感器主体上的固定部分（13）和在其之间形成柔性的柔性部分（13），工作 用于向工作部分传递消除的力的主体（20）和用于将半导体芯片中产生的机械变形变换为电信号的检测器装置（60-63），从而检测施加在工作体上的力作为电信号 。 信号处理电路被应用于传感器。 该电路使用模拟乘法器（101-109）和模拟加法器/减法器（111-113），并具有消除在不同方向产生的干扰的功能。 在传感器内，确定位于彼此相对的位置并通过力的作用产生位移之间的两个部分（E3，E4-8）。 通过在两个部分之间施加库仑力，进行传感器的测试。 此外，在工作体（20）的周围设置基座（21,22）。 工作体和基座以其间具有预定的间隙或间隔而定位。 导致工作体的位移被限制地落在对应于间隔的预定范围内。 通过切割相同的公共衬底（350,350'）来提供工作体和基座。

公开(公告)号：US5492020A

公开(公告)日：1996-02-20

申请号：US952753

申请日：1992-11-30

申请人： Kazuhiro Okada

发明人： Kazuhiro Okada

IPC分类号： G01L5/16 ,  G01L25/00 ,  G01P15/09 ,  G01P15/125 ,  G01P21/00 ,  G01L1/00

CPC分类号： G01P1/023 ,  G01L25/00 ,  G01L5/165 ,  G01L5/167 ,  G01P15/0922 ,  G01P15/125 ,  G01P15/18 ,  G01P21/00 ,  G01P2015/084

摘要： A fixed substrate (10) having rigidity and a flexible substrate (20) having flexibility are arranged in such a manner that they are opposite to each other. Both the substrates are fixed at their peripheral portions by a detector casing (40). A working body (30) is connected onto the lower surface of the flexible substrate. Test electrodes (11t, 13t, 15t) are formed on the lower surface of the fixed substrate, and fixed electrodes (11, 13, 15) are further formed through an insulating layer (16). Displacement electrodes (21, 23, 25) are formed on the upper surface of the flexible substrate. When an acceleration is exerted on the working body, the flexible substrate is bent, so the distance between the fixed electrode and the displacement electrode is varied. By detecting the change of distance as a change of the electrostatic capacitance between both the electrodes, it is possible to detect an acceleration exerted. In order to carry out the operation test of this detector, a voltage is applied across the test electrode and the displacement electrode, thus allowing coulomb force to be exerted between both the electrodes. Thus, the flexible substrate is bent by coulomb force, resulting in the same state as the state where an acceleration is exerted. By examining a change of the electrostatic capacitance between the fixed electrode and the displacement electrode, the operation test can be conducted.

摘要翻译： PCT No.PCT / JP91 / 00428 Sec。 371日期：1992年11月30日 102（e）日期1991年11月30日PCT 1991年3月30日PCT。具有刚性的固定基板（10）和具有柔性的柔性基板（20）以彼此相对的方式布置。 两个基板通过检测器壳体（40）固定在其周边部分。 工作体（30）连接到柔性基板的下表面上。 测试电极（11t，13t，15t）形成在固定基板的下表面上，并且通过绝缘层（16）进一步形成固定电极（11,13,15）。 在柔性基板的上表面上形成位移电极（21,23,25）。 当对工作体施加加速度时，柔性基板弯曲，固定电极与位移电极之间的距离变化。 通过检测距离的变化作为两个电极之间的静电电容的变化，可以检测所施加的加速度。 为了进行该检测器的运行试验，在测试电极和位移电极之间施加电压，从而允许在两个电极之间施加库伦力。 因此，柔性基板通过库仑力弯曲，导致与施加加速度的状态相同的状态。 通过检查固定电极和位移电极之间的静电电容的变化，可以进行操作试验。

公开(公告)号：US5406848A

公开(公告)日：1995-04-18

申请号：US292496

申请日：1994-08-18

申请人： Kazuhiro Okada

发明人： Kazuhiro Okada

IPC分类号： B81B3/00 ,  G01L1/14 ,  G01L5/16 ,  G01P15/08 ,  G01P15/09 ,  G01P15/105 ,  G01P15/125 ,  G01P15/18

CPC分类号： G01P15/18 ,  G01L1/144 ,  G01L5/165 ,  G01L5/167 ,  G01P15/0802 ,  G01P15/0922 ,  G01P15/105 ,  G01P15/125 ,  G01P2015/084 ,  Y10S73/04 ,  Y10T29/43 ,  Y10T29/49005 ,  Y10T29/49007

摘要： An electrode layer is formed on the upper surface of a first substrate, and a processing for partially removing the substrate is carried out in order to allow the substrate to have flexibility. To the lower surface of the first substrate, a second substrate is connected. Then, by cutting the second substrate, a working body and a pedestal are formed. On the other hand, a groove is formed on a third substrate. An electrode layer is formed on the bottom surface of the groove. The third substrate is connected to the first substrate so that both the electrodes face to each other with a predetermined spacing therebetween. Finally, the first, second and third substrates are cut off every respective unit regions to form independent sensors, respectively. When an acceleration is exerted on the working body, the first substrate bends. As a result, the distance between both the electrodes changes. Thus, an acceleration exerted is detected by changes in an electrostatic capacitance between both the electrodes.

摘要翻译： 在第一基板的上表面上形成电极层，进行部分除去基板的处理，以使基板具有挠性。 连接到第一基板的下表面，连接第二基板。 然后，通过切割第二基板，形成工作体和基座。 另一方面，在第三基板上形成槽。 在槽的底面上形成电极层。 第三基板连接到第一基板，使得两个电极以彼此之间的预定间隔彼此面对。 最后，第一，第二和第三基板分别切断各个单元区域以分别形成独立的传感器。 当对工作体施加加速度时，第一基板弯曲。 结果，两个电极之间的距离变化。 因此，通过两个电极之间的静电电容的变化来检测施加的加速度。

公开(公告)号：US5182515A

公开(公告)日：1993-01-26

申请号：US559381

申请日：1990-07-25

申请人： Kazuhiro Okada

发明人： Kazuhiro Okada

IPC分类号： G01L1/18 ,  G01L5/16 ,  G01P15/08 ,  G01P15/12 ,  G01P15/18 ,  G01R1/20 ,  G01R33/038

CPC分类号： G01R33/038 ,  G01L1/18 ,  G01L5/162 ,  G01P15/0802 ,  G01P15/123 ,  G01P15/18 ,  G01P2015/084 ,  Y10S73/10

摘要： A force detector is comprised of resistance elements having a piezo resistance effect such that electric resistance varies due to mechanical deformation, and formed on a single crystal substrate (10), and a strain generative body (20) having a supporting portion (21) and a working portion (23), thus allowing the resistance elements to produce a mechanical deformation on the basis of a displacement with respect to the supporting portion of the working portion. This force detector can detect a force applied to the working portion as changes in resistance values of the resistance elements. The plane on which resistance elements are to be formed on the single crystal substrate is selected so that piezo resistance coefficients in two directions perpendicular to each other exhibit peak. When a weight body (30) is connected to the working portion, it is possible to detect an acceleration acting on the weight body. Moreover, when a magnetic body (330) is connected to the working portion, it is possible to detect a nagnetic force acting on the magnetic body. By using the detector system for acceleration in common to the detector system for magnetic force to perform a compensation computation, detection of a magnetic force which is not influences by acceleration can be made. By devising an arerangement of resistance elements in either detector, it is possible to independently determine magnitudes of objects to be measured with respect to directions of the three-dimensional coordinate system, respectively.

摘要翻译： 力检测器由具有压电阻效应的电阻元件构成，使得电阻由于机械变形而变化，并形成在单晶基板（10）上，并且具有支撑部（21）的应变生成体（20）和 工作部分（23），从而允许电阻元件基于相对于工作部分的支撑部分的位移而产生机械变形。 该力检测器可以检测施加到工作部分的力作为电阻元件的电阻值的变化。 选择在单晶基板上形成电阻元件的平面，使得彼此垂直的两个方向上的压电阻抗系数呈现峰值。 当重量体（30）连接到工作部分时，可以检测作用在配重上的加速度。 此外，当磁体（330）连接到工作部分时，可以检测作用在磁体上的磁力。 通过使用用于磁力检测器系统共同加速的检测器系统来执行补偿计算，可以检测不受加速影响的磁力。 通过设计任一个检测器中的电阻元件的排列，可以分别独立地确定相对于三维坐标系的方向测量的物体的大小。

公开(公告)号：US4969366A

公开(公告)日：1990-11-13

申请号：US432796

申请日：1989-11-07

申请人： Kazuhiro Okada

发明人： Kazuhiro Okada

IPC分类号： G01L1/18 ,  G01L5/16

CPC分类号： G01L5/162 ,  G01L1/18

摘要： Force and moment exerted on the working point (P) on a semiconductor substrate (110, 210), on one surface of which resistance elements (r, R) having an electric resistance varying due to mechanical deformation are formed, are detected. A portion spaced from the working point of the semiconductor substrate is fixed. Since openings (113) or bridge portions (212 to 215) are formed in the semiconductor substrate, when a force or an angular moment in a fixed direction is applied to the working point, uneven stresses are produced on the semiconductor substrate. Such uneven stesses are detected as changes in electric resistances of the resistance elements. A measure is taken for an arrangement of resistance elements on the semiconductor substrate, thereby to constitute predetermined bridges. Thus, forces in three directions and angular moments in three directions in the three-dimensional space can be independently read as bridge voltages, respectively.

公开(公告)号：US08819147B2

公开(公告)日：2014-08-26

申请号：US12370990

申请日：2009-02-13

申请人： Kazuhiro Okada

发明人： Kazuhiro Okada

IPC分类号： G06F15/16 ,  H04L12/58

CPC分类号： H04L12/58 ,  H04L51/22 ,  H04L51/28 ,  H04L51/30

摘要： In an e-mail receiving apparatus, a user management table arranged to include each combination of a user ID that is used for identifying a plurality of users and a unique ID that is newly set each time a new user is registered in an S/MIME gateway apparatus. A received e-mail management table is arranged to include a plurality of records each indicating an association relation between each e-mail received from an e-mail server apparatus, and the user ID and the unique ID of a destination user of the corresponding e-mail. A main control unit is arranged to read out each record of the received e-mail management table, determine whether or not the unique ID related to the read-out record is in the user management table, and delete the read-out record from the received e-mail management table when the unique ID is not in the user management table. Accordingly, a system is provided in which, when a registration of a user of a distribution destination is deleted, received e-mails are properly processed.

摘要翻译： 在电子邮件接收装置中，用户管理表被配置为包括用于识别多个用户的用户ID的每个组合以及每当新用户在S / MIME中注册时新设置的唯一ID 网关设备 接收到的电子邮件管理表被布置为包括多个记录，每个记录指示从电子邮件服务器装置接收的每个电子邮件之间的关联关系，以及用户ID和对应的e的目的地用户的唯一ID -邮件。 主控制单元被配置为读取所接收的电子邮件管理表的每个记录，确定与读出的记录有关的唯一ID是否在用户管理表中，并从该读取记录中删除读出的记录 当唯一ID不在用户管理表中时，收到电子邮件管理表。 因此，提供一种系统，其中当分发目的地的用户的注册被删除时，接收的电子邮件被适当地处理。