公开(公告)号：US20070222034A1

公开(公告)日：2007-09-27

申请号：US11387086

申请日：2006-03-21

申请人： Yeonjoon Park ,  Sang Choi ,  Glen King ,  James Elliott ,  Diane Stoakley

发明人： Yeonjoon Park ,  Sang Choi ,  Glen King ,  James Elliott ,  Diane Stoakley

IPC分类号： H01L31/117

CPC分类号： C30B25/02 ,  C30B29/52 ,  H01L21/0242 ,  H01L21/0245 ,  H01L21/02502 ,  H01L21/02507 ,  H01L21/0251 ,  H01L21/02532

摘要： A lattice matched silicon germanium (SiGe) semiconductive alloy is formed when a {111} crystal plane of a cubic diamond structure SiGe is grown on the {0001} C-plane of a single crystalline Al2O3 substrate such that a orientation of the cubic diamond structure SiGe is aligned with a orientation of the {0001} C-plane. A lattice match between the substrate and the SiGe is achieved by using a SiGe composition that is 0.7223 atomic percent silicon and 0.2777 atomic percent germanium. A layer of Si1-xGex is formed on the cubic diamond structure SiGe. The value of X (i) defines an atomic percent of germanium satisfying 0.2277

摘要翻译： 当晶体匹配的硅锗（SiGe）半导体合金在单晶Al 2 O 2的{0001} C面上生长时，形成立方晶体结构SiGe的{111}晶面， 使得立方晶体结构SiGe的<110>取向与{0001} C面的<1,0，-1.0>取向对准。 通过使用硅原子比为0.7223原子％和0.2777原子百分比的锗的SiGe组合来实现衬底和SiGe之间的晶格匹配。 在立方晶体结构SiGe上形成一层Si 1-x Ge x S x。 X（i）的值定义了满足0.2277

公开(公告)号：US20120147379A1

公开(公告)日：2012-06-14

申请号：US12964381

申请日：2010-12-09

申请人： Sang Hyouk Choi ,  Yeonjoon Park

发明人： Sang Hyouk Choi ,  Yeonjoon Park

IPC分类号： G01J3/45

CPC分类号： G01J9/02 ,  G01N21/21 ,  G01N21/45

摘要： Disclosed is a system and method for characterizing optical materials, using steps and equipment for generating a coherent laser light, filtering the light to remove high order spatial components, collecting the filtered light and forming a parallel light beam, splitting the parallel beam into a first direction and a second direction wherein the parallel beam travelling in the second direction travels toward the material sample so that the parallel beam passes through the sample, applying various physical quantities to the sample, reflecting the beam travelling in the first direction to produce a first reflected beam, reflecting the beam that passes through the sample to produce a second reflected beam that travels back through the sample, combining the second reflected beam after it travels back though the sample with the first reflected beam, sensing the light beam produced by combining the first and second reflected beams, and processing the sensed beam to determine sample characteristics and properties.

摘要翻译： 公开了用于表征光学材料的系统和方法，使用用于产生相干激光的步骤和设备，过滤光以去除高阶空间分量，收集滤光并形成平行光束，将平行光束分成第一 方向和第二方向，其中沿第二方向行进的平行光束朝向材料样品行进，使得平行光束通过样品，向样品施加各种物理量，反射沿第一方向行进的光束，以产生第一反射 光束，反射通过样品的光束，以产生穿过样品返回的第二反射光束，当第二反射光束在通过样品与第一反射光束一起返回之后，将第二反射光束组合，感测通过组合第一反射光束产生的光束 和第二反射光束，并且处理感测光束以确定采样特性 美学和财产。