公开(公告)号：US08657346B2

公开(公告)日：2014-02-25

申请号：US12624579

申请日：2009-11-24

申请人： Tsutomu Okabe ,  Toshihiko Miyajima ,  Hiroshi Igarashi

发明人： Tsutomu Okabe ,  Toshihiko Miyajima ,  Hiroshi Igarashi

IPC分类号： E05C1/06 ,  B65D85/00

CPC分类号： H01L21/67772 ,  Y10T292/0808 ,  Y10T292/0824 ,  Y10T292/0845 ,  Y10T292/1021 ,  Y10T292/1038

摘要： The FIMS system is for use with a pod composed of a lid having an engaged portion provided on the outer surface thereof and a pod body having a latch mechanism including an engagement portion that engages the engaged portion as it moves along a predetermined axis to fix the lid to the pod. The FIMS system has a latch mechanism drive means for driving the latch mechanism along a certain axis and an engagement portion position sensor that can generate a signal indicating whether the engagement portion is at an engagement position or non-engagement position when the latch mechanism drive means drives the latch mechanism. The latch mechanism drive means and the engagement portion position sensor are provided in the vicinity of a first opening portion of the FIMS system.

摘要翻译： FIMS系统用于由盖子组成的盒盖，盖子具有设置在其外表面上的接合部分，以及盒体，其具有闩锁机构，该闩锁机构包括接合部分，该接合部分沿着预定轴线移动时与接合部分接合以固定 盖到荚。 FIMS系统具有用于沿着某个轴线驱动闩锁机构的闩锁机构驱动装置和接合部位置传感器，当闩锁机构驱动装置可以产生指示接合部分是否处于接合位置或非接合位置的信号 驱动闩锁机构。 闩锁机构驱动装置和接合部位置传感器设置在FIMS系统的第一开口部分附近。

公开(公告)号：US20130011223A1

公开(公告)日：2013-01-10

申请号：US13541101

申请日：2012-07-03

申请人： Jun Emoto ,  Tadamasa Iwamoto ,  Toshihiko Miyajima

发明人： Jun Emoto ,  Tadamasa Iwamoto ,  Toshihiko Miyajima

IPC分类号： H01L21/677

CPC分类号： H01L21/67772

摘要： To prevent an inert gas from stagnating in an internal space of a mount base of a load port apparatus, the load port apparatus includes: an outside air supply device for introducing an air from an external space, in which an operator works, into the internal space of the mount base; a casing surrounding a space in which a drive mechanism for a door is arranged; and a duct through which a gas inside the internal space of the casing is dischargeable.

摘要翻译： 为了防止惰性气体滞留在装载口装置的安装基座的内部空间内，负载端口装置包括：外部空气供应装置，用于将来自操作者工作的外部空间的空气引入到内部 底座的空间; 围绕其中布置有用于门的驱动机构的空间的壳体; 以及管道，其中壳体的内部空间内的气体可以通过该管道排出。

公开(公告)号：US20110215028A1

公开(公告)日：2011-09-08

申请号：US13041786

申请日：2011-03-07

申请人： Hiroshi Igarashi ,  Toshihiko Miyajima ,  Tsutomu Okabe

发明人： Hiroshi Igarashi ,  Toshihiko Miyajima ,  Tsutomu Okabe

IPC分类号： B65D85/86 ,  E05F11/02

CPC分类号： E05F11/02 ,  Y10S292/11 ,  Y10S292/25 ,  Y10T292/0803 ,  Y10T292/0805 ,  Y10T292/0808 ,  Y10T292/0811 ,  Y10T292/0824 ,  Y10T292/0845 ,  Y10T292/0859 ,  Y10T292/0886 ,  Y10T292/1021 ,  Y10T292/1038

摘要： The substrate storage pod includes an engagement portion in an outer side surface of a lid of the pod, and an insertion slot through which the engagement portion can be accessed from an external space; the insertion slot is formed in a flange portion arranged around the periphery of an opening in the pod and into which the lid can be fitted, and a latch mechanism supported so as to be slidable in a direction parallel to a flange side wall in a pod main body-surface of the flange portion. An engaging portion of the latch mechanism reaches the engagement portion via the insertion slot. The engagement portion is switched between an engaged state and a non-engaged state in response to movement of the latch mechanism.

摘要翻译： 所述基板收容容器在所述容器的盖的外侧面上具有接合部，所述插入槽能够从外部空间接合所述卡合部; 插入槽形成在布置在容器中的开口的周边周围的凸缘部分中，并且盖可以被装配到该凸缘部分中;以及闩锁机构，该闩锁机构被支撑以能够在平行于壳体中的凸缘侧壁的方向上滑动 凸缘部分的主体表面。 闩锁机构的接合部分经由插入槽到达接合部分。 响应于闩锁机构的移动，接合部分在接合状态和非接合状态之间切换。

公开(公告)号：US20110210041A1

公开(公告)日：2011-09-01

申请号：US13035335

申请日：2011-02-25

申请人： Tsutomu OKABE ,  Toshihiko Miyajima

发明人： Tsutomu OKABE ,  Toshihiko Miyajima

IPC分类号： B65D85/00

CPC分类号： H01L21/67393

摘要： The substrate storage pod includes a pod case which includes a hollow inner space for storing a substrate, and an opening; a lid member which is capable of sealing the opening; an exhaust port for exhausting a replacement gas in the hollow inner space of the pod case; and an exhaust space which is defined in the hollow inner space so as to communicate to the exhaust port. The exhaust space is defined in the hollow inner space by a multi-hole partition member including multiple holes and by an inner surface of the pod case. In the substrate storage pod, back pressure on an exhaust side can be lowered, and hence dust in the pod can be collected to the exhaust side.

摘要翻译： 基材储存容器包括一个荚壳，它包括用于储存基材的中空内部空间和开口; 能够密封开口的盖构件; 用于排出所述荚壳的中空内部空间中的置换气体的排气口; 以及限定在中空内部空间中以与排气口连通的排气空间。 排气空间通过包括多个孔的多孔分隔构件和荚壳的内表面限定在中空内空间中。 在基材储存容器中，可以降低排气侧的背压，从而可以将荚内的灰尘收集到排气侧。

公开(公告)号：US20100059408A1

公开(公告)日：2010-03-11

申请号：US12491574

申请日：2009-06-25

申请人： Hiroshi IGARASHI ,  Toshihiko Miyajima ,  Tsutomu Okabe

发明人： Hiroshi IGARASHI ,  Toshihiko Miyajima ,  Tsutomu Okabe

IPC分类号： H01L21/673

CPC分类号： H01L21/67772 ,  Y10T292/0808 ,  Y10T292/0824 ,  Y10T292/0845 ,  Y10T292/1021 ,  Y10T292/1038

摘要： In a pod used in an FIMS system, diffusion of dust particles or the like adhering on the lid of the pod to the interior of the system is reduced. An engaged portion is provided inside the outer surface of the lid of the pod, and a flange portion provided around a pod opening to which the lid can be fitted is provided with an insertion hole that allows access to the engaged portion from the exterior space. A latch mechanism is supported on the pod body side surface of the flange portion in such a way that the latch mechanism can slide along a direction parallel to the side wall of the flange. An engagement portion of the latch mechanism reaches the engaged portion through the insertion hole, and the state of the latch mechanism changes between an engaged state and a disengaged state with movement of the latch mechanism.

摘要翻译： 在用于FIMS系统的荚中，减少了附着在荚的盖上的灰尘颗粒等的扩散到系统的内部。 一个啮合部分设置在荚的盖子的外表面内部，并且设置在可以装配盖子的荚壳开口周围的凸缘部分设置有允许从外部空间进入被接合部分的插入孔。 闩锁机构被支撑在凸缘部分的荚体主体侧表面上，使得闩锁机构可以沿着平行于凸缘的侧壁的方向滑动。 闩锁机构的接合部分通过插入孔到达接合部分，并且闩锁机构的状态随着闩锁机构的移动而在接合状态和脱离状态之间变化。

公开(公告)号：US20090035098A1

公开(公告)日：2009-02-05

申请号：US11949409

申请日：2007-12-03

申请人： Hiroshi IGARASHI ,  Toshihiko Miyajima

发明人： Hiroshi IGARASHI ,  Toshihiko Miyajima

IPC分类号： H01L21/677

CPC分类号： H01L21/67772 ,  H01L21/67373

摘要： An object is to provide a FIMS system that can be loaded with a plurality of low profile pods that are arranged vertically one above another. A tunnel is provided between a position on a support mechanism on which a pod is to be set and a mini environment that is in communication with the FISM. The position of the pod at which a lid of the pod is detached from the pod after the lid is held by a FIMS door and a position of the pod to which the pod is brought after the detachment of the lid and at which a wafer can be brought into/out of the pod are designed to be inside the tunnel. In addition, the lid detached from the pod and the door can be located in a housing space provided in the tunnel.

摘要翻译： 目的是提供一种能够加载多个垂直一个在另一个之上的低轮廓舱的FIMS系统。 一个隧道设置在一个支撑机构上的一个要安置一个荚的位置和一个与FISM通信的迷你环境之间。 在通过FIMS门保持盖子之后，在盖子的盖子从盒子上拆下的荚的位置以及在盖子脱离之后荚所带有的荚的位置，并且晶片可以在该位置处 被带入/离开荚是设计在隧道内。 此外，盖子从吊舱分离，门可以位于设置在隧道中的容纳空间中。

公开(公告)号：US07360985B2

公开(公告)日：2008-04-22

申请号：US10330098

申请日：2002-12-30

申请人： Tsutomu Okabe ,  Hiroshi Igarashi ,  Toshihiko Miyajima

发明人： Tsutomu Okabe ,  Hiroshi Igarashi ,  Toshihiko Miyajima

IPC分类号： B65G1/00 ,  E04H6/00 ,  H01L21/677 ,  A01H5/08

CPC分类号： H01L21/67772

摘要： The semiconductor wafer processing apparatus includes a clean box having an opening, a lid for closing the opening, a door to be in contact with the lid and to detach the lid from the clean box, a first stopper adapted to move in conjunction with movement of the clean box without a change in its relative positional relationship with the clean box, and an unmoved second stopper. With this structure, it is possible to prevent the clean box moved on the semiconductor wafer processing apparatus from colliding with the apparatus, even if the clean box manufactured by molding using a reinforced plastic in accordance with a prescribed standard includes a manufacturing error in its size.

摘要翻译： 半导体晶片处理装置包括具有开口的清洁盒，用于封闭开口的盖，与盖接触并将盖与清洁盒分离的门，第一挡块，其适于随着 干净的盒子与其相对的位置关系不会改变，并且有一个不动的第二个止动器。 利用这种结构，即使根据规定的标准通过使用强化塑料的成型而制造的清洁盒包括其尺寸的制造误差，也可以防止在半导体晶片处理装置上移动的清洁盒与装置碰撞 。

公开(公告)号：US06199604B1

公开(公告)日：2001-03-13

申请号：US09294006

申请日：1999-04-19

申请人： Toshihiko Miyajima

发明人： Toshihiko Miyajima

IPC分类号： B65G4900

CPC分类号： H01L21/67379 ,  H01L21/67017 ,  H01L21/67393

摘要： Using a clean box comprising a box body having an aperture in one side surface, a side lid for hermetically closing the aperture, and gas inlet and outlet valves provided in the box body and having neither an evacuation device nor a transfer device, the gas inlet and outlet valves are opened by a gas feeding/discharging mechanism in a state in which the aperture of the box body is closed by the side lid, a non-oxidizing gas is introduced through one of the gas inlet and outlet valves into the clean box, and a gas having filled the clean box before the introduction of the non-oxidizing gas is discharged through the other of the gas inlet and outlet valves.

摘要翻译： 使用包括在一个侧表面中具有孔的盒体的封闭箱，用于气密地关闭孔的侧盖以及设置在箱体中并且既没有排气装置也没有转运装置的气体入口和出口阀，气体入口 并且在箱体的开口被侧盖关闭的状态下，通过气体供给/排出机构打开出口阀，将非氧化性气体通过气体入口阀和出口阀中的一个导入清洁箱 并且在引入非氧化性气体之前填充了清洁箱的气体通过另一个气体入口和出口阀排出。

公开(公告)号：US5364219A

公开(公告)日：1994-11-15

申请号：US902720

申请日：1992-06-23

申请人： Tetsuo Takahashi ,  Eisaku Miyauchi ,  Toshihiko Miyajima ,  Hideaki Watanabe

发明人： Tetsuo Takahashi ,  Eisaku Miyauchi ,  Toshihiko Miyajima ,  Hideaki Watanabe

IPC分类号： B25J19/00 ,  B65D85/86 ,  B65G47/52 ,  B65G49/00 ,  B65G49/07 ,  F24F7/06 ,  H01L21/673 ,  H01L21/677 ,  B65G65/00

CPC分类号： H01L21/67724 ,  H01L21/67736 ,  H01L21/67772 ,  H01L21/67775 ,  Y10S414/139

摘要： A clean transfer system having a first vacuum chamber with a first transfer port, a first shutter for opening and closing the first transfer port and a first connecting member surrounding the first transfer port. The first connecting member is provided with at least an exterior portion. A second vaccum chamber includes a second transfer port, a second shutter for opening and closing the second transfer port, and a second connecting member surrounding the second transfer port. The second connecting member has at least an exterior portion. A closed space is formed between the first and second connecting members, so that the first and second shutters are movable within the closed space.

摘要翻译： 一种清洁的传送系统，具有具有第一传送口的第一真空室，用于打开和关闭第一传送口的第一快门以及围绕第一传送口的第一连接部件。 第一连接构件设置有至少外部部分。 第二真空室包括第二输送口，用于打开和关闭第二输送口的第二闸门以及围绕第二输送口的第二连接构件。 第二连接构件至少具有外部部分。 在第一和第二连接构件之间形成封闭空间，使得第一和第二快门在封闭空间内是可移动的。

公开(公告)号：US5139459A

公开(公告)日：1992-08-18

申请号：US662556

申请日：1991-02-28

申请人： Tetsuo Takahashi ,  Eisaku Miyauchi ,  Toshihiko Miyajima

发明人： Tetsuo Takahashi ,  Eisaku Miyauchi ,  Toshihiko Miyajima

IPC分类号： B65D6/40 ,  B65G49/00 ,  B65G49/07 ,  C23C14/56 ,  H01L21/00 ,  H01L21/677

CPC分类号： H01L21/67748 ,  H01L21/67126 ,  H01L21/67772 ,  H01L21/67775 ,  Y10S414/139

摘要： A clean transfer method capable of safely transferring a semiconductor or the like to various apparatus for treating the semiconductor while keeping the environment clean. In the method, the semiconductor is transferred between a vacuum clean box arranged in a clean room and kept at the degree of vacuum of 1 Torr or less and a vacuum chamber arranged in a maintenance room while transfer ports of the vacuum clean box and vacuum chamber are kept air-tightly connected to each other. The vacuum clean box is movably arranged.

摘要翻译： 一种清洁的转印方法，其能够将半导体等安全地转印到各种用于处理半导体的设备，同时保持环境清洁。 在该方法中，半导体在布置在洁净室中的真空清洁箱之间转移并保持在1Torr以下的真空度，在真空室和真空室的输送口配置在维护室内的真空室 保持彼此气密连接。 真空清洁箱可移动地布置。